C-TEFs

Organization

CIRFE -
Transformative Electronics
Facilities

The Center for Integrated Research of Future Electronics ‒ Transformative Electronics Facilities( C-TEFs) is an experimental facility of IMaSS at Nagoya University. It has a large clean room of about 1,000 m²( Class 1,000 exposure area; Class 10,000 process area) for conducting accelerated crystal growth, device processes, and evaluation in GaN research and development.

Movie

C-TEFs : Center for Integrated Research of Future Electronics, Transformative Electronics Facilities Introduction video

  • introduction(2min. 37sec.)

Features

(1) Submicron processing line specialized for GaN Electronics
Complete end-to-end process of GaN power devices from crystal growth to device fabrication
Equipment capable of submicron feature fabrication, including an i-line stepper
Operation management and contract fabrication services by technical development staff
Shared user facility system with fee structure to allow use by outside organizations

 

(2)Target device
GaN-on-GaN vertical power devices
GaN-based optical devices
AlGaN/GaN lateral HEMT devices
Nitride semiconductor future devices

Show Member

Member

  • Director, Professor

    SUDA, Jun
  • Vice-Director・Designated Professor

    ONDA, Shoichi
  • Vice-Director・Designated Professor

    KACHI, Tetsu
  • Facility Control Manager・Designated Professor

    SASAOKA, Chiaki
  • Technical Staff Manager

    NISHII, Katsunori
  • Deputy Technical Staff Manager

    YOKOYAMA, Takahiro
  • Technical Staff

    AOTO, Koji
  • Technical Staff

    ITO, Masanao
  • Technical Staff

    OKABAYASHI, Shinji
  • Technical Staff

    KITANI, Takeshi
  • Technical Staff

    YAMAMOTO, Hiroki
  • Technical Staff

    YOSHITSUGU, Koji