Joint Usage / Research Center
Summary and Call for Proposals
Image of Shared Use
-
Research teams including researchers from other institutes/universities and IMaSS
Researchers from other
institutes/universities
(Research representative)
Researchers from IMaSS
▼
Joint research by utilizing the facilities, equipments, data, and other items of IMaSS.
Wide range of research from fundamental research on advanced materials and devices to
systems for their social implementations.
▼Realization of the development of environment-friendly and sustainable energy-saving and energy-creating technologies
(energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption).
Summary and Call for Proposals
Joint Usage/Research Center of energy-friendly and sustainable energy-saving and energy-creating materials and systems research
IMaSS has been newly certified as a "Joint Usage/Research Center of energy-friendly and sustainable energysaving and energy-creating materials and systems research" by the Ministry of Education, Culture, Sports, Science and Technology for 6 years from FY2022, and it is aimed at realizing the development of environmentfriendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption). To realize the development of energy-saving and energy-creating technologies, the center further promotes energy-saving and energy-creating technologies through joint usage/joint research by domestic and oversea researchers. At this facility, researchers from universities, research institutions and other organizations based in Japan and abroad can engage in joint research together with IMaSS personnel while utilizing a wide range of equipment including film-deposition systems, micro/nanofabrication equipment, electron microscopes and many other types of analysis instruments.
If you wish to apply for joint usage or research at this facility, please consult the IMaSS staff in advance and apply.
Call for “IMaSS joint usage/joint research program” in FY2026 Application Deadline: January 15, 2026 (Thursday) Reports Deadline: March 1, 2027 (Monday)
The Institute of Materials and Systems for Sustainability, Nagoya University (hereinafter referred to as IMaSS) was established on October 1, 2015 by reorganizing the Ecotopia Science Institute which was the only science and engineering institute attached to Nagoya University. The purpose of establishing this institute is to contribute to the realization of an environment-friendly and sustainable society by engaging in research on new materials and systems.
Since 2016, IMaSS had been certified as a joint usage/joint research center of materials and systems for innovative energy management by the Ministry of Education, Culture, Sports, Science and Technology. To realize innovative energy management (involving energy creation/conversion, storage, transmission, advanced consumption, and ultraefficiency), the center has consistently taken a bird's-eye view from basic research on elemental technologies, such as cutting-edge materials and devices to system technologies, for social implementation and has been promoting the development of innovative energy management technology through joint usage/joint research with domestic and overseas researchers.
From FY2022, the center has been newly certified as a "Center of joint usage/joint research on energy-friendly and sustainable energy-saving and energy-creating materials and systems research" by the Ministry of Education, Culture, Sports, Science and Technology, and it is aimed at realizing the development of environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption). To realize the development of energy-saving and energy-creating technologies, the center further promotes energy-saving and energy-creating technologies through joint usage/joint research by domestic and oversea researchers.
As part of the activities of this center, the development, joint usage, and joint research of environment-friendly and sustainable energy-saving and energy-creating technologies are carried out in cooperation with faculty members belonging to IMaSS.
| Joint usage/joint research | A research team including faculty members of this institute and faculty members or researchers belonging to institutions other than this institute (for the research team, refer to "2. Qualified applicants") uses, among others, the facilities, equipment, and data of this institute. |
|---|---|
| Joint usage/joint research subject | Joint usage/joint research on environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption). |
| Qualified applicant | Principal Investigator (PI) PI must meet one of the following requirements. (i) Researcher belonging to national, public or private university or research institute, or similar researcher; (ii) Researcher approved by the director of IMaSS. Co-investigator (Co-I) Co-I must meet one of the following requirements; (i) Researchers belonging to national, public or private university or research institute, or similar researcher; (ii) Technical staff and graduate student; (iii) Researcher approved by the director of IMaSS. |
| Research period | The research period is from the date of adoption until the end of February 2027. Applications for the continuation of the same research project can be made up to three times, including the first application. |
| Application procedure/Submission address/Miscellaneous | Please refer to the "Application Guideline (PDF)" below. |
| Application Submission deadline | January 15, 2026 (Thursday) |
| The deadline for submitting research reports | March 1, 2027 (Monday) |
Application guideline (PDF)Call for “IMaSS joint usage/joint research program (international collaboration)” in FY2026-2028
Application Deadline: January 15, 2026 (Thursday) Reports Deadline: March 1, 2029 (Thursday)
Institute of Materials and Systems for Sustainability, Nagoya University (hereinafter referred to as IMaSS) was established on October 1, 2015 by reorganizing the Ecotopia Science Institute, which was the only science and engineering institute attached to Nagoya University. The purpose of establishing this institute is to contribute to the realization of an environment-friendly and sustainable society by engaging in research on new materials and systems.
Since 2016, IMaSS had been certified as a joint usage/joint research center of materials and systems for innovative energy management by the Ministry of Education, Culture, Sports, Science and Technology. To realize innovative energy management (involving energy creation/conversion, storage, transmission, advanced consumption, and ultraefficiency), the center has consistently taken a bird's-eye view from basic research on elemental technologies, such as cutting-edge materials and devices to system technologies, for social implementation and has been promoting the development of innovative energy management technology through joint usage/joint research with domestic and overseas researchers.
From FY2022, the center has been newly certified as a center of "joint usage/joint research on energy-friendly and sustainable energy-saving and energy-creating materials and systems research" by the Ministry of Education, Culture, Sports, Science and Technology, and it is aimed at realizing the development of environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption).To realize the development of energy-saving and energy-creating technologies, the center further promotes energy-saving and energy-creating technologies through joint usage/joint research by domestic and oversea researchers.
As part of the activities of the center, the center calls for research proposals joint usage/joint research※ for the development of environment-friendly and sustainable energy-saving and energy-creating technologies, to be carried out in cooperation with faculty members belonging to IMaSS.
| Joint usage/joint research | Joint usage/joint research is research conducted jointly by research teams including faculty members of IMaSS and outside of IMaSS, using,among other, the facilities, equipment, and data of IMaSS. |
|---|---|
| Joint usage/joint research subject | Joint usage/joint research on environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption). |
| Project Members | In this international joint research, the project members must include at least one researcher based overseas as the principal investigator or co-researcher. Additionally, the project members must include at least one IMaSS staff member as the corresponding researcher in IMaSS. Please have sufficient discussions in advance with the corresponding researcher in IMaSS regarding the research subject, contents, and expenditure, etc. The principal investigator and co-investigator must meet one of the following requirements (excluding faculty members of NU): (i) researcher belonging to national, public or private university or research institute, or similar researcher; (ii) researcher belonging to overseas research institute (including emeritus professor and postdoc, holding a doctoral degree); (iii) researchers approved by the director of IMaSS. |
| Research period | The research period is three years from the date of adoption until the end of February 2029. |
| Application procedure/Submission address/Miscellaneous | Please refer to the "Application Guideline (PDF)" below. |
| Application Submission deadline | January 15, 2026 (Thursday) |
| The deadline for submitting research reports | March 1, 2029 (Thursday) |
Call for “IMaSS joint usage/joint research program” in FY2025
Application Deadline: January 15, 2025 (Wednesday) *Application Registration is now closed. Reports Deadline: March 2, 2026 (Monday)
The Institute of Materials and Systems for Sustainability, Nagoya University (hereinafter referred to as IMaSS) was established on October 1, 2015 by reorganizing the Ecotopia Science Institute which was the only science and engineering institute attached to Nagoya University. The purpose of establishing this institute is to contribute to the realization of an environment-friendly and sustainable society by engaging in research on new materials and systems.
Since 2016, IMaSS had been certified as a joint usage/joint research center of materials and systems for innovative energy management by the Ministry of Education, Culture, Sports, Science and Technology. To realize innovative energy management (involving energy creation/conversion, storage, transmission, advanced consumption, and ultraefficiency), the center has consistently taken a bird's-eye view from basic research on elemental technologies, such as cutting-edge materials and devices to system technologies, for social implementation and has been promoting the development of innovative energy management technology through joint usage/joint research with domestic and overseas researchers.
From FY2022, the center has been newly certified as a "Center of joint usage/joint research on energy-friendly and sustainable energy-saving and energy-creating materials and systems research" by the Ministry of Education, Culture, Sports, Science and Technology, and it is aimed at realizing the development of environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption). To realize the development of energy-saving and energy-creating technologies, the center further promotes energy-saving and energy-creating technologies through joint usage/joint research by domestic and oversea researchers.
As part of the activities of this center, the development, joint usage, and joint research of environment-friendly and sustainable energy-saving and energy-creating technologies are carried out in cooperation with faculty members belonging to IMaSS.
| Joint usage/joint research | A research team including faculty members of this institute and faculty members or researchers belonging to institutions other than this institute (for the research team, refer to "2. Qualified applicants") uses, among others, the facilities, equipment, and data of this institute. |
|---|---|
| Joint usage/joint research subject | Joint usage/joint research on environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption). |
| Qualified applicant | Principal Investigator (PI) PI must meet one of the following requirements. (i) Researcher belonging to national, public or private university or research institute, or similar researcher; (ii) Researcher approved by the director of IMaSS. Co-investigator (Co-I) Co-I must meet one of the following requirements; (i) Researchers belonging to national, public or private university or research institute, or similar researcher; (ii) Technical staff and graduate student; (iii) Researcher approved by the director of IMaSS. |
| Research period | The research period is from the date of adoption until the end of February 2026. Applications for the continuation of the same research project can be made up to three times, including the first application. |
| Application procedure/Submission address/Miscellaneous | Please refer to the "Application Guideline (PDF)" below. |
| Application Submission deadline | January 15, 2025 (Wednesday) |
| The deadline for submitting research reports | March 2, 2026 (Monday) |
Call for “IMaSS joint usage/joint research program (international collaboration)” in FY2025
Application Deadline: January 15, 2025 (Wednesday) *Application Registration is now closed. Reports Deadline: March 1, 2027 (Monday)
Institute of Materials and Systems for Sustainability, Nagoya University (hereinafter referred to as IMaSS) was established on October 1, 2015 by reorganizing the Ecotopia Science Institute, which was the only science and engineering institute attached to Nagoya University. The purpose of establishing this institute is to contribute to the realization of an environment-friendly and sustainable society by engaging in research on new materials and systems.
Since 2016, IMaSS had been certified as a joint usage/joint research center of materials and systems for innovative energy management by the Ministry of Education, Culture, Sports, Science and Technology. To realize innovative energy management (involving energy creation/conversion, storage, transmission, advanced consumption, and ultraefficiency), the center has consistently taken a bird's-eye view from basic research on elemental technologies, such as cutting-edge materials and devices to system technologies, for social implementation and has been promoting the development of innovative energy management technology through joint usage/joint research with domestic and overseas researchers.
From FY2022, the center has been newly certified as a center of "joint usage/joint research on energy-friendly and sustainable energy-saving and energy-creating materials and systems research" by the Ministry of Education, Culture, Sports, Science and Technology, and it is aimed at realizing the development of environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption).To realize the development of energy-saving and energy-creating technologies, the center further promotes energy-saving and energy-creating technologies through joint usage/joint research by domestic and oversea researchers.
As part of the activities of the center, the center calls for research proposals joint usage/joint research※ for the development of environment-friendly and sustainable energy-saving and energy-creating technologies, to be carried out in cooperation with faculty members belonging to IMaSS.
| Joint usage/joint research | Joint usage/joint research is research conducted jointly by research teams including faculty members of IMaSS and outside of IMaSS, using,among other, the facilities, equipment, and data of IMaSS. |
|---|---|
| Joint usage/joint research subject | Joint usage/joint research on environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption). |
| Project Members | In this international joint research, the project members must include at least one researcher based overseas as the principal investigator or co-researcher. Additionally, the project members must include at least one IMaSS staff member as the corresponding researcher in IMaSS. Please have sufficient discussions in advance with the corresponding researcher in IMaSS regarding the research subject, contents, and expenditure, etc. The principal investigator and co-investigator must meet one of the following requirements (excluding faculty members of NU): (i) researcher belonging to national, public or private university or research institute, or similar researcher; (ii) researcher belonging to overseas research institute (including emeritus professor and postdoc, holding a doctoral degree); (iii) researchers approved by the director of IMaSS. |
| Research period | The research period is two years from the date of adoption until the end of February 2027. However, the research period for continuing applications will be one year. |
| Application procedure/Submission address/Miscellaneous | Please refer to the "Application Guideline (PDF)" below. |
| Application Submission deadline | January 15, 2025 (Wednesday) |
| The deadline for submitting research reports | March 1, 2027 (Monday) |
Call for “IMaSS joint usage/joint research program (international collaboration)” in FY2024
Application Deadline: January 15, 2024 (Monday) *Application Registration is now closed. Reports Deadline: March 2, 2026 (Monday)
Institute of Materials and Systems for Sustainability, Nagoya University (hereinafter referred to as IMaSS) was established on October 1, 2015 by reorganizing the Ecotopia Science Institute, which was the only science and engineering institute attached to Nagoya University. The purpose of establishing this institute is to contribute to the realization of an environment-friendly and sustainable society by engaging in research on new materials and systems.
Since 2016, IMaSS had been certified as a joint usage/joint research center of materials and systems for innovative energy management by the Ministry of Education, Culture, Sports, Science and Technology. To realize innovative energy management (involving energy creation/conversion, storage, transmission, advanced consumption, and ultraefficiency), the center has consistently taken a bird's-eye view from basic research on elemental technologies, such as cutting-edge materials and devices to system technologies, for social implementation and has been promoting the development of innovative energy management technology through joint usage/joint research with domestic and overseas researchers.
From FY2022, the center has been newly certified as a center of "joint usage/joint research on energy-friendly and sustainable energy-saving and energy-creating materials and systems research" by the Ministry of Education, Culture, Sports, Science and Technology, and it is aimed at realizing the development of environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption).To realize the development of energy-saving and energy-creating technologies, the center further promotes energy-saving and energy-creating technologies through joint usage/joint research by domestic and oversea researchers.
As part of the activities of the center, the center calls for research proposals joint usage/joint research※ for the development of environment-friendly and sustainable energy-saving and energy-creating technologies, to be carried out in cooperation with faculty members belonging to IMaSS.
| Joint usage/joint research | Joint usage/joint research is research conducted jointly by research teams including faculty members of IMaSS and outside of IMaSS, using,among other, the facilities, equipment, and data of IMaSS. |
|---|---|
| Joint usage/joint research subject | Joint usage/joint research on environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption). |
| Project Members | In this international joint research, the project members must include at least one researcher based overseas as the principal investigator or co-researcher. Additionally, the project members must include at least one IMaSS staff member as the corresponding researcher in IMaSS. Please have sufficient discussions in advance with the corresponding researcher in IMaSS regarding the research subject, contents, and expenditure, etc. The principal investigator and co-investigator must meet one of the following requirements (excluding faculty members of NU): (i) researcher belonging to national, public or private university or research institute, or similar researcher; (ii) researcher belonging to overseas research institute (including emeritus professor and postdoc, holding a doctoral degree); (iii) researchers approved by the director of IMaSS. |
| Research period | The research period is two years from the date of adoption to February 28, 2026 (Saturday). However, the research period for continuing applications will be one year. |
| Application procedure/Submission address/Miscellaneous | Please refer to the "Application Guideline (PDF)" below. |
| Application Submission deadline | January 15, 2024 (Monday) |
| The deadline for submitting research reports | March 2, 2026 (Monday) |
Facilities and Equipment
Coating Equipment
| Facilities and Equipment | Specifications | Inquiry | |
|---|---|---|---|
|
Magnetron sputtering with 8 sources | 8 cathodes with 2 inches Sample size : 30x30 mm2 RF power sources : 500 W x 2 Sample heating : <600˚C Ar ion etching source : <1 kV Sample exchange chamber with 8 samples banking |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
MBE with 8 sources | E-beam souces : 4cc x 4 and 2cc x 2 Sample size : 30x30 mm2 High voltage power souces : 3 Sample heating : <1000˚C Ar ion etching source : <1 kV RHEED with 25 kV |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
Magnetron sputtering with 3 sources | Shimadzu HSR-522 3 cathodes with 4 inches RF power sources : 500 W x 2 Reverse sputtering of sample, Sample rotation, Multi-layered deposition |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
Microfabrication/Processing Device
| Facilities and Equipment | Specifications | Inquiry | |
|---|---|---|---|
|
Electron beam lithography JEOL JBX6300FS |
Accelerating voltage:25/50/100kV Minimum beam diameter:2nm Beam current:100pA-2nA Superimposing Accuracy:±9nm Maximum sample size:8inchφ |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
Maskless exposure system – PALET DDB-701-DL4 by Neoark Corporation | Exposure Area: 100 mm × 100 mm Maximum Workpiece Size: Φ150 mm × 10 mm thickness Light Source: 365 nm LED Minimum Pixel Size: 3 µm (with 10× objective lens), 15 µm (with 2× objective lens) |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
ECR etching with SIMS | ECR ion source:Irie Koken RGB-114 Microwave input power:150 W, Accelerating voltage:600 V，Ion beam diameter:30mm SSIMS analyzer:PFEIFFER EDP400 Mass analysis range:1-512 amu Sample rotation and tilting mechanism |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
Ion implantation NISSIN Electric NH-20SR-WMH |
Accelerating voltage:5-200kV Beam current:1 µA～100 µA |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
Femto-second laser for micro-fabrication and measurement Kisou UFL-Hybrid System |
Pulse Laser:1041 nm, 550 fs, 10 µJ (IMRA µjewel D-1000) Harmonic generator:40% @520 nm, 5% @347 nm (Micro-fabrication Station) Maximum sample size:100 mm x 100 mm Laser beam diameter for fabrication:3.5 µmφ (Measurment Station) Time resolved fluorescent, Spin dynamics of magnetic materials (Optical Coherence Tomography Station) Observation area:10 mm x 10 mm x 1.6 mm Depth resolution:7 µm |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
Electric furnace Koyo Thermo System Co. MODEL272-2 |
Temperature range:400-1100˚C | Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
Rapid thermal annealing AG Associates Heatpulse 610 |
Temperature range:400～1200˚C Temperature rasing rate:200˚C/sec |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
RIE Etching System – Samco RIE-10NR | Silicon-Based Etching Compatible Wafer Size: Up to 8 inches Process Gases: CF₄, Ar, O₂ |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
Electron- and Laser-Beam Lithography Software GenISys BEAMER |
・Layout Editor ・Pattern Data Conversion ・Proximity Effect Correction (PEC) ・Grayscale Exposure Correction |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
Electronic Microscope & Associated Equipment
| Facilities and Equipment | Specifications | Inquiry | |
|---|---|---|---|
|
Reaction science high voltage scanning TEM JEM1000K RS |
Acc. Vol.: 1000 kV (400, 600, 800 kV on demand) Electron gun: Thermal (LaB6) Mode: TEM/STEM Anal. Tool: GIF (Quantum equivalent) Recording: CCD (wide and high-res.) Specimen holder: cooling, heating, cryo-transfer, nano-indentation, 3D tomography, other custom-made holders E-cell: O2, N2, CO, H2,… up to 10,000 Pa |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
|
High-resolution analytical scanning transmission electron microscope JEM-ARM200 (Cold) (aberration correcting electron microscope) | TEM Point Resolution: 0.19 nm STEM Probe Size: < 60 pm Aberration Correction: Equipped in illumination system Accelerating Voltage: 200 kV / 80 kV Electron Source: Cold field emission gun Techniques Supported: TEM, STEM, EDS, EELS |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
|
Aberration-Corrected Electron Microscope – JEOL EM-10000BU | TEM Point Resolution: 0.11 nm STEM Functionality: Probe diameter < 70 pm Aberration Correction: Equipped in both illumination and imaging lens systems Accelerating Voltage: 200 kV, 80 kV Electron Source: Field emission gun Measurement Capabilities: TEM, STEM, EDS, EELS Advanced Features: Electron beam holography 4D-STEM with high-sensitivity/high-speed camera Remote screen sharing system |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
|
Transmission electron microscope JEM2100F-HK |
TEM Point Resolution: 0.2 nm STEM Functionality: Available Accelerating Voltage: 200 kV Electron Source: Field emission gun Measurement Capabilities: TEM, STEM, EDS |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
|
Transmission Electron Microscope JEM-2100plus |
TEM Point Resolution: 0.25 nm STEM Functionality: Available Probe Diameter: 3.0 nm |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
|
Electron Spectroscopic scanning TEM JEM2100M |
TEM Point Resolution: 0.23 nm STEM Function: Available (probe size: 1.0 nm) Accelerating Voltage: 200 kV Spectroscopy: EELS, EDS, WDS Cathodoluminescence (CL): Supported Temperature Range: 100 K – 1000 K |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
|
High-speed sample fabrication/analysis system MI-4000L |
Acc vol.:30kV (FIB, SEM) Anal. Tool: FE-SEM、EDS, EBSD Micro-sampling, Slice & See |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
|
Focused ion beam sample preparation system FB-2100 |
Acc vol.:40kV Functionality: Micro-sampling Additional Feature: CAD integration |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
|
Argon Ion Milling System – PIPS™ II | Ion Guns: Dual low-energy Penning type Ion Energy: 100 eV – 8 keV Sample Size: 3 mm Rotation Speed: 1–6 rpm XY Range: ±0.5 mm Observation: Stereo microscope & digital zoom scope Cooling: Liquid nitrogen (6–7 hrs) Temperature: Down to -120°C |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
|
Other instruments for sample preparation | Low speed blade saw, wire saw, mechanical lapping system, jet polishing (EcoPol), ultramicrotomy, Cross-section polisher, Dimpling machine, Gentle mill, ion coating machine, etc | High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
|
Field-emission scanning electron microscope JEOL JSM-6330F |
Electron Source: Cold Field Emission Gun Accelerating Voltage: 0.5 to 30 kV Magnification: 10× to 500,000× |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
|
Scanning electron microscope with energy dispersive X-ray spectroscopy – Hitachi High-Technologies S3000N | Model: SEMEDXⅢ Type N1 SEI Image Resolution: 3.0 nm @ 25 kV COMPO Image Resolution: 4.0 nm Accelerating Voltage: 0.3 to 30 kV |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
|
Transmission electron microscope system – JEOL JEM-2010F | Accelerating Voltage: 200 kV Point Resolution: 0.19 nm STEM Functionality: Available |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
|
High-resolution scanning electron microscope JSM-IT800 by JEOL Ltd. |
Accelerating Voltage: 0.01 kV to 30 kV Stage Bias Voltage: 0 to -5 kV Resolution: 0.5 nm (at 15 kV), 0.7 nm (at 1 kV) Magnification: Up to 2,000,000× Maximum Sample Size: 170 mm diameter × 45 mm height EDS Analysis Element Range: Beryllium (Be) to Californium (Cf) |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
Analysis Measurement Equipment
| Facilities and Equipment | Specifications | Inquiry | |
|---|---|---|---|
|
Fully automated X-ray diffractometer – RIGAKU SmartLab | X-ray Source: Cu Kα radiation, 9 kW Optical System: Focused beam method, parallel beam method, in-plane geometry Equipped with: Multilayer mirror and Ge monochromator Detector: HyPix-3000 2D detector Measurement Modes: θ–2θ scan, rocking curve, reciprocal space mapping, in-plane φ scan, φ–2θχ scan, and more |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
X-ray diffractometer RIGAKU RINT2500TTR |
X-ray Source: Cu Kα radiation, 18 kW Sample Orientation: Horizontal Measurement Modes: θ–2θ scan, coupled θs/θd scan, independent θs and θd scans |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
|
Atomic force microscope Bruker, AXS Dimension3100 |
Scan range:XY axes 90μm，Z axis 6μm Maximum sample size:150 mmφ－12mmt Measurement mode : AFM，MFM，EFM，LFM，surface electric potential image，current image，lithography |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
Magnetometers | Alternative gradient force magnetometer, sensitivity :10^-8emu，maximum field : 20kOe Vibrating sample magnetometer, sensitivity :10^-5emu，maximum field : 15kOe Torque magnetometer:sensitivity :2×10^-3erg，maximum field : 15kOe Magneto-optical spectrometer, sensitivity :2×10^-3deg，maximum field : 16kOe |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
X-ray photoelectron spectrometer VG ESCALAB250 |
X-ray Source: Twin anode (Mg/Al) Monochromatic X-ray Source: Al monochromator Ion Gun: Argon sputter gun Manipulator: For angle-resolved measurements Maximum Sample Size: Φ20 mm |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
Atomic Force Microscope – Park Systems NX20 | Scan Area: 100 µm (XY), 15 µm (Z) Maximum Sample Size: Φ200 mm × 20 mm thickness Measurement Modes: AFM, MFM, EFM, LFM, FMM, C-AFM, Nanolithography |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
Physical property measurement system – Quantum Design Japan DynaCool-12T | Temperature Range: 1.85 K to 400 K Maximum Applied Magnetic Field: 12 T Measurement Options: DC Resistivity Van der Pauw Hall Transport Measurements Vibrating Sample Magnetometer (VSM) Sample Rotation Mechanism |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
|
X-ray Photoelectron Spectrometer – Shimadzu ESCA-3300 | Micro-Area Analysis: Capable of analyzing areas as small as Φ100 µm X-ray Source: Twin anode (Mg/Al) Maximum Output: 450 W (15 kV – 30 mA) Equipped with: Ion etching gun |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
|
Imaging XPS Microprobe – Thermo Fisher ESCALAB 250Xi | Measurement Capabilities: UPS and XPS XPS Source: Twin anode (Mg, Al) Maximum Energy Resolution: ~0.5 eV @ Al Kα Maximum Spatial Resolution: 20 µm |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
|
Inductively coupled plasma optical emission spectrometer – Seiko Instruments SPS7800 | Sequential-Type Spectrometer Wavelength Range: 175 – 800 nm Max Output Power: 1.2 kW Auto Sampler: Not equipped |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
|
CHN coder – Yanaco analytical instruments MT-6 | Method: Self-integrating type (using dual piston pump) Absolute Error: Within ±0.3% Auto Sampler: Equipped |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
|
Gas Chromatography Mass Spectrometry SHIMADZU GCMS-QP2010Ultra |
Mass Range: 1.5 to 1090 Da Simultaneous SCAN/SIM Analysis: Supported (FASST) Ion Source: Electron Ionization (EI) Signal-to-Noise Ratio: 500 for 1 pg of octafluoronaphthalene Auto Sampler: Equipped |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
|
High Performance Liquid Chromatography SHIMADZU LC-20AD |
Pump Type: Dual parallel double-plunger system, optimized for micro-flow performance; gradient capable Flow Rate Range: 0.0001 to 10.0000 mL/min Detector: Photodiode Array (PDA) with semi-micro cell Auto Sampler: Equipped |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
Center for Integrated Research of Future Electronics / Center for Integrated Research of Future Electronics, Transformative Electronics Facilities
| Facilities and Equipment | Specifications | Inquiry | |
|---|---|---|---|
|
Ion implanter ULVAC IMX-3500 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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High Temperature Sputtering Deposition Equipment ULVAC QAM4 |
Prof. HONDA Y. | |
|
FIB-SEM HITACHI NX2000 |
Prof. HONDA Y. | |
|
In-lens SEM HITACHI SU9000 |
Prof. HONDA Y. | |
|
Imaging CL HORIBA WD201N |
Prof. HONDA Y. | |
|
Work function measuring device RIKEN KENKI AC-3 |
Prof. HONDA Y. | |
|
Emission microscope HAMAMATSU PHOTONICS PHEMOS-1000 |
Prof. HONDA Y. | |
|
i-line stepper Nikon NSR-2205i12D |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
|
Nano inprint equipment SCIVAX X-500 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
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Laser Confocal Microscope Olympus OLS-4100 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
|
RCA cleaning system Dalton 18-MR 12 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
|
Organic cleaning system Dalton 18-MU11 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
|
Stylus profiler Bruker Dektak XT-A |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
|
ICP etching system 4 ULVAC CE-S |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
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Atomic layer deposition system (Plasma/Thermal) Ultratech/CambridgeNanoTech Fiji G2 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
|
LP-CVD samco LPD-1200 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
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ICP etching system 1 samco RIE-200iP |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
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ICP etching system 2 samco RIE-200iP |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
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P-CVD1 samco PD-220NL |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
|
ICP etching system 3 ULVAC NE-550EX |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
|
EB evaporator ULVAC ei-5 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
|
Sputtering system ULVAC CS-L |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
|
Automated Thickness Mapping Systems FILMETRICS F50 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
|
|
West bond 7200CR | Prof. HONDA Y. | |
|
TECDIA TEC-2004TMR | Prof. HONDA Y. | |
|
Nanofactor Fact-200 | Prof. HONDA Y. | |
|
West bond 7476D | Prof. HONDA Y. |
Please remove the '*'s before/after the @ sign when sending e-mails.
