(１) Submicron processing line specialized for GaN Electronics
● Complete end-to-end process of GaN power devices from crystal growth to device fabrication
● Equipment capable of submicron feature fabrication, including an i-line stepper
● Operation management and contract fabrication services by technical development staff
● Shared user facility system with fee structure to allow use by outside organizations

(２)Target device
● GaN-on-GaN vertical power devices
● GaN-based optical devices
● AlGaN/GaN lateral HEMT devices
● Nitride semiconductor future devices