Joint Usage / Research Center

Summary and Call for Proposals

Image of Shared Use

  • Academics or research teams of the IMaSS including
    researchers from other institutes/universities.

    Nagoya University researchers

    Researchers from other universities(research representatives)

    Joint research by utilizing the facilities, equipment, data and other items of the IMaSS.
    Wide range of research from fundamental research on advanced materials and devices to
    systems engineering for their social implementation.


    Realization of the development of environment-friendly and sustainable energy-saving and energy-creating technologies
    (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption).

Summary and Call for Proposals

Joint Usage/Research Center of energy-friendly and sustainable energy-saving and energy-creating materials and systems research

IMaSS has been newly certified as a "Joint Usage/Research Center of energy-friendly and sustainable energy-saving and energy-creating materials and systems research" by the Ministry of Education, Culture, Sports, Science and Technology for 6 years from FY2022, and it is aimed at realizing the development of environment-friendly and sustainable energy-saving and energycreating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption). To realize the development of energy-saving and energy-creating technologies, the center further promotes energy-saving and energy-creating technologies through joint usage/joint research by domestic and oversea researchers. At this facility, researchers from universities, research institutions and other organizations based in Japan and abroad can engage in joint research together with IMaSS personnel while utilizing a wide range of equipment including film-deposition systems, micro/nanofabrication equipment, electron microscopes and many other types of analysis instruments.
If you wish to apply for joint usage or research at this facility, please consult the IMaSS staff in advance and apply,

Call for “IMaSS joint usage/joint research program” in FY2025
Application Deadline: January 15, 2025 (Wednesday)
Reports Deadline: March 2, 2026 (Monday)

The Institute of Materials and Systems for Sustainability, Nagoya University (hereinafter referred to as IMaSS) was established on October 1, 2015 by reorganizing the Ecotopia Science Institute which was the only science and engineering institute attached to Nagoya University. The purpose of establishing this institute is to contribute to the realization of an environment-friendly and sustainable society by engaging in research on new materials and systems.
Since 2016, IMaSS had been certified as a joint usage/joint research center of materials and systems for innovative energy management by the Ministry of Education, Culture, Sports, Science and Technology. To realize innovative energy management (involving energy creation/conversion, storage, transmission, advanced consumption, and ultraefficiency), the center has consistently taken a bird's-eye view from basic research on elemental technologies, such as cutting-edge materials and devices to system technologies, for social implementation and has been promoting the development of innovative energy management technology through joint usage/joint research with domestic and overseas researchers.
From FY2022, the center has been newly certified as a "Center of joint usage/joint research on energy-friendly and sustainable energy-saving and energy-creating materials and systems research" by the Ministry of Education, Culture, Sports, Science and Technology, and it is aimed at realizing the development of environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption). To realize the development of energy-saving and energy-creating technologies, the center further promotes energy-saving and energy-creating technologies through joint usage/joint research by domestic and oversea researchers.
As part of the activities of this center, the development, joint usage, and joint research of environment-friendly and sustainable energy-saving and energy-creating technologies are carried out in cooperation with faculty members belonging to IMaSS.

Joint usage/joint research A research team including faculty members of this institute and faculty members or researchers belonging to institutions other than this institute (for the research team, refer to "2. Qualified applicants") uses, among others, the facilities, equipment, and data of this institute.
Joint usage/joint research subject Joint usage/joint research on environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption).
Qualified applicant Principal Investigator (PI)
PI must meet one of the following requirements.
(i) Researcher belonging to national, public or private university or research institute, or similar researcher;
(ii) Researcher approved by the director of IMaSS.

Co-investigator (Co-I)
Co-I must meet one of the following requirements;
(i) Researchers belonging to national, public or private university or research institute, or similar researcher;
(ii) Technical staff and graduate student;
(iii) Researcher approved by the director of IMaSS.
Research period The research period is from the date of adoption until the end of February 2026. Applications for the continuation of the same research project can be made up to three times, including the first application.
Application procedure/Submission address/Miscellaneous Please refer to the "Application Guideline (PDF)" below.
Application Submission deadline January 15, 2025 (Wednesday)
The deadline for submitting research reports March 2, 2026 (Monday)

Call for “IMaSS joint usage/joint research program (international collaboration)” in FY2025
Application Deadline: January 15, 2025 (Wednesday)
Reports Deadline: March 1, 2027 (Monday)

Institute of Materials and Systems for Sustainability, Nagoya University (hereinafter referred to as IMaSS) was established on October 1, 2015 by reorganizing the Ecotopia Science Institute, which was the only science and engineering institute attached to Nagoya University. The purpose of establishing this institute is to contribute to the realization of an environment-friendly and sustainable society by engaging in research on new materials and systems.
Since 2016, IMaSS had been certified as a joint usage/joint research center of materials and systems for innovative energy management by the Ministry of Education, Culture, Sports, Science and Technology. To realize innovative energy management (involving energy creation/conversion, storage, transmission, advanced consumption, and ultraefficiency), the center has consistently taken a bird's-eye view from basic research on elemental technologies, such as cutting-edge materials and devices to system technologies, for social implementation and has been promoting the development of innovative energy management technology through joint usage/joint research with domestic and overseas researchers.
From FY2022, the center has been newly certified as a center of "joint usage/joint research on energy-friendly and sustainable energy-saving and energy-creating materials and systems research" by the Ministry of Education, Culture, Sports, Science and Technology, and it is aimed at realizing the development of environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption).To realize the development of energy-saving and energy-creating technologies, the center further promotes energy-saving and energy-creating technologies through joint usage/joint research by domestic and oversea researchers.
As part of the activities of the center, the center calls for research proposals joint usage/joint research※ for the development of environment-friendly and sustainable energy-saving and energy-creating technologies, to be carried out in cooperation with faculty members belonging to IMaSS.

Joint usage/joint research Joint usage/joint research is research conducted jointly by research teams including faculty members of IMaSS and outside of IMaSS, using,among other, the facilities, equipment, and data of IMaSS.
Joint usage/joint research subject Joint usage/joint research on environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption).
Project Members In this international joint research, the project members must include at least one researcher based overseas as the principal investigator or co-researcher. Additionally, the project members must include at least one IMaSS staff member as the corresponding researcher in IMaSS. Please have sufficient discussions in advance with the corresponding researcher in IMaSS regarding the research subject, contents, and expenditure, etc.
The principal investigator and co-investigator must meet one of the following requirements (excluding faculty members of NU):
(i) researcher belonging to national, public or private university or research institute, or similar researcher;
(ii) researcher belonging to overseas research institute (including emeritus professor and postdoc, holding a doctoral degree);
(iii) researchers approved by the director of IMaSS.
Research period The research period is two years from the date of adoption until the end of February 2027. However, the research period for continuing applications will be one year.
Application procedure/Submission address/Miscellaneous Please refer to the "Application Guideline (PDF)" below.
Application Submission deadline January 15, 2025 (Wednesday)
The deadline for submitting research reports March 1, 2027 (Monday)

Call for “IMaSS joint usage/joint research program” in FY2024
Application Deadline: January 15, 2024 (Monday) *Application Registration is now closed.
Reports Deadline: March 3, 2025 (Monday)

The Institute of Materials and Systems for Sustainability, Nagoya University (hereinafter referred to as IMaSS) was established on October 1, 2015 by reorganizing the Ecotopia Science Institute which was the only science and engineering institute attached to Nagoya University. The purpose of establishing this institute is to contribute to the realization of an environment-friendly and sustainable society by engaging in research on new materials and systems.
Since 2016, IMaSS had been certified as a joint usage/joint research center of materials and systems for innovative energy management by the Ministry of Education, Culture, Sports, Science and Technology. To realize innovative energy management (involving energy creation/conversion, storage, transmission, advanced consumption, and ultraefficiency), the center has consistently taken a bird's-eye view from basic research on elemental technologies, such as cutting-edge materials and devices to system technologies, for social implementation and has been promoting the development of innovative energy management technology through joint usage/joint research with domestic and overseas researchers.
From FY2022, the center has been newly certified as a "Center of joint usage/joint research on energy-friendly and sustainable energy-saving and energy-creating materials and systems research" by the Ministry of Education, Culture, Sports, Science and Technology, and it is aimed at realizing the development of environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption). To realize the development of energy-saving and energy-creating technologies, the center further promotes energy-saving and energy-creating technologies through joint usage/joint research by domestic and oversea researchers.
As part of the activities of this center, the development, joint usage, and joint research of environment-friendly and sustainable energy-saving and energy-creating technologies are carried out in cooperation with faculty members belonging to IMaSS.

Joint usage/joint research A research team including faculty members of this institute and faculty members or researchers belonging to institutions other than this institute (for the research team, refer to "2. Qualified applicants") uses, among others, the facilities, equipment, and data of this institute.
Joint usage/joint research subject Joint usage/joint research on environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption).
Qualified applicant Principal Investigator (PI)
PI must meet one of the following requirements.
(i) Researcher belonging to national, public or private university or research institute, or similar researcher;
(ii) Researcher approved by the director of IMaSS.

Co-investigator (Co-I)
Co-I must meet one of the following requirements;
(i) Researchers belonging to national, public or private university or research institute, or similar researcher;
(ii) Technical staff and graduate student;
(iii) Researcher approved by the director of IMaSS.
Research period The research period is from the date of adoption to February 28, 2025 (-Friday). Applications for the continuation of the same research project can be made up to three times, including the first application.
In addition, from 2022, our institution has been renewed as the new "Research base for materials and systems for environmentally friendly and sustainable energy saving and energy creation". Therefore, we have treated all the projects adopted in 2022 as new projects. The number of continuations will start from 2022.
Application procedure/Submission address/Miscellaneous Please refer to the "Application Guideline (PDF)" below.
Application Submission deadline January 15, 2024 (Monday)
The deadline for submitting research reports March 3, 2025 (Monday)

Call for “IMaSS joint usage/joint research program (international collaboration)” in FY2024
Application Deadline: January 15, 2024 (Monday) *Application Registration is now closed.
Reports Deadline: March 2, 2026 (Monday)

Institute of Materials and Systems for Sustainability, Nagoya University (hereinafter referred to as IMaSS) was established on October 1, 2015 by reorganizing the Ecotopia Science Institute, which was the only science and engineering institute attached to Nagoya University. The purpose of establishing this institute is to contribute to the realization of an environment-friendly and sustainable society by engaging in research on new materials and systems.
Since 2016, IMaSS had been certified as a joint usage/joint research center of materials and systems for innovative energy management by the Ministry of Education, Culture, Sports, Science and Technology. To realize innovative energy management (involving energy creation/conversion, storage, transmission, advanced consumption, and ultraefficiency), the center has consistently taken a bird's-eye view from basic research on elemental technologies, such as cutting-edge materials and devices to system technologies, for social implementation and has been promoting the development of innovative energy management technology through joint usage/joint research with domestic and overseas researchers.
From FY2022, the center has been newly certified as a center of "joint usage/joint research on energy-friendly and sustainable energy-saving and energy-creating materials and systems research" by the Ministry of Education, Culture, Sports, Science and Technology, and it is aimed at realizing the development of environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption).To realize the development of energy-saving and energy-creating technologies, the center further promotes energy-saving and energy-creating technologies through joint usage/joint research by domestic and oversea researchers.
As part of the activities of the center, the center calls for research proposals joint usage/joint research※ for the development of environment-friendly and sustainable energy-saving and energy-creating technologies, to be carried out in cooperation with faculty members belonging to IMaSS.

Joint usage/joint research Joint usage/joint research is research conducted jointly by research teams including faculty members of IMaSS and outside of IMaSS, using,among other, the facilities, equipment, and data of IMaSS.
Joint usage/joint research subject Joint usage/joint research on environment-friendly and sustainable energy-saving and energy-creating technologies (energy conversion, energy storage, energy transmission, and sophisticated and ultraefficient energy consumption).
Project Members In this international joint research, the project members must include at least one researcher based overseas as the principal investigator or co-researcher. Additionally, the project members must include at least one IMaSS staff member as the corresponding researcher in IMaSS. Please have sufficient discussions in advance with the corresponding researcher in IMaSS regarding the research subject, contents, and expenditure, etc.
The principal investigator and co-investigator must meet one of the following requirements (excluding faculty members of NU):
(i) researcher belonging to national, public or private university or research institute, or similar researcher;
(ii) researcher belonging to overseas research institute (including emeritus professor and postdoc, holding a doctoral degree);
(iii) researchers approved by the director of IMaSS.
Research period The research period is two years from the date of adoption to February 28, 2026 (Saturday). However, the research period for continuing applications will be one year.
Application procedure/Submission address/Miscellaneous Please refer to the "Application Guideline (PDF)" below.
Application Submission deadline January 15, 2024 (Monday)
The deadline for submitting research reports March 2, 2026 (Monday)

2023年度 名古屋大学未来材料・システム研究所共同利用・共同研究(国際共同研究)の公募について
※申請書の受付は終了しました
報告書提出期限 2025年3月3日(月)

名古屋大学未来材料・システム研究所(以下「本研究所」という。)は、学内唯一の理工学系附置研究所であるエコトピア科学研究所を改組し、2015年10月1日に設置されました。本研究所は、新しい材料・システムの研究に取り組み、環境調和型持続可能社会の実現に寄与することを目的としています。
また、2016年度より6年間、共同利用・共同研究拠点として新たに文部科学省から認定された「革新的省エネルギーのための材料とシステム研究拠点」は、革新的省エネルギー(エネルギーの創出・変換、蓄積、伝送、消費の高度化・超効率化)を実現するために、先端的な材料・デバイス等の要素技術に関する基礎研究から社会実装のためのシステム技術までを一貫して俯瞰し、これを学内外・国内外の研究者の共同利用・共同研究によって推進してきました。
また、2022年度より6年間、共同利用・共同研究拠点として新たに文部科学省から認定された「環境調和型で持続発展可能な省エネルギー・創エネルギーのための材料とシステム研究拠点」は、環境調和型で持続発展可能な省エネルギー・創エネルギー技術(エネルギー変換、蓄エネルギー、エネルギー伝送およびエネルギー消費の高度化・超効率化)の開発を実現するために、先端的な材料・デバイス等の要素技術に関する基礎研究から社会実装のためのシステム技術の開発までを一貫して俯瞰し、これを学内外・国内外の研究者の共同利用・共同研究によって推進します。この拠点活動の一環として、海外を研究拠点とする研究者と本研究所の教員とが協力して行う、環境調和型で持続発展可能な省エネルギー・創エネルギー技術の開発に関する国際共同研究を公募します。

共同利用・共同研究 本研究所の教員及び本学以外の国外の研究機関に所属する教員又は研究者を含む研究チーム(研究チームは「研究組織」を参照)が、本研究所の施設、設備、データ等を利用して共同で行う研究
共同利用・共同研究課題 環境調和型で持続発展可能な省エネルギー・創エネルギー技術(エネルギー変換、蓄エネルギー、エネルギー伝送およびエネルギー消費の高度化・超効率化)に関する共同利用・共同研究課題
研究組織 本国際共同研究では、研究組織の中に、研究代表者もしくは研究分担者として海外を研究拠点とする研究者が一名以上含まれている必要があります。また、研究所担当教員として本研究所の所員が一名以上含まれている必要があります。研究課題、研究内容、経費等について事前に本研究所の担当教員と十分な打ち合わせをしてください。
研究代表者および研究分担者は、次のいずれかに該当する者とします。
① 国、公、私立大学の教員、研究機関の研究者、又はこれに準ずる研究者
② 国外の研究機関に所属する研究者(名誉教授、ポスドクを含む。博士の学位を有すること)。
③ その他研究所長が特に適当と認めた者
研究期間 採択日から2025年2月28日(金)までの2年間とします。
ただし、2年目終了時に継続を希望する課題については、審査で継続が認められた場合、もう1年間継続することができます。継続が認められた課題には50万円を上限として予算の追加申請が可能です。
申請方法及び提出先 その他 下記「公募要項(PDF)」 を参照願います。
申請期限 2023年1月13日(金) 期限厳守 ※終了しました。
報告書提出期限 2025年3月3日(月)期限厳守

Facilities and Equipment

Coating Equipment

Facilities and Equipment Specifications Inquiry
Magnetron sputtering with 8 sources 8 cathodes with 2 inches
Sample size : 30x30 mm2
RF power sources : 500 W x 2
Sample heating : <600˚C
Ar ion etching source : <1 kV
Sample exchange chamber with 8 samples banking
Nano fabrication Platform
info*@*nanofab.engg.nagoya-u.ac.jp
MBE with 8 sources E-beam souces : 4cc x 4 and 2cc x 2
Sample size : 30x30 mm2
High voltage power souces : 3
Sample heating : <1000˚C
Ar ion etching source : <1 kV
RHEED with 25 kV
Nano fabrication Platform
info*@*nanofab.engg.nagoya-u.ac.jp
Magnetron sputtering with 3 sources Shimadzu HSR-522
3 cathodes with 4 inches
RF power sources : 500 W x 2
Reverse sputtering of sample, Sample rotation, Multi-layered deposition
Nano fabrication Platform
info*@*nanofab.engg.nagoya-u.ac.jp

Microfabrication/Processing Device

Facilities and Equipment Specifications Inquiry
電子線露光装置
日本電子社製
JBX6300FS
加速電圧:25/50/100kV
最小ビーム径:2nm
ビーム電流:100pA-2nA
重ね合わせ精度:±9nm
最大試料サイズ:8inchφ
ARIM微細加工事務局
info*@*nanofab.engg.
nagoya-u.ac.jp
マスクレス露光装置
ネオアーク社製 PALET
DDB-701-DL4
露光領域: 100 mm x 100 mm
最大ワークサイズ: φ150nm×10mmt
光源: 365 nm (typ.) LED
最小画素: 3 um(対物レンズ×10), 15um(対物レンズ×2)
ARIM微細加工事務局
info*@*nanofab.engg.
nagoya-u.ac.jp
ECR-SIMS エッチング装置 ECRイオンガン:入江工研社製
RGB-114 マイクロ波入力150 W,
加速電圧600 V,イオン照射径30mm
SIMS検出器:PFEIFFER社製 EDP400
分析質量1-512 amu
試料角度調整,回転機構付き
ARIM微細加工事務局
info*@*nanofab.engg.
nagoya-u.ac.jp
イオン注入装置
日新電機 NH-20SR-WMH
加速電圧:5-200kV
注入電流:1μA〜100μA
ARIM微細加工事務局
info*@*nanofab.engg.
nagoya-u.ac.jp
フェムト秒レーザー加工分析システム
輝創 UFL-Hybrid
光源:1041nm, 550fs, 10µJ
(IMRA µjewel D-1000)
高調波発生ユニット:
40% @520nm, 5% @347nm
(加工ステーション)
最大試料寸法:100mm x 100mm
加工スポット:3.5 µmφ
(分析ステーション)
時間分解蛍光・磁気分析
(光干渉断層撮影ステーション)
撮影エリア:10mm x 10mm x 1.6mm
深さ分解能:7µ
ARIM微細加工事務局
info*@*nanofab.engg.
nagoya-u.ac.jp
電気炉
光洋リンドバーグ社製
MODEL272-2
温度範囲:400-1100℃ ARIM微細加工事務局
info*@*nanofab.engg.
nagoya-u.ac.jp
急速加熱処理装置
AG Associates社製
Heatpulse 610
温度範囲:400~1200℃
昇温速度:200℃/sec
ARIM微細加工事務局
info*@*nanofab.engg.
nagoya-u.ac.jp

Electronic Microscope & Associated Equipment

Facilities and Equipment Specifications Inquiry
Reaction science high voltage scanning TEM
JEM1000K RS
Acc. Vol.: 1000 kV (400, 600, 800 kV on demand)
Electron gun: Thermal (LaB6)
Mode: TEM/STEM
Anal. Tool: GIF (Quantum equivalent)
Recording: CCD (wide and high-res.)
Specimen holder: cooling, heating, cryo-transfer, nano-indentation, 3D tomography, other custom-made holders
E-cell: O2, N2, CO, H2,… up to 10,000 Pa
High voltage electron microscope laboratory
hvem*@*nagoya-microscopy.jp
Aberration corrected scanning TEM
JEM ARM200F
Acc. Vol.: 200 kV, 80 kV
Electron gun: Schottky FEG
Mode: TEM/STEM
Cs correction: probe & imaging
Anal. Tool: EDX (SDD: 60 mm2), GIF Quantum
Recording: CCD
Specimen holder: single-tilt, double-tilting, double-tilting Be analytical
Others: Bi-prism for holography, BSI detector
High voltage electron microscope laboratory
hvem*@*nagoya-microscopy.jp
Transmission electron microscope
JEM2100F-HK
Acc. Vol.: 200 kV, 80 kV
Electron gun: Schottky FEG
Mode: TEM/STEM
Cs correction: probe & imaging
Anal. Tool: EDX (SDD: 60 mm2), GIF Quantum
Recording: CCD
Specimen holder: single-tilt, double-tilting, double-tilting Be analytical
Others: Bi-prism for holography, BSI detector
High voltage electron microscope laboratory
hvem*@*nagoya-microscopy.jp
Transmission electron microscope
JEM2100F-HK
Acc. Vol.: 200kV
Electron gun: Schottky FEG
Mode: TEM/STEM
Anal. Tool: EDX (SDD: 60 mm2)
Recording: CCD
Specimen holder: double-tilting cooling, double-tilting heating, multi-sample, Be analytical
High voltage electron microscope laboratory
hvem*@*nagoya-microscopy.jp
Transmission Electron Microscope
JEM-2100plus
Shared Equipment Office
shared.equip*@*imass.nagoya-u.ac.jp
High voltage electron microscope laboratory
hvem*@*nagoya-microscopy.jp
Electron Spectroscopic scanning TEM
JEM2100M
Acc. Vol.: 80-200 kV
Electron gun: Thermal (LaB6)
Mode: TEM/STEM
Anal. Tool: EDX (SDD: 30 mm2), WDX, EELS (Enfina), CL
Recording: CCD
Specimen holder: single-tilt, double-tilting, double-tilting Be analytical, rotation, cooling & heating
Others: BSI detector
High voltage electron microscope laboratory
hvem*@*nagoya-microscopy.jp
High-speed sample fabrication/analysis system
MI-4000L
Acc vol.:30kV (FIB, SEM)
Anal. Tool: FE-SEM、EDS, EDSD
Micro-sampling, Slice & See
High voltage electron microscope laboratory
hvem*@*nagoya-microscopy.jp
Focused ion beam sample preparation system
FB-2100
Acc vol.:40kV
Micro-sampling
High voltage electron microscope laboratory
hvem*@*nagoya-microscopy.jp
Precision ion beam milling system
PIPS II
Ion energy: 100 eV~8 keV
Attachments: Digitally zooming microscope, specimen cooling stage
High voltage electron microscope laboratory
hvem*@*nagoya-microscopy.jp
Other instruments for sample preparation Low speed blade saw, wire saw, mechanical lapping system, jet polishing (EcoPol), ultramicrotomy, Cross-section polisher, Dimpling machine, Gentle mill, ion coating machine, etc High voltage electron microscope laboratory
hvem*@*nagoya-microscopy.jp
Field-emission scanning electron microscope JEOL JSM-6330F & JED-2140GS Shared Equipment Office
shared.equip*@*imass.nagoya-u.ac.jp
エネルギー分散型X線分析
装置付走査型電子顕微鏡
日立ハイテクノロジーズ S3000N
SEMEDXⅢTypeN1
SEI像分解能:3.0nm@ 25kV
COMPO像分解能:4.0nm
加速電圧:0.3~30kV
Shared Equipment Office
shared.equip*@*imass.nagoya-u.ac.jp
透過電子顕微鏡システム
日本電子 JEM-2010F
加速電圧200kV
点分解能0.19nm
STEM機能
Shared Equipment Office
shared.equip*@*imass.nagoya-u.ac.jp
FE-SEM JEOL JSM-6301F
Field-emission electron gun
Accelerating voltage: 0.5~30kV
Magnification: 10~500,000
Analysis with energy dispersive X-ray spectrometry
Nano fabrication Platform
info*@*nanofab.engg.nagoya-u.ac.jp

Analysis Measurement Equipment

Facilities and Equipment Specifications Inquiry
X-ray diffractometer RIGAKU ATX-G
X-ray sourse : Cu-Ka, 18kW
Multilayered focusing mirror
Ge monochromater
θ-2θscan mode,Rocking curve,Reciprocal lattice mapping, In-plane φ scan,φ-2θχscan
Nano fabrication Platform
info*@*nanofab.engg.nagoya-u.ac.jp
X-ray diffractometer RIGAKU RINT2500TTR Shared Equipment Office
shared.equip*@*imass.nagoya-u.ac.jp
Atomic force microscope Bruker, AXS Dimension3100
Scan range:XY axes 90μm,Z axis 6μm
Maximum sample size:150 mmφ-12mmt
Measurement mode : AFM,MFM,EFM,LFM,surface electric potential image,current image,lithography
Nano fabrication Platform
info*@*nanofab.engg.nagoya-u.ac.jp
Magnetometers Alternative gradient force magnetometer, sensitivity :10^-8emu,maximum field : 20kOe
Vibrating sample magnetometer, sensitivity :10^-5emu,maximum field : 15kOe
Torque magnetometer:sensitivity :2×10^-3erg,maximum field : 15kOe
Magneto-optical spectrometer, sensitivity :2×10^-3deg,maximum field : 16kOe
Nano fabrication Platform
info*@*nanofab.engg.nagoya-u.ac.jp
X-ray photoelectron spectrometer VG ESCALAB250
Mg/Al twin anode and Al monochromator
X ray source
Sample etching by Ar ion gun
Manipultor for angle resolved measurement
Nano fabrication Platform
info*@*nanofab.engg.nagoya-u.ac.jp
X-ray photoelectron spectrometer SHIMADZU ESCA-3300 Shared Equipment Office
shared.equip*@*imass.nagoya-u.ac.jp
イメージングXPSマイクロ
プローブ
サーモフィッシャー ESCALAB 250Xi
UPS, XPS両光電子分光計測が可能
XPS計測時:Mg, Al ツインアノード
利用可
最高エネルギー分解能:
0.5eV程度@Alkα
最高空間分解能:20μm
Shared Equipment Office
shared.equip*@*imass.nagoya-u.ac.jp
Inductively Coupled Plasma Atomic Emission Spectrometer Seiko Instruments, SPS7800 Shared Equipment Office
shared.equip*@*imass.nagoya-u.ac.jp
CHN coder (Yanaco) MT-6 Shared Equipment Office
shared.equip*@*imass.nagoya-u.ac.jp
Gas Chromatography Mass Spectrometry
SHIMADZU GCMS-QP2010Ultra
Mass spectrum range:1.5~1090Da
Simultaneous analysis possible
FASST( Fast Automated Scan/SIM Type)
Ion source:Electron Ionization(S/N 500 : 1pg octafluoronaphthalene)
Option:auto sampler
Shared Equipment Office
shared.equip*@*imass.nagoya-u.ac.jp
High Performance Liquid Chromatography
SHIMADZU LC-20AD
Parallel double plunger pump 2set
Flow rate range:0.0001~10.0000mL/min
Detector:photodiode array(PDA)semi-microcell Option:auto sampler
Shared Equipment Office
shared.equip*@*imass.nagoya-u.ac.jp

Center for Integrated Research of Future Electronics / Center for Integrated Research of Future Electronics, Transformative Electronics Facilities

Facilities and Equipment Specifications Inquiry
Ion implanter
ULVAC IMX-3500
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
High Temperature Sputtering Deposition Equipment
ULVAC QAM4
  Prof. HONDA Y.
FIB-SEM
HITACHI NX2000
  Prof. HONDA Y.
In-lens SEM
HITACHI SU9000
  Prof. HONDA Y.
Imaging CL
HORIBA WD201N
  Prof. HONDA Y.
Work function measuring device
RIKEN KENKI AC-3
  Prof. HONDA Y.
Emission microscope
HAMAMATSU PHOTONICS
PHEMOS-1000
  Prof. HONDA Y.
i-line stepper
Nikon NSR-2205i12D
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
Nano inprint equipment
SCIVAX X-500
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
Laser Confocal Microscope
Olympus OLS-4100
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
RCA cleaning system
Dalton 18-MR 12
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
Organic cleaning system
Dalton 18-MU11
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
Stylus profiler
Bruker Dektak XT-A
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
ICP etching system 4
ULVAC CE-S
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
Atomic layer deposition system
(Plasma/Thermal)
Ultratech/CambridgeNanoTech Fiji G2
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
LP-CVD
samco LPD-1200
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
ICP etching system 1
samco RIE-200iP
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
ICP etching system 2
samco RIE-200iP
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
P-CVD1
samco PD-220NL
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
ICP etching system 3
ULVAC NE-550EX
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
EB evaporator
ULVAC ei-5
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
Sputtering system
ULVAC CS-L
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
Automated Thickness Mapping Systems
FILMETRICS F50
  C-TEFs
c-tefs*@*imass.nagoya-u.ac.jp
West bond 7200CR   Prof. HONDA Y.
TECDIA TEC-2004TMR   Prof. HONDA Y.
Nanofactor Fact-200   Prof. HONDA Y.
West bond 7476D   Prof. HONDA Y.

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