Joint Usage / Research Center
Summary and Call for Proposals
Image of Shared Use
-
Academics or research teams of the IMaSS including
researchers from other institutes/universities.Nagoya University researchers
Researchers from other universities(research representatives)
▼
Joint research by utilizing the facilities, equipment, data and other items of the IMaSS.
Wide range of research from fundamental research on advanced materials and devices to
systems engineering for their social implementation.▼
Realization of the development of environment-friendly and sustainable energy-saving and energy-creating technologies
(energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption).
Summary and Call for Proposals
Joint Usage/Research Center of energy-friendly and sustainable energy-saving and energy-creating materials and systems research
IMaSS has been newly certified as a "Joint Usage/Research Center of energy-friendly and sustainable energy-saving and energy-creating materials and systems research" by the Ministry of Education, Culture, Sports, Science and Technology for 6 years from FY2022, and it is aimed at realizing the development of environment-friendly and sustainable energy-saving and energycreating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption). To realize the development of energy-saving and energy-creating technologies, the center further promotes energy-saving and energy-creating
technologies through joint usage/joint research by domestic and oversea researchers. At this facility, researchers from universities, research institutions and other organizations based in Japan and abroad can engage in joint research together with IMaSS personnel while utilizing a wide range of equipment including film-deposition systems, micro/nanofabrication equipment, electron microscopes and many other types of analysis instruments.
If you wish to apply for joint usage or research at this facility, please consult the IMaSS staff in advance and apply.
Call for “IMaSS joint usage/joint research program” in FY2024
Application Deadline: January 15, 2024 (Monday)
The Institute of Materials and Systems for Sustainability, Nagoya University (hereinafter referred to as IMaSS) was established on October 1, 2015 by reorganizing the Ecotopia Science Institute which was the only science and engineering institute attached to Nagoya University. The purpose of establishing this institute is to contribute to the realization of an environment-friendly and sustainable society by engaging in research on new materials and systems.
Since 2016, IMaSS had been certified as a joint usage/joint research center of materials and systems for innovative energy management by the Ministry of Education, Culture, Sports, Science and Technology. To realize innovative energy management (involving energy creation/conversion, storage, transmission, advanced consumption, and ultraefficiency), the center has consistently taken a bird's-eye view from basic research on elemental technologies, such as cutting-edge materials and devices to system technologies, for social implementation and has been promoting the development of innovative energy management technology through joint usage/joint research with domestic and overseas researchers.
From FY2022, the center has been newly certified as a "Center of joint usage/joint research on energy-friendly and sustainable energy-saving and energy-creating materials and systems research" by the Ministry of Education, Culture, Sports, Science and Technology, and it is aimed at realizing the development of environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption). To realize the development of energy-saving and energy-creating technologies, the center further promotes energy-saving and energy-creating technologies through joint usage/joint research by domestic and oversea researchers.
As part of the activities of this center, the development, joint usage, and joint research of environment-friendly and sustainable energy-saving and energy-creating technologies are carried out in cooperation with faculty members belonging to IMaSS.
| Joint usage/joint research | A research team including faculty members of this institute and faculty members or researchers belonging to institutions other than this institute (for the research team, refer to "2. Qualified applicants") uses, among others, the facilities, equipment, and data of this institute. |
|---|---|
| Joint usage/joint research subject | Joint usage/joint research on environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption). |
| Qualified applicant | Principal Investigator (PI) PI must meet one of the following requirements. (i) Researcher belonging to national, public or private university or research institute, or similar researcher; (ii) Researcher approved by the director of IMaSS. Co-investigator (Co-I) Co-I must meet one of the following requirements; (i) Researchers belonging to national, public or private university or research institute, or similar researcher; (ii) Technical staff and graduate student; (iii) Researcher approved by the director of IMaSS. |
| Research period | The research period is from the date of adoption to February 28, 2025 (-Friday). Applications for the continuation of the same research project can be made up to three times, including the first application. In addition, from 2022, our institution has been renewed as the new "Research base for materials and systems for environmentally friendly and sustainable energy saving and energy creation". Therefore, we have treated all the projects adopted in 2022 as new projects. The number of continuations will start from 2022. |
| Application procedure/Submission address/Miscellaneous | Please refer to the "Application Guideline (PDF)" below. |
| Application Submission deadline | January 15, 2024 (Monday) |
| The deadline for submitting research reports | March 3, 2025 (Monday) |
Application guideline (PDF)Call for “IMaSS joint usage/joint research program (international collaboration)” in FY2024
Application Deadline: January 15, 2024 (Monday)
Institute of Materials and Systems for Sustainability, Nagoya University (hereinafter referred to as IMaSS) was established on October 1, 2015 by reorganizing the Ecotopia Science Institute, which was the only science and engineering institute attached to Nagoya University. The purpose of establishing this institute is to contribute to the realization of an environment-friendly and sustainable society by engaging in research on new materials and systems.
Since 2016, IMaSS had been certified as a joint usage/joint research center of materials and systems for innovative energy management by the Ministry of Education, Culture, Sports, Science and Technology. To realize innovative energy management (involving energy creation/conversion, storage, transmission, advanced consumption, and ultraefficiency), the center has consistently taken a bird's-eye view from basic research on elemental technologies, such as cutting-edge materials and devices to system technologies, for social implementation and has been promoting the development of innovative energy management technology through joint usage/joint research with domestic and overseas researchers.
From FY2022, the center has been newly certified as a center of "joint usage/joint research on energy-friendly and sustainable energy-saving and energy-creating materials and systems research" by the Ministry of Education, Culture, Sports, Science and Technology, and it is aimed at realizing the development of environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption).To realize the development of energy-saving and energy-creating technologies, the center further promotes energy-saving and energy-creating technologies through joint usage/joint research by domestic and oversea researchers.
As part of the activities of the center, the center calls for research proposals joint usage/joint research※ for the development of environment-friendly and sustainable energy-saving and energy-creating technologies, to be carried out in cooperation with faculty members belonging to IMaSS.
| Joint usage/joint research | Joint usage/joint research is research conducted jointly by research teams including faculty members of IMaSS and outside of IMaSS, using,among other, the facilities, equipment, and data of IMaSS. |
|---|---|
| Joint usage/joint research subject | Joint usage/joint research on environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption). |
| Project Members | In this international joint research, the project members must include at least one researcher based overseas as the principal investigator or co-researcher. Additionally, the project members must include at least one IMaSS staff member as the corresponding researcher in IMaSS. Please have sufficient discussions in advance with the corresponding researcher in IMaSS regarding the research subject, contents, and expenditure, etc. The principal investigator and co-investigator must meet one of the following requirements (excluding faculty members of NU): (i) researcher belonging to national, public or private university or research institute, or similar researcher; (ii) researcher belonging to overseas research institute (including emeritus professor and postdoc, holding a doctoral degree); (iii) researchers approved by the director of IMaSS. |
| Research period | The research period is two years from the date of adoption to February 28, 2026 (Saturday). However, the research period for continuing applications will be one year. |
| Application procedure/Submission address/Miscellaneous | Please refer to the "Application Guideline (PDF)" below. |
| Application Submission deadline | January 15, 2024 (Monday) |
| The deadline for submitting research reports | March 2, 2026 (Monday) |
2023年度 名古屋大学未来材料・システム研究所共同利用・共同研究（国際共同研究）の公募について
※申請書の受付は終了しました ※報告書提出期限 2025年3月3日（月）
名古屋大学未来材料・システム研究所（以下「本研究所」という。）は、学内唯一の理工学系附置研究所であるエコトピア科学研究所を改組し、2015年10月1日に設置されました。本研究所は、新しい材料・システムの研究に取り組み、環境調和型持続可能社会の実現に寄与することを目的としています。
また、2016年度より6年間、共同利用・共同研究拠点として新たに文部科学省から認定された「革新的省エネルギーのための材料とシステム研究拠点」は、革新的省エネルギー（エネルギーの創出・変換、蓄積、伝送、消費の高度化・超効率化）を実現するために、先端的な材料･デバイス等の要素技術に関する基礎研究から社会実装のためのシステム技術までを一貫して俯瞰し、これを学内外・国内外の研究者の共同利用・共同研究によって推進してきました。
また、2022年度より6年間、共同利用・共同研究拠点として新たに文部科学省から認定された「環境調和型で持続発展可能な省エネルギー・創エネルギーのための材料とシステム研究拠点」は、環境調和型で持続発展可能な省エネルギー・創エネルギー技術（エネルギー変換、蓄エネルギー、エネルギー伝送およびエネルギー消費の高度化・超効率化）の開発を実現するために、先端的な材料･デバイス等の要素技術に関する基礎研究から社会実装のためのシステム技術の開発までを一貫して俯瞰し、これを学内外・国内外の研究者の共同利用・共同研究によって推進します。この拠点活動の一環として、海外を研究拠点とする研究者と本研究所の教員とが協力して行う、環境調和型で持続発展可能な省エネルギー・創エネルギー技術の開発に関する国際共同研究を公募します。
| 共同利用・共同研究 | 本研究所の教員及び本学以外の国外の研究機関に所属する教員又は研究者を含む研究チーム（研究チームは「研究組織」を参照）が、本研究所の施設、設備、データ等を利用して共同で行う研究 |
|---|---|
| 共同利用・共同研究課題 | 環境調和型で持続発展可能な省エネルギー・創エネルギー技術（エネルギー変換、蓄エネルギー、エネルギー伝送およびエネルギー消費の高度化・超効率化）に関する共同利用・共同研究課題 |
| 研究組織 | 本国際共同研究では、研究組織の中に、研究代表者もしくは研究分担者として海外を研究拠点とする研究者が一名以上含まれている必要があります。また、研究所担当教員として本研究所の所員が一名以上含まれている必要があります。研究課題、研究内容、経費等について事前に本研究所の担当教員と十分な打ち合わせをしてください。 研究代表者および研究分担者は、次のいずれかに該当する者とします。 ① 国、公、私立大学の教員、研究機関の研究者、又はこれに準ずる研究者 ② 国外の研究機関に所属する研究者（名誉教授、ポスドクを含む。博士の学位を有すること）。 ③ その他研究所長が特に適当と認めた者 |
| 研究期間 | 採択日から2025年2月28日(金)までの2年間とします。 ただし、2年目終了時に継続を希望する課題については、審査で継続が認められた場合、もう１年間継続することができます。継続が認められた課題には50万円を上限として予算の追加申請が可能です。 |
| 申請方法及び提出先 その他 | 下記「公募要項（PDF）」 を参照願います。 |
| 申請期限 | 2023年1月13日（金） 期限厳守 ※終了しました。 |
| 報告書提出期限 | 2025年3月3日（月）期限厳守 |
Facilities and Equipment
Coating Equipment
| Facilities and Equipment | Specifications | Inquiry | |
|---|---|---|---|
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Magnetron sputtering with 8 sources | 8 cathodes with 2 inches Sample size : 30x30 mm2 RF power sources : 500 W x 2 Sample heating : <600˚C Ar ion etching source : <1 kV Sample exchange chamber with 8 samples banking |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
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MBE with 8 sources | E-beam souces : 4cc x 4 and 2cc x 2 Sample size : 30x30 mm2 High voltage power souces : 3 Sample heating : <1000˚C Ar ion etching source : <1 kV RHEED with 25 kV |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
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Magnetron sputtering with 3 sources | Shimadzu HSR-522 3 cathodes with 4 inches RF power sources : 500 W x 2 Reverse sputtering of sample, Sample rotation, Multi-layered deposition |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
Microfabrication/Processing Device
| Facilities and Equipment | Specifications | Inquiry | |
|---|---|---|---|
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Electron beam lithography | JEOL JBX6300FS Accelerating voltage:25/50/100kV Minimum beam diameter:2nm Beam current:100pA-2nA Superimposing Accuracy:±9nm Maximum sample size:8inchφ |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
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Mask aligner | Canon PLA-501(S) Indefinite shape sample with thickness less than 0.7μm |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
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ECR etching with SIMS | ECR ion source:Irie Koken RGB-114 Microwave input power:150 W, Accelerating voltage:600 V，Ion beam diameter:30mm SSIMS analyzer:PFEIFFER EDP400 Mass analysis range:1-512 amu Sample rotation and tilting mechanism |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
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Ion implantation | NISSIN Electric NH-20SR-WMH Accelerating voltage:5-200kV Beam current:1 µA～100 µA |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
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Femto-second laser for micro-fabrication and measurement | Kisou UFL-Hybrid System Pulse Laser:1041 nm, 550 fs, 10 µJ (IMRA µjewel D-1000) Harmonic generator:40% @520 nm, 5% @347 nm (Micro-fabrication Station) Maximum sample size:100 mm x 100 mm Laser beam diameter for fabrication:3.5 µmφ (Measurment Station) Time resolved fluorescent, Spin dynamics of magnetic materials (Optical Coherence Tomography Station) Observation area:10 mm x 10 mm x 1.6 mm Depth resolution:7 µm |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
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Electric furnace | Koyo Thermo System Co. MODEL272-2 Temperature range:400-1100˚C |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
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Rapid thermal annealing | AG Associates Heatpulse 610 Temperature range:400～1200˚C Temperature rasing rate:200˚C/sec |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
Electronic Microscope & Associated Equipment
| Facilities and Equipment | Specifications | Inquiry | |
|---|---|---|---|
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Reaction science high voltage scanning TEM JEM1000K RS |
Acc. Vol.: 1000 kV (400, 600, 800 kV on demand) Electron gun: Thermal (LaB6) Mode: TEM/STEM Anal. Tool: GIF (Quantum equivalent) Recording: CCD (wide and high-res.) Specimen holder: cooling, heating, cryo-transfer, nano-indentation, 3D tomography, other custom-made holders E-cell: O2, N2, CO, H2,… up to 10,000 Pa |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
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Aberration corrected scanning TEM JEM ARM200F |
Acc. Vol.: 200 kV, 80 kV Electron gun: Schottky FEG Mode: TEM/STEM Cs correction: probe & imaging Anal. Tool: EDX (SDD: 60 mm2), GIF Quantum Recording: CCD Specimen holder: single-tilt, double-tilting, double-tilting Be analytical Others: Bi-prism for holography, BSI detector |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
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Transmission electron microscope JEM2100F-HK |
Acc. Vol.: 200 kV, 80 kV Electron gun: Schottky FEG Mode: TEM/STEM Cs correction: probe & imaging Anal. Tool: EDX (SDD: 60 mm2), GIF Quantum Recording: CCD Specimen holder: single-tilt, double-tilting, double-tilting Be analytical Others: Bi-prism for holography, BSI detector |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
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Transmission electron microscope JEM2100F-HK |
Acc. Vol.: 200kV Electron gun: Schottky FEG Mode: TEM/STEM Anal. Tool: EDX (SDD: 60 mm2) Recording: CCD Specimen holder: double-tilting cooling, double-tilting heating, multi-sample, Be analytical |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
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Transmission Electron Microscope JEM-2100plus |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
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Electron Spectroscopic scanning TEM JEM2100M |
Acc. Vol.: 80-200 kV Electron gun: Thermal (LaB6) Mode: TEM/STEM Anal. Tool: EDX (SDD: 30 mm2), WDX, EELS (Enfina), CL Recording: CCD Specimen holder: single-tilt, double-tilting, double-tilting Be analytical, rotation, cooling & heating Others: BSI detector |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
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High-speed sample fabrication/analysis system MI-4000L |
Acc vol.:30kV (FIB, SEM) Anal. Tool: FE-SEM、EDS, EDSD Micro-sampling, Slice & See |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
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Focused ion beam sample preparation system FB-2100 |
Acc vol.:40kV Micro-sampling |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
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Precision ion beam milling system PIPS II |
Ion energy: 100 eV～8 keV Attachments: Digitally zooming microscope, specimen cooling stage |
High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
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Other instruments for sample preparation | Low speed blade saw, wire saw, mechanical lapping system, jet polishing (EcoPol), ultramicrotomy, Cross-section polisher, Dimpling machine, Gentle mill, ion coating machine, etc | High voltage electron microscope laboratory hvem*@*nagoya-microscopy.jp |
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Field-emission scanning electron microscope | JEOL JSM-6330F & JED-2140GS | Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
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エネルギー分散型X線分析 装置付走査型電子顕微鏡 日立ハイテクノロジーズ S3000N |
SEMEDXⅢTypeN1 SEI像分解能：3.0nm@ 25kV COMPO像分解能：4.0nm 加速電圧：0.3～30kV |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
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透過電子顕微鏡システム 日本電子 JEM-2010F |
加速電圧200kV 点分解能0.19nm STEM機能 |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
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FE-SEM | JEOL JSM-6301F Field-emission electron gun Accelerating voltage: 0.5～30kV Magnification: 10～500,000 Analysis with energy dispersive X-ray spectrometry |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
Analysis Measurement Equipment
| Facilities and Equipment | Specifications | Inquiry | |
|---|---|---|---|
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X-ray diffractometer | RIGAKU ATX-G X-ray sourse : Cu-Ka, 18kW Multilayered focusing mirror Ge monochromater θ-2θscan mode，Rocking curve，Reciprocal lattice mapping, In-plane φ scan，φ－2θχscan |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
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X-ray diffractometer | RIGAKU RINT2500TTR | Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
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Atomic force microscope | Bruker, AXS Dimension3100 Scan range:XY axes 90μm，Z axis 6μm Maximum sample size:150 mmφ－12mmt Measurement mode : AFM，MFM，EFM，LFM，surface electric potential image，current image，lithography |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
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Magnetometers | Alternative gradient force magnetometer, sensitivity :10^-8emu，maximum field : 20kOe Vibrating sample magnetometer, sensitivity :10^-5emu，maximum field : 15kOe Torque magnetometer:sensitivity :2×10^-3erg，maximum field : 15kOe Magneto-optical spectrometer, sensitivity :2×10^-3deg，maximum field : 16kOe |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
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X-ray photoelectron spectrometer | VG ESCALAB250 Mg/Al twin anode and Al monochromator X ray source Sample etching by Ar ion gun Manipultor for angle resolved measurement |
Nano fabrication Platform info*@*nanofab.engg.nagoya-u.ac.jp |
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X-ray photoelectron spectrometer | SHIMADZU ESCA-3300 | Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
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イメージングXPSマイクロ プローブ サーモフィッシャー ESCALAB 250Xi |
UPS, XPS両光電子分光計測が可能 XPS計測時：Mg, Al ツインアノード 利用可 最高エネルギー分解能： 0.5eV程度＠Alkα 最高空間分解能：20μm |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
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Inductively Coupled Plasma Atomic Emission Spectrometer | Seiko Instruments, SPS7800 | Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
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CHN coder | (Yanaco) MT-6 | Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
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Gas Chromatography Mass Spectrometry SHIMADZU GCMS-QP2010Ultra |
Mass spectrum range:1.5~1090Da Simultaneous analysis possible FASST( Fast Automated Scan/SIM Type) Ion source:Electron Ionization（S/N 500 : 1pg octafluoronaphthalene） Option:auto sampler |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
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High Performance Liquid Chromatography SHIMADZU LC-20AD |
Parallel double plunger pump 2set Flow rate range:0.0001～10.0000mL/min Detector:photodiode array(PDA)semi-microcell Option:auto sampler |
Shared Equipment Office shared.equip*@*imass.nagoya-u.ac.jp |
Center for Integrated Research of Future Electronics / Center for Integrated Research of Future Electronics, Transformative Electronics Facilities
| Facilities and Equipment | Specifications | Inquiry | |
|---|---|---|---|
|
Ion implanter ULVAC IMX-3500 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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High Temperature Sputtering Deposition Equipment ULVAC QAM4 |
Prof. HONDA Y. | |
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FIB-SEM HITACHI NX2000 |
Prof. HONDA Y. | |
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In-lens SEM HITACHI SU9000 |
Prof. HONDA Y. | |
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Imaging CL HORIBA WD201N |
Prof. HONDA Y. | |
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Work function measuring device RIKEN KENKI AC-3 |
Prof. HONDA Y. | |
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Emission microscope HAMAMATSU PHOTONICS PHEMOS-1000 |
Prof. HONDA Y. | |
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i-line stepper Nikon NSR-2205i12D |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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Nano inprint equipment SCIVAX X-500 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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Laser Confocal Microscope Olympus OLS-4100 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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RCA cleaning system Dalton 18-MR 12 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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Organic cleaning system Dalton 18-MU11 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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Stylus profiler Bruker Dektak XT-A |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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ICP etching system 4 ULVAC CE-S |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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Atomic layer deposition system (Plasma/Thermal) Ultratech/CambridgeNanoTech Fiji G2 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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LP-CVD samco LPD-1200 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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ICP etching system 1 samco RIE-200iP |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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ICP etching system 2 samco RIE-200iP |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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P-CVD1 samco PD-220NL |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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ICP etching system 3 ULVAC NE-550EX |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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EB evaporator ULVAC ei-5 |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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Sputtering system ULVAC CS-L |
C-TEFs c-tefs*@*imass.nagoya-u.ac.jp |
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Automated Thickness Mapping Systems FILMETRICS F50 |
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West bond 7200CR | Prof. HONDA Y. | |
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TECDIA TEC-2004TMR | Prof. HONDA Y. | |
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Nanofactor Fact-200 | Prof. HONDA Y. | |
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West bond 7476D | Prof. HONDA Y. |
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