C-TEFs
Organization
CIRFE -
Transformative Electronics
Facilities
Director
SUDA, Jun
The Center for Integrated Research of Future Electronics ‒ Transformative Electronics Facilities（ C-TEFs） is an experimental facility of IMaSS at Nagoya University. It has a large clean room of about 1,000 m²（ Class 1,000 exposure area; Class 10,000 process area） for conducting accelerated crystal growth, device processes, and evaluation in GaN research and development.
Movie
C-TEFs : Center for Integrated Research of Future Electronics, Transformative Electronics Facilities Introduction video
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introduction（2min. 37sec.）
Features
(１) Submicron processing line specialized for GaN Electronics
● Complete end-to-end process of GaN power devices from crystal growth to device fabrication
● Equipment capable of submicron feature fabrication, including an i-line stepper
● Operation management and contract fabrication services by technical development staff
● Shared user facility system with fee structure to allow use by outside organizations
(２)Target device
● GaN-on-GaN vertical power devices
● GaN-based optical devices
● AlGaN/GaN lateral HEMT devices
● Nitride semiconductor future devices
Member
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Project
Creation of sophisticated devices based on Nitride semiconductor
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General Manager, Ultrawide-bandgap semiconductor technology office / General Manager, Technology development office / Designated Professor
ARAI, Manabu
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