{"id":8945,"date":"2023-12-14T14:00:12","date_gmt":"2023-12-14T05:00:12","guid":{"rendered":"https:\/\/www.imass.nagoya-u.ac.jp\/?p=8945"},"modified":"2023-12-20T09:23:04","modified_gmt":"2023-12-20T00:23:04","slug":"20231214_suda","status":"publish","type":"post","link":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/research\/20231214_suda.html","title":{"rendered":"\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0(AlN)\u7cfb\u30a6\u30eb\u30c8\u30e9\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53 <br>pn\u63a5\u5408\u3067\u7406\u60f3\u7684\u306a\u7279\u6027\u3092\u5b9f\u73fe <br>\uff5eAlN\u7cfb\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u5b9f\u73fe\u306b\u5411\u3051\u305f\u5927\u304d\u306a\u4e00\u6b69\uff5e"},"content":{"rendered":"<section class=\"e-box\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/pre\/wp\/wp-content\/uploads\/2023\/12\/20231214_p_suda1.jpg\" alt=\"\" width=\"1000\" height=\"563\" class=\"aligncenter size-full wp-image-9338\" \/><\/section>\r\n<section>\r\n<section class=\"e-box\">\r\n<h4><strong><span style=\"font-size: 20px;\"> \uff3b\u7814\u7a76\u6982\u8981\uff3d<\/span><br><\/strong><\/h4>\r\n<p><br><span style=\"font-size: 20px;\">\u3000\u56fd\u7acb\u5927\u5b66\u6cd5\u4eba\u6771\u6d77\u56fd\u7acb\u5927\u5b66\u6a5f\u69cb \u540d\u53e4\u5c4b\u5927\u5b66\u672a\u6765\u6750\u6599\u30fb\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240 \u9808\u7530 \u6df3 \u6559\u6388\u3001\u5929\u91ce \u6d69 \u6559\u6388\u3068\u65ed\u5316\u6210\u682a\u5f0f\u4f1a\u793e\u3089\u306e\u7814\u7a76\u30b0\u30eb\u30fc\u30d7\u306f\u3001<strong>\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u6750\u6599\u3068\u3057\u3066\u671f\u5f85\u3055\u308c\u308b\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0(AlN)\u7cfb\u6750\u6599\u306b\u304a\u3044\u3066\u3001\u7406\u60f3\u7684\u306a\u7279\u6027\u3092\u793a\u3059<\/strong><a id=\"aln1\"><\/a><strong><a href=\"#suda1\">pn\u63a5\u5408<\/a><sup>\uff08\u6ce81\uff09<\/sup>\u3092\u4f5c\u88fd\u3059\u308b\u3053\u3068\u306b\u4e16\u754c\u3067\u521d\u3081\u3066\u6210\u529f<\/strong>\u3057\u307e\u3057\u305f\u3002pn\u63a5\u5408\u306f\u534a\u5c0e\u4f53\u96fb\u5b50\u7d20\u5b50(\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9)\u306e\u6839\u5e79\u3092\u306a\u3059\u57fa\u672c\u69cb\u9020\u3067\u3042\u308a\u3001\u672c\u6210\u679c\u306f\u3001AlN\u7cfb\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u306e\u4eca\u5f8c\u306e\u767a\u5c55\u306e\u790e\u3068\u306a\u308b\u3082\u306e\u3067\u3059\u3002<br>\u3000\u73fe\u5728\u5e83\u304f\u4f7f\u308f\u308c\u3066\u3044\u308b\u534a\u5c0e\u4f53\u6750\u6599\u3067\u3042\u308b\u30b7\u30ea\u30b3\u30f3(Si)\u3084\u30ac\u30ea\u30a6\u30e0\u30d2\u7d20(GaAs)\u306e\uff14\uff5e\uff15\u500d\u306e<a id=\"aln2\"><\/a><a href=\"#suda2\">\u7981\u5236\u5e2f\u5e45(\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7)<\/a><sup>\uff08\u6ce82\uff09<\/sup>\u3092\u6709\u3059\u308b<a id=\"aln3\"><\/a><a href=\"#suda3\">\u30a6\u30eb\u30c8\u30e9\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7(UWBG)\u534a\u5c0e\u4f53<\/a><sup>\uff08\u6ce83\uff09<\/sup>\u306f\u3001<a id=\"aln4\"><\/a><a href=\"#suda4\">\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9<\/a><sup>\uff08\u6ce84\uff09<\/sup>\u3001<a id=\"aln5\"><\/a><a href=\"#suda5\">\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9<\/a><sup>\uff08\u6ce85\uff09<\/sup>\u306e\u683c\u6bb5\u306e\u6027\u80fd\u5411\u4e0a\u3092\u5b9f\u73fe\u53ef\u80fd\u306a\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u6750\u6599\u3068\u3057\u3066\u6ce8\u76ee\u3055\u308c\u3001\u4e16\u754c\u7684\u306b\u7814\u7a76\u304c\u6d3b\u767a\u5316\u3057\u3066\u3044\u307e\u3059\u3002\u3057\u304b\u3057\u306a\u304c\u3089\u3001UWBG\u534a\u5c0e\u4f53\u306b\u304a\u3044\u3066\u306f\u3001\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u6839\u5e79\u3068\u306a\u308b\u7406\u60f3\u7684\u306apn\u63a5\u5408\u306e\u5b9f\u73fe\u304c\u56f0\u96e3\u3068\u3044\u3046\u8ab2\u984c\u304c\u3042\u308a\u307e\u3057\u305f\u3002\u672c\u7814\u7a76\u30b0\u30eb\u30fc\u30d7\u306f\u3001UWBG\u534a\u5c0e\u4f53\u306e\u4e00\u3064\u3067\u3042\u308bAlN\u7cfb\u6750\u6599\u306b\u304a\u3044\u3066\u3001\u9ad8\u54c1\u8ceaAlN\u5358\u7d50\u6676\u57fa\u677f\u4e0a\u306b<a id=\"aln6\"><\/a><a href=\"#suda6\">\u5206\u5e03\u578b\u5206\u6975\u30c9\u30fc\u30d4\u30f3\u30b0(distributed polarization doping)<\/a><sup>\uff08\u6ce86\uff09<\/sup>\u3068\u3044\u3046\u624b\u6cd5\u3067pn\u63a5\u5408\u3092\u5f62\u6210\u3059\u308b\u3053\u3068\u3067\u3001\u96fb\u6d41-\u96fb\u5727\u7279\u6027\u3001\u96fb\u5727-\u5bb9\u91cf\u7279\u6027\u3001\u96fb\u6d41\u6ce8\u5165\u306b\u3088\u308b\u767a\u5149\u7279\u6027\u306b\u304a\u3044\u3066\u975e\u5e38\u306b\u826f\u597d\u306a\u7279\u6027\u3092\u793a\u3059\u3001\u7406\u60f3\u7684\u306aAlN\u7cfbpn\u63a5\u5408\u306e\u5b9f\u73fe\u306b\u4e16\u754c\u3067\u521d\u3081\u3066\u6210\u529f\u3057\u307e\u3057\u305f\u3002\u65ed\u5316\u6210\u306e\u5b50\u4f1a\u793e\u3067\u3042\u308b\u30af\u30ea\u30b9\u30bf\u30eb\u30fb\u30a2\u30a4\u30a8\u30b9(CIS)\u304c\u958b\u767a\u3057\u305f\u9ad8\u54c1\u8ceaAlN\u5358\u7d50\u6676\u57fa\u677f\u3001\u540d\u53e4\u5c4b\u5927\u5b66\u3068\u65ed\u5316\u6210\u3067\u5171\u540c\u958b\u767a\u3057\u305fAlN\u7cfb\u8584\u819c\u7d50\u6676\u6210\u9577\u6280\u8853(\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u6280\u8853)\u3001\u540d\u53e4\u5c4b\u5927\u5b66\u30a8\u30cd\u30eb\u30ae\u30fc\u5909\u63db\u5b9f\u9a13\u65bd\u8a2d(C-TEFs)\u306e\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u3092\u6d3b\u7528\u3057\u305f\u30c7\u30d0\u30a4\u30b9\u5f62\u6210\u6280\u8853\u306b\u3088\u308a\u5b9f\u73fe\u304c\u53ef\u80fd\u3068\u306a\u3063\u305f\u3082\u306e\u3067\u3059\u3002<br>\u3000\u672c\u7814\u7a76\u6210\u679c\u306f\u3001\u672c\u5b66\u535a\u58eb\u5f8c\u671f\u8ab2\u7a0b\u5b66\u751f\u306e\u9688\u90e8 \u5cb3\u7460\u3055\u3093\u306b\u3088\u308a2023\u5e7412\u670812\u65e515:10-15:35\uff08\u30a2\u30e1\u30ea\u30ab\u592a\u5e73\u6d0b\u6642\u9593\uff09\u306b\u4e16\u754c\u30c8\u30c3\u30d7\u30af\u30e9\u30b9\u306e\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306b\u95a2\u3059\u308b\u56fd\u969b\u4f1a\u8b70(International Electron Device Meeting, <a id=\"aln7\"><\/a><a href=\"#suda7\">IEDM<\/a><sup>\uff08\u6ce87\uff09<\/sup>, \u7c73\u56fd\u30b5\u30f3\u30d5\u30e9\u30f3\u30b7\u30b9\u30b3\u958b\u50ac)\u3067\u767a\u8868\u3055\u308c\u307e\u3057\u305f\u3002<\/span><\/p>\r\n<\/section>\r\n<section class=\"e-box\">\r\n<h4><strong><span style=\"font-size: 20px;\">[\u7814\u7a76\u306e\u30dd\u30a4\u30f3\u30c8]<\/span><\/strong><\/h4>\r\n<ul style=\"list-style-type: circle;\">\r\n<li><span style=\"font-size: 20px;\"><strong>\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u6750\u6599\u3068\u3057\u3066\u671f\u5f85\u3055\u308c\u308b\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0(AlN)\u7cfb\u6750\u6599\u306b\u304a\u3044\u3066\u3001\u7406\u60f3\u7684\u306a\u7279\u6027\u3092\u793a\u3059pn\u63a5\u5408\u3092\u4f5c\u88fd\u3059\u308b\u3053\u3068\u306b\u4e16\u754c\u3067\u521d\u3081\u3066\u6210\u529f\u3057\u305f\u3002<\/strong><\/span><\/li>\r\n<li><span style=\"font-size: 20px;\"><strong>AlN\u7cfb\u534a\u5c0e\u4f53\u306f\u6b21\u4e16\u4ee3\u306e\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9\u3001\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u6750\u6599\u3068\u3057\u3066\u671f\u5f85\u3092\u96c6\u3081\u3066\u3044\u308b\u3002pn\u63a5\u5408\u306f\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u6839\u5e79\u3092\u306a\u3059\u57fa\u672c\u69cb\u9020\u3067\u3042\u308a\u3001\u672c\u6210\u679c\u306f\u3001AlN\u7cfb\u30c7\u30d0\u30a4\u30b9\u306e\u4eca\u5f8c\u306e\u767a\u5c55\u306e\u790e\u3068\u306a\u308b\u3002<\/strong><\/span><\/li>\r\n<li><span style=\"font-size: 20px;\"><strong>CIS\u304c\u958b\u767a\u3057\u305f\u9ad8\u54c1\u8ceaAlN\u5358\u7d50\u6676\u57fa\u677f\u3001\u540d\u53e4\u5c4b\u5927\u5b66\u3068\u65ed\u5316\u6210\u3067\u5171\u540c\u958b\u767a\u3057\u305fAlN\u7cfb\u8584\u819c\u7d50\u6676\u6210\u9577\u6280\u8853(\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u6280\u8853)\u3001\u540d\u53e4\u5c4b\u5927\u5b66\u672a\u6765\u6750\u6599\u30fb\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240\u30a8\u30cd\u30eb\u30ae\u30fc\u5909\u63db\u5b9f\u9a13\u65bd\u8a2d(C-TEFs)\u306e\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u306e\u6d3b\u7528\u306b\u3088\u308a\u672c\u6210\u679c\u3092\u9054\u6210\u3057\u305f\u3002\u7523\u5b66\u9023\u643a\u3001\u672c\u5b66\u306e\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u7814\u7a76\u62e0\u70b9\u306e\u6d3b\u7528\u306b\u3088\u308b\u6210\u679c\u3067\u3042\u308b\u3002<\/strong><\/span><\/li>\r\n<\/ul>\r\n<\/section>\r\n<section class=\"e-box\">\r\n<h4><strong><span style=\"font-size: 20px;\"> \uff3b\u7814\u7a76\u80cc\u666f\u3068\u5185\u5bb9\uff3d<\/span><br><\/strong><\/h4>\r\n<p><span style=\"text-decoration: underline;\"><strong><span style=\"font-size: 20px;\">\u7814\u7a76\u80cc\u666f<\/span><\/strong><\/span><\/p>\r\n<p>&nbsp;<\/p>\r\n<ul style=\"list-style-type: disc;\">\r\n<li><span style=\"font-size: 20px;\">\u6b21\u4e16\u4ee3\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u3001\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9\u7528\u6750\u6599\u3068\u3057\u3066\u6ce8\u76ee\u3092\u96c6\u3081\u308bAlN\u7cfb\u30a6\u30eb\u30c8\u30e9\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7(UWBG)\u534a\u5c0e\u4f53\u6750\u6599\u304c\u6ce8\u76ee\u3092\u96c6\u3081\u3066\u3044\u308b\u3002\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u6750\u6599\u3068\u3057\u3066\u671f\u5f85\u3055\u308c\u308b\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0(AlN)\u7cfb\u6750\u6599\u306b\u304a\u3044\u3066\u3001\u7406\u60f3\u7684\u306a\u7279\u6027\u3092\u793a\u3059pn\u63a5\u5408\u3092\u4f5c\u88fd\u3059\u308b\u3053\u3068\u306b\u4e16\u754c\u3067\u521d\u3081\u3066\u6210\u529f\u3057\u305f\u3002<\/span><\/li>\r\n<li><span style=\"font-size: 20px;\">UWBG\u534a\u5c0e\u4f53\u306e\u7814\u7a76\u304c\u767a\u5c55\u3059\u308b\u3068\u3001\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u306e\u640d\u5931\u4f4e\u6e1b\u306b\u3088\u308b\u3055\u3089\u306a\u308b\u7701\u30a8\u30cd\u306e\u5b9f\u73fe\u3001\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9\u306e\u9ad8\u5468\u6ce2\u5316\u306b\u3088\u308b\u901a\u4fe1\u901f\u5ea6\u5411\u4e0a\u306a\u3069\u306b\u8ca2\u732e\u3067\u304d\u308b\u3002<\/span><\/li>\r\n<li><span style=\"font-size: 20px;\">\u3057\u304b\u3057\u306a\u304c\u3089\u3001UWBG\u534a\u5c0e\u4f53\u306b\u5171\u901a\u3059\u308b\u6280\u8853\u7684\u8ab2\u984c\u3068\u3057\u3066\u3001\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u306e\u6839\u5e79\u3068\u306a\u308bpn\u63a5\u5408\u306e\u4f5c\u88fd\u304c\u56f0\u96e3\u3068\u3044\u3046\u554f\u984c\u304c\u3042\u3063\u305f(\u5f93\u6765\u534a\u5c0e\u4f53\u3067\u3042\u308bSi\u3084GaAs\u3067\u306fpn\u63a5\u5408\u306e\u5f62\u6210\u306f\u5bb9\u6613\u3067\u3042\u308a\u3001\u305d\u308c\u304c\u65e9\u671f\u306e\u5b9f\u7528\u5316\u306b\u3064\u306a\u304c\u3063\u305f)\u3002<\/span><\/li>\r\n<\/ul>\r\n<p>&nbsp;<\/p>\r\n<p style=\"text-align: center;\"><\/p>\r\n<table style=\"width: 54.4811%; border-collapse: collapse; border-style: none; height: 544px;\" class=\" aligncenter\">\r\n<tbody>\r\n<tr style=\"height: 65px;\">\r\n<td style=\"width: 31.6764%; text-align: center;\"><span style=\"font-size: 20px;\"><strong>\u6750\u6599<\/strong><\/span><\/td>\r\n<td style=\"width: 19.7427%; text-align: center;\"><span style=\"font-size: 20px;\"><strong>\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7<\/strong><\/span><\/td>\r\n<\/tr>\r\n<tr style=\"height: 65px;\">\r\n<td style=\"width: 31.6764%; text-align: center;\"><span style=\"font-size: 20px;\">\u30b7\u30ea\u30b3\u30f3(Si)<\/span><\/td>\r\n<td style=\"width: 19.7427%; text-align: center;\"><span style=\"font-size: 20px;\">1.1 eV<\/span><\/td>\r\n<\/tr>\r\n<tr style=\"height: 65px;\">\r\n<td style=\"width: 31.6764%; height: 61px; text-align: center;\"><span style=\"font-size: 20px;\">\u30ac\u30ea\u30a6\u30e0\u30d2\u7d20(GaAs)<\/span><\/td>\r\n<td style=\"width: 19.7427%; height: 61px; text-align: center;\"><span style=\"font-size: 20px;\">1.4 eV<\/span><\/td>\r\n<\/tr>\r\n<tr style=\"height: 65px;\">\r\n<td style=\"width: 31.6764%; height: 61px; text-align: center;\"><span style=\"font-size: 20px;\">\u70ad\u5316\u30b1\u30a4\u7d20(SiC)<\/span><\/td>\r\n<td style=\"width: 19.7427%; height: 61px; text-align: center;\"><span style=\"font-size: 20px;\">3.3 eV<\/span><\/td>\r\n<\/tr>\r\n<tr style=\"height: 65px;\">\r\n<td style=\"width: 31.6764%; height: 61px; text-align: center;\"><span style=\"font-size: 20px;\">\u7a92\u5316\u30ac\u30ea\u30a6\u30e0(GaN)<\/span><\/td>\r\n<td style=\"width: 19.7427%; height: 61px; text-align: center;\"><span style=\"font-size: 20px;\">3.4 eV<\/span><\/td>\r\n<\/tr>\r\n<tr style=\"height: 65px;\">\r\n<td style=\"width: 31.6764%; height: 61px; text-align: center;\"><span style=\"font-size: 20px;\">\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9(C)<\/span><\/td>\r\n<td style=\"width: 19.7427%; height: 61px; text-align: center;\"><span style=\"font-size: 20px;\">5.5 eV<\/span><\/td>\r\n<\/tr>\r\n<tr style=\"height: 65px;\">\r\n<td style=\"width: 31.6764%; height: 61px; text-align: center;\"><span style=\"font-size: 20px;\">\u9178\u5316\u30ac\u30ea\u30a6\u30e0(Ga<sub>2<\/sub>O<sub>3<\/sub>)<\/span><\/td>\r\n<td style=\"width: 19.7427%; height: 61px; text-align: center;\"><span style=\"font-size: 20px;\">4.8 eV<\/span><\/td>\r\n<\/tr>\r\n<tr style=\"height: 65px;\">\r\n<td style=\"width: 31.6764%; height: 61px; text-align: center;\"><span style=\"font-size: 20px;\">\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0(AlN)<\/span><\/td>\r\n<td style=\"width: 19.7427%; height: 61px; text-align: center;\"><span style=\"font-size: 20px;\">6.0 eV<\/span><\/td>\r\n<\/tr>\r\n<\/tbody>\r\n<\/table>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"text-decoration: underline;\"><strong><span style=\"font-size: 20px;\">\u672c\u7814\u7a76\u306e\u30dd\u30a4\u30f3\u30c8<\/span><\/strong><\/span><\/p>\r\n<p>&nbsp;<\/p>\r\n<ul style=\"list-style-type: disc;\">\r\n<li><span style=\"font-size: 20px;\">\u5f93\u6765\u306e<a id=\"aln8\"><\/a><a href=\"#suda8\">\u4e0d\u7d14\u7269\u30c9\u30fc\u30d4\u30f3\u30b0<\/a><sup>\uff08\u6ce88\uff09<\/sup>\u3067\u306f\u306a\u304f\u3001\u5316\u5b66\u7d44\u6210(AlN\u306b\u5bfe\u3057\u3066\u6570%\uff5e30%\u306eGaN\u3092\u6df7\u5408\u3059\u308b)\u3092\u7a7a\u9593\u7684\u306b\u5909\u5316\u3055\u305b\u308b\u5206\u5e03\u578b\u5206\u6975\u30c9\u30fc\u30d4\u30f3\u30b0(distributed polarization doping, DPD)\u3068\u547c\u3070\u308c\u308b\u624b\u6cd5\u3092\u4f7f\u7528\u3059\u308b\u3053\u3068\u3067\u3001\u7279\u6027\u306e\u512a\u308c\u305fAlN\u7cfbp\u5c64\u3001n\u5c64\u306e\u5b9f\u73fe\u3092\u76ee\u6307\u3057\u305f\u3002<\/span><\/li>\r\n<li><span style=\"font-size: 20px;\">\u7406\u60f3\u901a\u308a\u306eDPD\u3092\u767a\u73fe\u3055\u305b\u308b\u305f\u3081\u306b\u306f\u9ad8\u54c1\u8cea\u306a\u8584\u819c\u7d50\u6676\u6210\u9577\u6280\u8853\u304c\u5fc5\u8981\u3067\u3001\u305d\u306e\u7814\u7a76\u958b\u767a\u3082\u7cbe\u529b\u7684\u306b\u9032\u3081\u305f\u3002<\/span><\/li>\r\n<li><span style=\"font-size: 20px;\">\u4f5c\u88fd\u3057\u305fAlN\u7cfbpn\u63a5\u5408\u306f\u3001\u7406\u60f3\u7684\u306a\u96fb\u6d41-\u96fb\u5727\u7279\u6027\u3001\u96fb\u5727-\u5bb9\u91cf\u7279\u6027\u3001\u96fb\u6d41\u6ce8\u5165\u306b\u3088\u308b\u767a\u5149\u7279\u6027\u3092\u793a\u3057\u305f\u3002\u7279\u306b\u96fb\u6d41-\u96fb\u5727\u7279\u6027\u306b\u304a\u3044\u3066\u3001\u512a\u308c\u305f\u9ad8\u96fb\u5727\u306b\u5bfe\u3059\u308b\u8010\u6027\u3092\u793a\u3057\u305f\u3002<\/span><\/li>\r\n<li><span style=\"font-size: 20px;\">\u3053\u306e\u3088\u3046\u306a\u512a\u308c\u305f\u7279\u6027\u3092\u5168\u3066\u6e80\u305f\u3059AlN\u7cfbpn\u63a5\u5408\u306e\u5b9f\u73fe\u306f\u4e16\u754c\u521d\u3002<\/span><\/li>\r\n<li><span style=\"font-size: 20px;\">\u9ad8\u8010\u5727\u7279\u6027\u306b\u3064\u3044\u3066\u3001\u7d76\u7e01\u7834\u58ca\u96fb\u754c\u5f37\u5ea6\u3092\u6c42\u3081\u308b\u30687.\uff13 MV\/cm\u3068\u306a\u308a\u3001\u3053\u308c\u306f\u5f93\u6765\u534a\u5c0e\u4f53\u306eSi\u306e25\u500d\u3001\u7d76\u7e01\u7834\u58ca\u96fb\u754c\u5f37\u5ea6\u306b\u512a\u308c\u305f\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\uff08WBG\uff09\u534a\u5c0e\u4f53\u3067\u3042\u308bSiC\u3084GaN\u306b\u5bfe\u3057\u3066\u30822\u500d\u306e\u5024\u3067\u3042\u308b\u3002<\/span><\/li>\r\n<\/ul>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"text-decoration: underline;\"><strong><span style=\"font-size: 20px;\">\u672c\u7814\u7a76\u3067\u4f5c\u88fd\u3057\u305f\u30c7\u30d0\u30a4\u30b9\u306e\u65ad\u9762\u69cb\u9020<\/span><\/strong><\/span><\/p>\r\n<p><span style=\"font-size: 20px;\">\u3000\u9ad8\u54c1\u8ceaAlN\uff080001\uff09\u57fa\u677f\u4e0a\u306b\u6709\u6a5f\u91d1\u5c5e\u6c17\u76f8\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577(MOVPE)\u6cd5\u3092\u7528\u3044\u3066\u3001\u30c9\u30fc\u30d4\u30f3\u30b0\u3092\u884c\u308f\u306a\u3044AlN\u5c64\u3001\u9ad8\u6fc3\u5ea6n\u578bAl<sub>0.7<\/sub>Ga<sub>0.3<\/sub>N\u5c64\u3092\u5f62\u6210\u3057\u305f\u306e\u3061\u3001AlN\u306e\u30e2\u30eb\u5206\u7387\u3092\u5f90\u3005\u306b\u5897\u52a0\u3055\u305b\u305f\u5c64(n\u578bDPD\u5c64)\u3001AlN\u306e\u30e2\u30eb\u5206\u7387\u3092\u6e1b\u5c11\u3055\u305b\u305f\u5c64(p\u578bDPD\u5c64)\u3092\u5f62\u6210\u3002\u6700\u5f8c\u306b\u9ad8\u6fc3\u5ea6p\u578bGaN\u5c64\u3092\u5f62\u6210\u3057\u305f\u3002\u6700\u4e0a\u90e8\u306e\u9ad8\u6fc3\u5ea6p\u578bGaN\u5c64\u3068\u3001\u4e0b\u90e8\u306e\u9ad8\u6fc3\u5ea6n\u578bAl<sub>0.7<\/sub>Ga<sub>0.3<\/sub>N\u5c64\u306b\u96fb\u6975\u3092\u5f62\u6210\u3057\u3001pn\u63a5\u5408\u30c0\u30a4\u30aa\u30fc\u30c9\u3092\u4f5c\u88fd\u3057\u305f\u3002<\/span><\/p>\r\n<\/section>\r\n<section class=\"e-box\">\r\n<p><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/pre\/wp\/wp-content\/uploads\/2023\/12\/20231214_p_suda2.jpg\" alt=\"\" width=\"1012\" height=\"614\" class=\"aligncenter size-full wp-image-9339\" \/><\/p>\r\n<\/section>\r\n<section class=\"e-box\">\r\n<p><span style=\"text-decoration: underline;\"><strong><span style=\"font-size: 20px;\">\u4f5c\u88fd\u3057\u305fAlN\u7cfbpn\u63a5\u5408\u30c0\u30a4\u30aa\u30fc\u30c9\u306e\u96fb\u6c17\u6e2c\u5b9a\u306e\u69d8\u5b50<\/span><\/strong><\/span><\/p>\r\n<p>&nbsp;<\/p>\r\n<div id=\"attachment_9335\" style=\"width: 568px\"  class=\"wp-caption aligncenter\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/pre\/wp\/wp-content\/uploads\/2023\/12\/20231214_p_suda3.jpg\" alt=\"\" width=\"558\" height=\"420\" class=\"wp-image-9335 size-full\" \/><p class=\"wp-caption-text\"><span style=\"font-size: 16px;\">AlN\u30a6\u30a8\u30cf\u4e0a\u306b\u4f5c\u88fd\u3057\u305fpn\u30c0\u30a4\u30aa\u30fc\u30c9\u306b2\u672c\u306e\u30d7\u30ed\u30fc\u30d6\u3092\u5f53\u3066\u3066\u6e2c\u5b9a\u3092\u884c\u3063\u3066\u3044\u308b\u69d8\u5b50\u3002\u4e00\u3064\u4e00\u3064\u306e\u6a21\u69d8\u304c\u4e00\u3064\u306e\u30c0\u30a4\u30aa\u30fc\u30c9\u3002<\/span><\/p><\/div>\r\n<\/section>\r\n<p>&nbsp;<\/p>\r\n<section class=\"e-box\">\r\n<p><span style=\"text-decoration: underline;\"><strong><span style=\"font-size: 20px;\">\u7d76\u7e01\u7834\u58ca\u96fb\u754c\u306e\u30d9\u30f3\u30c1\u30de\u30fc\u30af<\/span><\/strong><\/span><\/p>\r\n<p><span style=\"font-size: 20px;\">\u3000WBG\u534a\u5c0e\u4f53\u3067\u3042\u308bSiC\u3084GaN\u306b\u6bd4\u3079\u30662\u500d\u306e7.3 MV\/cm\u306e\u7d76\u7e01\u7834\u58ca\u96fb\u754c\u5f37\u5ea6\u304c\u5f97\u3089\u308c\u305f\u3002\u3053\u308c\u306fAlN\u7cfbpn\u63a5\u5408\u306e\u7d76\u7e01\u7834\u58ca\u96fb\u754c\u5f37\u5ea6\u5b9f\u6e2c\u5024\u3068\u3057\u3066\u4e16\u754c\u6700\u9ad8\u8a18\u9332\u3067\u3042\u308b\u3002\u672c\u7814\u7a76\u3067\u306f\u8010\u5727\u5411\u4e0a\u306e\u5de5\u592b\u3092\u884c\u3063\u3066\u3044\u306a\u3044\u305f\u3081\u3001\u4eca\u5f8c\u306e\u7814\u7a76\u3067\u3053\u306e\u5024\u306f\u3055\u3089\u306b\u5411\u4e0a\u3059\u308b\u3053\u3068\u304c\u671f\u5f85\u3055\u308c\u308b\u3002<\/span><\/p>\r\n<\/section>\r\n<section class=\"e-box\">\r\n<p><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/pre\/wp\/wp-content\/uploads\/2023\/12\/20231214_p_suda4.jpg\" alt=\"\" width=\"701\" height=\"664\" class=\"aligncenter size-full wp-image-9336\" \/><\/p>\r\n<\/section>\r\n<p>&nbsp;<\/p>\r\n<section class=\"e-box\">\r\n<p><span style=\"text-decoration: underline;\"><strong><span style=\"font-size: 20px;\">\u306a\u305c\u4e16\u754c\u306b\u5148\u99c6\u3051\u3066\u5b9f\u73fe\u3067\u304d\u305f\u306e\u304b\uff1f<br><br><\/span><\/strong><\/span><\/p>\r\n<ul style=\"list-style-type: disc;\">\r\n<li><span style=\"font-size: 20px;\">\u2460\u9ad8\u54c1\u8cea\u306aAlN\u5358\u7d50\u6676\u57fa\u677f(\u4e0b\u5730\u6750\u6599)\u306e\u5229\u7528\u3001\u2461\u7406\u60f3\u7684\u306aDPD\u5c64\u306e\u5f62\u6210\u3092\u5b9f\u73fe\u3059\u308b\u305f\u3081\u306e\u5de5\u592b\u3092\u51dd\u3089\u3057\u305f\u8584\u819c\u7d50\u6676\u6210\u9577\u6280\u8853(\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u6280\u8853)\u3001\u2462\u30c7\u30d0\u30a4\u30b9(pn\u63a5\u5408\u30c0\u30a4\u30aa\u30fc\u30c9)\u4f5c\u88fd\u6280\u8853\u304c\u4e00\u4f53\u3068\u306a\u308b\u3053\u3068\u3067\u5b9f\u73fe\u3067\u304d\u305f\u3002(\u2460\u306f\u65ed\u5316\u6210\u306e\u6280\u8853\u3001\u2461\u3068\u2462\u306f\u540d\u53e4\u5c4b\u5927\u5b66\u3068\u65ed\u5316\u6210\u306e\u5171\u540c\u7814\u7a76)<\/span><\/li>\r\n<li><span style=\"font-size: 20px;\">\u540d\u53e4\u5c4b\u5927\u5b66\u3068\u65ed\u5316\u6210\u306f\u9577\u5e74\u306b\u308f\u305f\u308aAlN\u7cfb\u534a\u5c0e\u4f53\u3092\u7528\u3044\u305f\u6df1\u7d2b\u5916\u9818\u57df\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30aa\u30fc\u30c9\u306e\u7814\u7a76\u958b\u767a\u3092\u884c\u3063\u3066\u304a\u308a\u3001AlN\u7cfb\u6750\u6599\u306e\u8584\u819c\u7d50\u6676\u6210\u9577\u3001\u30c7\u30d0\u30a4\u30b9\u4f5c\u88fd\u6280\u8853\u306b\u95a2\u3059\u308b\u8c4a\u5bcc\u306a\u7d4c\u9a13\u3068\u6280\u8853\u7684\u306a\u84c4\u7a4d\u304c\u3042\u3063\u305f\u3002<\/span><\/li>\r\n<li><span style=\"font-size: 20px;\">\u540d\u53e4\u5c4b\u5927\u5b66\u306fGaN\u7cfb\u6750\u6599\u306eDPD\u306b\u3088\u308bpn\u63a5\u5408\u306b\u304a\u3044\u3066\u6210\u679c\u3092\u4e0a\u3052\u3066\u304a\u308a\u3001DPD\u306e\u8a2d\u8a08\u306a\u3069\u306b\u3064\u3044\u3066\u6280\u8853\u7684\u306a\u84c4\u7a4d\u304c\u3042\u3063\u305f\u3002<\/span><\/li>\r\n<li><span style=\"font-size: 20px;\">\u30c7\u30d0\u30a4\u30b9\u4f5c\u88fd\u306b\u3064\u3044\u3066\u306f\u3001\u6b21\u4e16\u4ee3\u6750\u6599\u306e\u305f\u3081\u306e\u534a\u5c0e\u4f53\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u65bd\u8a2d\u3067\u3042\u308b\u3001\u672a\u6765\u6750\u6599\u30fb\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240 \u30a8\u30cd\u30eb\u30ae\u30fc\u5909\u63db\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u5b9f\u9a13\u65bd\u8a2d(C-TEFs) \u3092\u6d3b\u7528\u3057\u305f\u3002<\/span><\/li>\r\n<\/ul>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"text-decoration: underline;\"><strong><span style=\"font-size: 20px;\">\u5199\u771f\uff1a\u9ad8\u54c1\u8ceaAlN\u5358\u7d50\u6676\u57fa\u677f(\u65ed\u5316\u6210\u63d0\u4f9b)<\/span><\/strong><\/span><\/p>\r\n<\/section>\r\n<section class=\"e-box\">\r\n<div id=\"attachment_9337\" style=\"width: 420px\"  class=\"wp-caption aligncenter\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/pre\/wp\/wp-content\/uploads\/2023\/12\/20231214_p_suda5.jpg\" alt=\"\" width=\"410\" height=\"341\" class=\"wp-image-9337 size-full\" \/><p class=\"wp-caption-text\"><span style=\"font-size: 16px;\">2\u30a4\u30f3\u30c1AlN\u5358\u7d50\u6676\u57fa\u677f(AlN\u30a6\u30a7\u30cf\u30fc)<\/span><\/p><\/div>\r\n<\/section>\r\n<p>&nbsp;<\/p>\r\n<section class=\"e-box\">\r\n<p><span style=\"text-decoration: underline;\"><strong><span style=\"font-size: 20px;\">\u5199\u771f\uff1a\u30a8\u30cd\u30eb\u30ae\u30fc\u5909\u63db\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u5b9f\u9a13\u65bd\u8a2d(C-TEFs)<\/span><\/strong><\/span><\/p>\r\n<p><br><span style=\"font-size: 16px;\">GaN\u3092\u306f\u3058\u3081\u3068\u3057\u305f\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u6750\u6599\u306e\u7814\u7a76\u958b\u767a\u62e0\u70b9\u3068\u3057\u3066\u6700\u5148\u7aef\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u3092\u6574\u5099\u3002\u7d50\u6676\u6210\u9577\u3084\u30c7\u30d0\u30a4\u30b9\u4f5c\u88fd\u306a\u3069\u3092\u884c\u3046\u3053\u3068\u304c\u3067\u304d\u308b\u3002<\/span><\/p>\r\n<ul class=\"e-gridList e-gridList-half e-sp-half\">\r\n<li>\r\n<figure class=\"e-gridList-img\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/pre\/wp\/wp-content\/uploads\/2023\/12\/20231214_p_ctefs1.jpg\" alt=\"\" width=\"720\" height=\"480\" class=\"aligncenter size-full wp-image-9341\" \/><\/figure>\r\n<p class=\"e-gridList-text\"><\/p>\r\n<\/li>\r\n<li>\r\n<figure class=\"e-gridList-img\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/pre\/wp\/wp-content\/uploads\/2023\/12\/20231214_p_ctefs2.jpg\" alt=\"\" width=\"722\" height=\"483\" class=\"aligncenter size-full wp-image-9340\" \/><\/figure>\r\n<p class=\"e-gridList-text\"><\/p>\r\n<\/li>\r\n<\/ul>\r\n<\/section>\r\n<section class=\"e-box\">\r\n<h4><strong><span style=\"font-size: 20px;\">\uff3b\u6210\u679c\u306e\u610f\u7fa9\uff3d<\/span><br><\/strong><\/h4>\r\n<p><br><span style=\"font-size: 20px;\">\u3000WBG\u534a\u5c0e\u4f53\u306e\u793e\u4f1a\u5b9f\u88c5\u306fGaN\u7cfb\u534a\u5c0e\u4f53\u306e\u5149\u30c7\u30d0\u30a4\u30b9\u304b\u3089\u306f\u3058\u307e\u308a\u3001\u7d9a\u3044\u3066SiC\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u306e\u9244\u9053\u8eca\u4e21\u3078\u306e\u642d\u8f09\u3001GaN\u7cfb\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9\u306e\u643a\u5e2f\u96fb\u8a71\u57fa\u5730\u5c40\u3078\u306e\u642d\u8f09\u3001\u305d\u3057\u3066\u3001\u8fd1\u5e74\u3067\u306fGaN\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u306eUSB\u5145\u96fb\u5668\u3078\u306e\u642d\u8f09\u306a\u3069\u3068\u5e83\u304c\u308a\u3001\u5b89\u5168\u30fb\u5b89\u5fc3\u306a\u66ae\u3089\u3057\u3001\u3042\u308b\u3044\u306f\u4f4e\u70ad\u7d20\u793e\u4f1a\u5b9f\u73fe\u306b\u8ca2\u732e\u3057\u3066\u3044\u307e\u3059\u3002\u534a\u5c0e\u4f53\u5206\u91ce\u306e\u6700\u5148\u7aef\u7814\u7a76\u3067\u306f\u3001\u3088\u308a\u512a\u308c\u305f\u6027\u80fd\u30fb\u7279\u6027\u306e\u5b9f\u73fe\u3092\u76ee\u6307\u3057\u3066\u3001UWBG\u534a\u5c0e\u4f53\u306e\u7814\u7a76\u304c\u6d3b\u767a\u5316\u3057\u3066\u3044\u307e\u3059\u3002\u3057\u304b\u3057\u306a\u304c\u3089\u3001WBG\u534a\u5c0e\u4f53\u3068\u6bd4\u3079\u308b\u3068\u3055\u307e\u3056\u307e\u306a\u6280\u8853\u7684\u8ab2\u984c\u304c\u5b58\u5728\u3057\u3001\u5f93\u6765\u534a\u5c0e\u4f53\u306e\u624b\u6cd5\u3084\u7406\u8ad6\u306b\u57fa\u3065\u304f\u30a2\u30d7\u30ed\u30fc\u30c1\u3067\u306e\u89e3\u6c7a\u306f\u56f0\u96e3\u3067\u3042\u308a\u3001\u3055\u307e\u3056\u307e\u306a\u5de5\u592b\u304c\u8a66\u307f\u3089\u308c\u3066\u3044\u307e\u3059\u3002\u672c\u7814\u7a76\u3067\u306f\u4e0d\u7d14\u7269\u30c9\u30fc\u30d4\u30f3\u30b0\u306e\u4ee3\u66ff\u3068\u3057\u3066\u5206\u5e03\u578b\u5206\u6975\u30c9\u30fc\u30d4\u30f3\u30b0\u3092\u6d3b\u7528\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001AlN\u7cfb\u534a\u5c0e\u4f53\u3067\u3082\u826f\u597d\u306apn\u63a5\u5408\u3092\u5b9f\u73fe\u3067\u304d\u308b\u3053\u3068\u3092\u5b9f\u9a13\u7684\u306b\u793a\u3057\u3001\u307e\u305f\u3001AlN\u6750\u6599\u306e\u6700\u3082\u91cd\u8981\u306a\u7269\u6027\u5024\u3067\u3042\u308b\u7d76\u7e01\u7834\u58ca\u96fb\u754c\u5f37\u5ea6\u306b\u3064\u3044\u3066\u3001\u5b9f\u9a13\u7684\u306b\u5f93\u6765\u306eWBG\u534a\u5c0e\u4f53\u306e\u5c11\u306a\u304f\u3068\u30822\u500d\u3067\u3042\u308b\u3053\u3068\u3092\u8a3c\u660e\u3057\u307e\u3057\u305f\u3002\u672c\u7814\u7a76\u6210\u679c\u304c\u5951\u6a5f\u3068\u306a\u308a\u3001AlN\u7cfb\u6750\u6599\u306e\u7814\u7a76\u304c\u6d3b\u767a\u5316\u3057\u3001\u307e\u305f\u3001DPD\u3092\u6d3b\u7528\u3057\u305f\u3055\u307e\u3056\u307e\u306a\u30c7\u30d0\u30a4\u30b9\u306e\u7814\u7a76\u958b\u767a\u3082\u5e83\u304c\u308b\u3068\u671f\u5f85\u3055\u308c\u307e\u3059\u3002<\/span><br><span style=\"font-size: 20px;\">\u3000\u7a92\u5316\u7269\u534a\u5c0e\u4f53GaN\u9752\u8272LED\u306f\u540d\u53e4\u5c4b\u5927\u5b66\u306b\u304a\u3044\u3066\u8d64\ufa11\u6559\u6388\u3001\u5929\u91ce\u6559\u6388\u304c\u5927\u304d\u306a\u30d6\u30ec\u30a4\u30af\u30b9\u30eb\u30fc\u3092\u6210\u3057\u9042\u3052\u3066\u5b9f\u7528\u5316\u306e\u9053\u304c\u958b\u304b\u308c\u307e\u3057\u305f\u3002\u540d\u53e4\u5c4b\u5927\u5b66\u306f\u7a92\u5316\u7269\u534a\u5c0e\u4f53\u306e\u4e16\u754c\u7684\u7814\u7a76\u62e0\u70b9\u3092\u69cb\u7bc9\u3057\u3001\u3055\u307e\u3056\u307e\u306a\u4f01\u696d\u3001\u5927\u5b66\u3001\u6d77\u5916\u3068\u306e\u5171\u540c\u7814\u7a76\u3092\u9032\u3081\u3066\u3044\u307e\u3059\u3002\u672c\u6210\u679c\u306b\u9650\u3089\u305a\u3001\u7a92\u5316\u7269\u534a\u5c0e\u4f53\u306e\u3055\u307e\u3056\u307e\u306a\u5c55\u958b\u3092\u8003\u3048\u3001\u57fa\u790e\u7814\u7a76\u3001\u5fdc\u7528\u7814\u7a76\u3092\u5c55\u958b\u3057\u3066\u307e\u3044\u308a\u307e\u3059\u3002<\/span><br><span style=\"font-size: 20px;\">\u3000\u65ed\u5316\u6210\u306e\u30b3\u30a2\u6280\u8853\u3067\u3042\u308bAlN\u7cfb\u6750\u6599\u306f\u65ed\u5316\u6210\u88fd\u54c1\u3067\u3082\u3042\u308bUV-C LED\u3001\u540d\u53e4\u5c4b\u5927\u5b66\u3068\u306e\u5171\u540c\u7814\u7a76\u6210\u679c\u306b\u304a\u3051\u308bUV-C \u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30aa\u30fc\u30c9\u3001\u306a\u3069\u5149\u30c7\u30d0\u30a4\u30b9\u304c\u5148\u884c\u3057\u3066\u3044\u307e\u3057\u305f\u304c\u3001\u672c\u7814\u7a76\u3067\u3082\u793a\u3055\u308c\u305f\u3088\u3046\u306b\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u3068\u3057\u3066\u3082\u975e\u5e38\u306b\u671f\u5f85\u3067\u304d\u308b\u7d20\u6750\u3067\u3059\u3002\u65ed\u5316\u6210\u306f\u901f\u3084\u304b\u306a\u793e\u4f1a\u5b9f\u88c5\u3092\u76ee\u6307\u3057\u3066\u7814\u7a76\u958b\u767a\u306b\u3088\u308a\u4e00\u5c64\u306e\u529b\u3092\u5165\u308c\u3066\u3044\u304d\u307e\u3059\u3002<\/span><\/p>\r\n<\/section>\r\n<p>&nbsp;<\/p>\r\n<section class=\"e-box\">\r\n<h4><strong><span style=\"font-size: 20px;\"> \uff3b\u7528\u8a9e\u8aac\u660e\uff3d<\/span><br><\/strong><\/h4>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"font-size: 16px;\"><strong><span e238ec=\"\"><a id=\"suda1\"><\/a>\uff08\u6ce81\uff09pn\u63a5\u5408\uff1a<\/span><\/strong><\/span><br>\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9(\u7d20\u5b50)\u306e\u57fa\u672c\u69cb\u9020\u306e\u4e00\u3064\u3002\u96fb\u5b50\u304c\u591a\u6570\u5b58\u5728\u3059\u308bn\u578b\u534a\u5c0e\u4f53\u3068\u6b63\u5b54\u304c\u591a\u6570\u5b58\u5728\u3059\u308bp\u578b\u534a\u5c0e\u4f53\u3092\u7a4d\u5c64\u3057\u305f\u69cb\u9020\u3002\u96fb\u6d41\u3092\u4e00\u65b9\u5411\u306b\u306e\u307f\u6d41\u3059\u6574\u6d41\u4f5c\u7528\u3001\u96fb\u6d41\u6ce8\u5165\u306b\u3088\u308b\u767a\u5149\u3001\u5149\u7167\u5c04\u306b\u3088\u308b\u8d77\u96fb\u529b\u306a\u3069\u306e\u7279\u6027\u3092\u6301\u3064\u3002<span style=\"color: #008000;\"><a href=\"#aln1\" style=\"color: #008080;\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><span style=\"font-size: 16px;\"><strong><span e238ec=\"\"><a id=\"suda2\"><\/a>\uff08\u6ce82\uff09\u7981\u5236\u5e2f\u5e45(\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7)\uff1a<\/span><\/strong><\/span><br>\u534a\u5c0e\u4f53\u6750\u6599\u306e\u6700\u3082\u91cd\u8981\u306a\u7269\u6027(\u7279\u6027)\u5024\u306e\u4e00\u3064\u3002\u534a\u5c0e\u4f53\u4e2d\u306b\u96fb\u5b50\u3068\u6b63\u5b54\u306e\u30da\u30a2\u3092\u5f62\u6210\u3059\u308b\u305f\u3081\u306b\u5fc5\u8981\u306a\u30a8\u30cd\u30eb\u30ae\u30fc\u3002\u5358\u4f4d\u306f\u96fb\u5b50\u30dc\u30eb\u30c8(eV)\u304c\u4f7f\u308f\u308c\u308b\u3002\u6700\u3082\u5e83\u304f\u7528\u3044\u3089\u308c\u3066\u3044\u308bSi\u534a\u5c0e\u4f53\u306e\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u306f1.1 eV\u3002<span style=\"color: #008000;\"><a href=\"#aln2\" style=\"color: #008080;\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><span style=\"font-size: 16px;\"><strong><span e238ec=\"\"><a id=\"suda3\"><\/a>\uff08\u6ce83\uff09\u30a6\u30eb\u30c8\u30e9\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7(UWBG)\u534a\u5c0e\u4f53<sup>\u203b<\/sup>\uff1a<\/span><\/strong><\/span><br>\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u304c\u304a\u304a\u3080\u306d5 eV\u4ee5\u4e0a\u306e\u534a\u5c0e\u4f53\u3002\u3055\u3089\u306b\u5c06\u6765\u3092\u898b\u636e\u3048\u3066\u3001SiC\u3084GaN\u3088\u308a\u3055\u3089\u306b\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u306e\u5927\u304d\u306a\u534a\u5c0e\u4f53\u306e\u7814\u7a76\u958b\u767a\u3082\u6d3b\u767a\u5316\u3057\u3066\u3044\u308b\u3002\u4ee3\u8868\u7684\u306a\u534a\u5c0e\u4f53\u306f\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9(5.5 eV)\u3001Ga<sub>2<\/sub>O<sub>3<\/sub> (4.8 eV)\u3001AlN (6.0 eV)\u304c\u6319\u3052\u3089\u308c\u308b\u3002\u539f\u7406\u7684\u306b\u306fWBG\u534a\u5c0e\u4f53\u3088\u308a\u3082\u683c\u6bb5\u306e\u6027\u80fd\u5411\u4e0a\u304c\u671f\u5f85\u3067\u304d\u308b\u304c\u3001\u6280\u8853\u7684\u306b\u89e3\u6c7a\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u8ab2\u984c\u304c\u3044\u304f\u3064\u304b\u3042\u308b\u3002\u7279\u306b\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u4f5c\u88fd\u306e\u6839\u5e79\u3068\u306a\u308bpn\u63a5\u5408\u306e\u5b9f\u73fe\u304c\u975e\u5e38\u306b\u96e3\u3057\u3044\u3053\u3068\u304c\u6750\u6599\u306b\u95a2\u308f\u3089\u305aUWBG\u534a\u5c0e\u4f53\u306e\u5171\u901a\u306e\u8ab2\u984c\u306b\u306a\u3063\u3066\u3044\u308b\u3002pn\u63a5\u5408\u3092\u4f7f\u7528\u3057\u306a\u3044\u30c7\u30d0\u30a4\u30b9\u306e\u7814\u7a76\u3082\u304a\u3053\u306a\u308f\u308c\u3066\u3044\u308b\u304c\u3001pn\u63a5\u5408\u304c\u5229\u7528\u3067\u304d\u308b\u3068\u3001\u30c7\u30d0\u30a4\u30b9\u8a2d\u8a08\u306e\u81ea\u7531\u5ea6\u3084\u5229\u7528\u53ef\u80fd\u7bc4\u56f2\u304c\u5927\u304d\u304f\u5e83\u304c\u308a\u3001\u307e\u305f\u3001UWBG\u534a\u5c0e\u4f53\u306e\u512a\u308c\u305f\u7279\u6027\u3092\u5b8c\u5168\u306b\u5f15\u304d\u51fa\u3059\u3053\u3068\u304c\u53ef\u80fd\u3068\u306a\u308b\u3002<br><span style=\"font-size: 12px;\">\u203b\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7(WBG)\u534a\u5c0e\u4f53\uff1a<\/span><br><span style=\"font-size: 12px;\"> \u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u304c\u304a\u304a\u3080\u306d3 eV\u4ee5\u4e0a\u306e\u534a\u5c0e\u4f53\u3002\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u306f\u3001\u2460\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u304c\u52d5\u4f5c\u53ef\u80fd\u306a\u4e0a\u9650\u6e29\u5ea6\u3001\u2461\u534a\u5c0e\u4f53\u304c\u534a\u5c0e\u4f53\u3068\u3057\u3066\u306e\u6027\u8cea\u3092\u7dad\u6301\u3067\u304d\u308b\u96fb\u754c\u5f37\u5ea6(\u7d76\u7e01\u7834\u58ca\u96fb\u754c\u5f37\u5ea6)\u3001\u2462\u534a\u5c0e\u4f53\u304c\u53d7\u5149\u3001\u767a\u5149\u3059\u308b\u6ce2\u9577\u3001\u306a\u3069\u3068\u5bc6\u63a5\u306b\u95a2\u4fc2\u3057\u3066\u3044\u308b\u3002\u4f8b\u3048\u3070\u3001\u9752\u8272LED\u3092\u4f5c\u88fd\u3059\u308b\u306b\u306fWBG\u534a\u5c0e\u4f53\u306e\u5229\u7528\u304c\u5fc5\u9808\u3067\u3042\u308a\u3001WBG\u534a\u5c0e\u4f53\u3067\u3042\u308bGaN(3.4eV)\u7cfb\u6750\u6599\u304c\u7528\u3044\u3089\u308c\u3066\u3044\u308b\u3002\u307e\u305f\u3001\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u5fdc\u7528\u306b\u304a\u3044\u3066\u306f\u3001\u7d76\u7e01\u7834\u58ca\u96fb\u754c\u5f37\u5ea6\u304c\u5927\u304d\u3044\u6750\u6599\u3092\u4f7f\u3046\u3068\u3001\u640d\u5931\u304c\u5927\u5e45\u306b\u4f4e\u6e1b\u3067\u304d\u308b\u305f\u3081\u3001\u4f4e\u640d\u5931\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u5b9f\u73fe\u306e\u305f\u3081\u306bWBG\u534a\u5c0e\u4f53\u306e\u7814\u7a76\u304c\u6d3b\u767a\u306b\u9032\u3081\u3089\u308c\u3066\u304a\u308a\u3001SiC(3.3 eV)\u3084GaN\u3092\u7528\u3044\u305f\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u304c\u8fd1\u5e74\u5b9f\u7528\u5316\u3055\u308c\u306f\u3058\u3081\u305f\u3002<\/span> <span style=\"color: #008000;\"><a href=\"#aln3\" style=\"color: #008080;\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><span style=\"font-size: 16px;\"><strong><span e238ec=\"\"><a id=\"suda4\"><\/a>\uff08\u6ce84\uff09\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9\uff1a<\/span><\/strong><\/span><br>\u30de\u30a4\u30af\u30ed\u6ce2\u3084\u30df\u30ea\u6ce2\u306a\u3069\u306e\u9ad8\u3044\u5468\u6ce2\u6570\u306e\u4fe1\u53f7\u3092\u6271\u3046\u534a\u5c0e\u4f53\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u306e\u7dcf\u79f0\u3002\u4e00\u822c\u306b\u3001\u5468\u6ce2\u6570\u3092\u5411\u4e0a\u3055\u305b\u308b\u3068\u3001\u305d\u308c\u3068\u5f15\u304d\u63db\u3048\u306b\u6271\u3048\u308b\u96fb\u5727(\u51fa\u529b\u96fb\u529b)\u304c\u4f4e\u4e0b\u3057\u3066\u3057\u307e\u3046\u3002\u7279\u306b\u643a\u5e2f\u96fb\u8a71\u306e\u57fa\u5730\u5c40\u3084\u901a\u4fe1\u885b\u661f\u3001\u30ec\u30fc\u30c0\u30fc\u306a\u3069\u3067\u306f\u3001\u9ad8\u5468\u6ce2\u3068\u9ad8\u51fa\u529b\u306e\u4e21\u7acb\u304c\u6c42\u3081\u3089\u308c\u308b\u3002\u65e2\u5b58\u306eSi\u3084GaAs\u306a\u3069\u3067\u306e\u534a\u5c0e\u4f53\u3067\u306f\u9650\u754c\u304c\u3042\u308a\u3001\u73fe\u5728\u3001\u9ad8\u5468\u6ce2\u9ad8\u51fa\u529b\u306e\u30c7\u30d0\u30a4\u30b9\u306fWBG\u534a\u5c0e\u4f53\u306eGaN\u7cfb\u6750\u6599\u306e\u72ec\u58c7\u5834\u3068\u306a\u308a\u3064\u3064\u3042\u308b\u3002\u305d\u306e\u5148\u306e\u5c55\u958b\u3068\u3057\u3066UWBG\u534a\u5c0e\u4f53\u306eAlN\u7cfb\u6750\u6599\u306b\u5927\u304d\u306a\u671f\u5f85\u304c\u5bc4\u305b\u3089\u308c\u3066\u3044\u308b\u3002<span style=\"color: #008000;\"><a href=\"#aln4\" style=\"color: #008080;\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><span style=\"font-size: 16px;\"><strong><span e238ec=\"\"><a id=\"suda5\"><\/a>\uff08\u6ce85\uff09\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\uff1a<\/span><\/strong><\/span><br>\u96fb\u529b\u5909\u63db\u88c5\u7f6e(\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u6a5f\u5668)\u306e\u4e3b\u8981\u90e8\u54c1\u3002\u6574\u6d41\u3084\u30b9\u30a4\u30c3\u30c1\u30f3\u30b0\u306a\u3069\u306e\u52d5\u4f5c\u3092\u3059\u308b\u534a\u5c0e\u4f53\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u306e\u7dcf\u79f0\u3002\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u306e\u4f4e\u640d\u5931\u5316\u304c\u96fb\u529b\u5909\u63db\u306e\u640d\u5931\u4f4e\u6e1b\u3001\u7701\u30a8\u30cd\u5b9f\u73fe\u306b\u3064\u306a\u304c\u308b\u3002\u3053\u306e\u6570\u5e74\u9593\u3067\u3001SiC\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u304c\u9244\u9053\u3084\u96fb\u6c17\u81ea\u52d5\u8eca\u3067\u5229\u7528\u3055\u308c\u59cb\u3081\u3001GaN\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u304c\u3001\u30d1\u30bd\u30b3\u30f3\u306e\u5145\u96fb\u5668\u306a\u3069\u3067\u5229\u7528\u3055\u308c\u59cb\u3081\u3066\u304a\u308a\u7701\u30a8\u30cd\u306b\u5927\u304d\u304f\u8ca2\u732e\u3057\u3066\u3044\u308b\u3002\u3055\u3089\u306a\u308b\u7701\u30a8\u30cd\u5316\u3092\u5b9f\u73fe\u3067\u304d\u308bUWBG\u534a\u5c0e\u4f53\u306b\u5927\u304d\u306a\u671f\u5f85\u304c\u5bc4\u305b\u3089\u308c\u3066\u3044\u308b\u3002<span style=\"color: #008000;\"><a href=\"#aln5\" style=\"color: #008080;\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><span style=\"font-size: 16px;\"><strong><span e238ec=\"\"><a id=\"suda6\"><\/a>\uff08\u6ce86\uff09\u5206\u5e03\u578b\u5206\u6975\u30c9\u30fc\u30d4\u30f3\u30b0(distributed polarization doping)\uff1a<\/span><\/strong><\/span><br>GaN\u3084AlN\u306a\u3069\u306eIII\u65cf\u7a92\u5316\u7269\u534a\u5c0e\u4f53\u7d50\u6676\u306f\u305d\u306e\u5f37\u3044\u30a4\u30aa\u30f3\u7d50\u5408\u6027\u306b\u8d77\u56e0\u3057\u305f\u5927\u304d\u306a\u5206\u6975\u3092\u6709\u3057\u3066\u3044\u308b\u3002\u5206\u6975\u96fb\u8377\u306f\u901a\u5e38\u306f\u7d50\u6676\u306e\u8868\u9762\u3068\u88cf\u9762\u306b\u73fe\u308c\u308b\u304c\u3001GaN\u3068AlN\u3092x: (1-x)\u306e\u6bd4\u3067\u6df7\u305c\u5408\u308f\u305b\u305f\u6df7\u6676\u534a\u5c0e\u4f53(Al<sub>x<\/sub>Ga<sub>1-x<\/sub>N)\u306b\u304a\u3044\u3066\u306f\u3001\u7d44\u6210x\u304c\u5909\u5316\u3059\u308b\u3068\u3001GaN\u3068AlN\u306e\u5206\u6975\u5dee\u306e\u305f\u3081\u306b\u3001\u7d44\u6210\u5909\u5316\u306b\u5bfe\u5fdc\u3057\u305f\u6b63\u3084\u8ca0\u306e\u5206\u6975\u96fb\u8377\u304c\u7d50\u6676\u5185\u90e8\u306b\u751f\u3058\u308b\u3002\u3053\u306e\u96fb\u8377\u306b\u5f15\u304d\u5bc4\u305b\u3089\u308c\u3066\u96fb\u5b50\u3084\u6b63\u5b54\u304c\u96c6\u307e\u3063\u3066\u304f\u308b\u305f\u3081\u3001\u5b9f\u8cea\u7684\u306b\u4e0d\u7d14\u7269\u30c9\u30fc\u30d4\u30f3\u30b0\u3092\u3057\u305f\u3053\u3068\u3068\u540c\u69d8\u306e\u52b9\u679c\u304c\u671f\u5f85\u3067\u304d\u308b\u3002\u3053\u308c\u3092\u5206\u5e03\u578b\u5206\u6975\u30c9\u30fc\u30d4\u30f3\u30b0\u3068\u547c\u3076\u3002\u71b1\u306b\u3088\u308b\u30c9\u30ca\u30fc\u304b\u3089\u306e\u96fb\u5b50\u653e\u51fa(\u3042\u308b\u3044\u306f\u30a2\u30af\u30bb\u30d7\u30bf\u3078\u306e\u96fb\u5b50\u52b1\u8d77)\u3092\u5fc5\u8981\u3068\u3057\u306a\u3044\u305f\u3081\u3001\u5ba4\u6e29\u3084\u4f4e\u6e29\u3067\u3082\u5341\u5206\u306a\u4f1d\u5c0e\u5ea6\u3092\u793a\u3059\u3068\u3044\u3046\u5229\u70b9\u304c\u3042\u308b\u3002\u305f\u3060\u3057\u3001\u7d44\u6210\u5909\u5316\u5c64\u3092\u9ad8\u54c1\u8cea\u3067\u4f5c\u88fd\u3059\u308b\u3053\u3068\u304c\u5fc5\u8981\u3067\u3001\u9ad8\u5ea6\u306a\u8584\u819c\u7d50\u6676\u6210\u9577\u6280\u8853\u304c\u6c42\u3081\u3089\u308c\u308b\u3002<span style=\"color: #008000;\"><a href=\"#aln6\" style=\"color: #008080;\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><span style=\"font-size: 16px;\"><strong><span e238ec=\"\"><a id=\"suda7\"><\/a>\uff08\u6ce87\uff09IEDM (<a href=\"https:\/\/www.ieee-iedm.org\/\">https:\/\/www.ieee-iedm.org\/<\/a>)\uff1a<\/span><\/strong><\/span><br>\u7c73\u56fd\u96fb\u6c17\u5b66\u4f1a(IEEE)\u304c\u4e3b\u50ac\u3059\u308b\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306b\u95a2\u3059\u308b\u56fd\u969b\u4f1a\u8b70\u3002\u96c6\u7a4d\u56de\u8def\u3001\u30a4\u30e1\u30fc\u30b8\u30bb\u30f3\u30b5\u30fc\u3001\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9\u3001\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u306a\u3069\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u5168\u4f53\u3092\u7db2\u7f85\u3057\u3066\u3044\u308b\u3002\u65b0\u898f\u6027\u3084\u72ec\u5275\u6027\u306b\u512a\u308c\u305f\u8ad6\u6587\u3057\u304b\u63a1\u629e\u3055\u308c\u305a\u3001\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u5206\u91ce\u306e\u30c8\u30c3\u30d7\u30af\u30e9\u30b9\u306e\u56fd\u969b\u4f1a\u8b70\u3067\u3042\u308b\u3002\u6bce\u5e7412\u6708\u306b\u30b5\u30f3\u30d5\u30e9\u30f3\u30b7\u30b9\u30b3\u3067\u958b\u50ac\u3055\u308c\u308b\u3002<span style=\"color: #008000;\"><a href=\"#aln7\" style=\"color: #008080;\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><span style=\"font-size: 16px;\"><strong><span e238ec=\"\"><a id=\"suda8\"><\/a>\uff08\u6ce88\uff09\u4e0d\u7d14\u7269\u30c9\u30fc\u30d4\u30f3\u30b0\uff1a<\/span><\/strong><\/span><br>\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306fn\u578b\u534a\u5c0e\u4f53\u3068p\u578b\u534a\u5c0e\u4f53\u3092\u4e0a\u624b\u304f\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u306b\u3088\u308a\u6210\u308a\u7acb\u3063\u3066\u3044\u308b\u3002n\u578b\u534a\u5c0e\u4f53\u3092\u4f5c\u88fd\u3059\u308b\u305f\u3081\u306b\u306f\u3001\u96fb\u5b50\u3092\u63d0\u4f9b\u3059\u308b\u4e0d\u7d14\u7269(\u30c9\u30ca\u30fc\u6027\u4e0d\u7d14\u7269)\u3092\u3054\u304f\u5fae\u91cf\u3001\u305d\u306e\u91cf\u3092\u6b63\u78ba\u306b\u5236\u5fa1\u3057\u3066\u6dfb\u52a0(\u30c9\u30fc\u30d4\u30f3\u30b0)\u3059\u308b\u3002\u4e00\u65b9\u3001p\u578b\u306e\u5834\u5408\u306b\u306f\u3001\u96fb\u5b50\u3092\u7d50\u6676\u304b\u3089\u5f15\u304d\u629c\u3044\u3066\u96fb\u5b50\u306e\u629c\u3051\u7a74(\u6b63\u5b54)\u3092\u5f62\u6210\u3059\u308b\u4e0d\u7d14\u7269(\u30a2\u30af\u30bb\u30d7\u30bf\u6027\u4e0d\u7d14\u7269)\u3092\u6dfb\u52a0\u3059\u308b\u3002Si\u3084GaAs\u3001SiC\u3084GaN\u306a\u3069\u3067\u306f\u3053\u306e\u65b9\u6cd5\u3067\u4e0a\u624b\u304fp\u578b\u3001n\u578b\u3092\u4f5c\u88fd\u3067\u304d\u308b\u304c\u3001UWBG\u534a\u5c0e\u4f53\u3067\u306f\u3053\u306e\u624b\u6cd5\u306e\u9069\u7528\u304c\u56f0\u96e3\u3068\u306a\u308b\u3002\u4f8b\u3048\u3070\u3001AlN\u7cfb\u6750\u6599\u3067\u306f\u30c9\u30ca\u30fc\u4e0d\u7d14\u7269\u3084\u30a2\u30af\u30bb\u30d7\u30bf\u4e0d\u7d14\u7269\u306e\u30c9\u30fc\u30d4\u30f3\u30b0\u306f\u53ef\u80fd\u3060\u304c\u3001\u5e38\u6e29\u3067\u306f\u3001\u71b1\u30a8\u30cd\u30eb\u30ae\u30fc\u304c\u4e0d\u5341\u5206\u306a\u305f\u3081\u3001\u30c9\u30ca\u30fc\u304b\u3089\u306e\u96fb\u5b50\u4f9b\u4e0e\u3001\u30a2\u30af\u30bb\u30d7\u30bf\u3078\u306e\u96fb\u5b50\u6388\u4e0e\u304c\u8d77\u3053\u3089\u305a\u3001\u5341\u5206\u306an\u578b\u3001p\u578b\u4f1d\u5c0e\u5ea6\u3092\u793a\u3055\u306a\u3044\u3002<span style=\"color: #008000;\"><a href=\"#aln8\" style=\"color: #008080;\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"font-size: 16px;\"><strong><span style=\"font-size: 20px;\"><br><br>[\u8ad6\u6587\u60c5\u5831]<\/span><br><\/strong><\/span><\/p>\r\n<hr \/>\r\n<p><br><span style=\"font-size: 16px;\">\u3000<br>\u5b66\u4f1a\u540d\uff1a69<sup>th<\/sup> International Electron Device Meeting (IEDM2023)<br>\u8ad6\u6587\u30bf\u30a4\u30c8\u30eb\uff1aDemonstration of AlN-based Vertical p-n Diodes with Dopant-Free Distributed-Polarization Doping<br>\u8457\u8005\uff1aTakeru Kumabe, Akira Yoshikawa, Maki Kushimoto, Yoshio Honda, Manabu Arai, Jun Suda, Hiroshi Amano<br>DOI: (Technical digest\u3068\u3057\u3066IEEE digital library\u306b\u63b2\u8f09\u5f8c\u4ed8\u4e0e\u4e88\u5b9a)<\/span><\/p>\r\n<p>&nbsp;<\/p>\r\n<hr \/>\r\n<p><br><a href=\"https:\/\/www.nagoya-u.ac.jp\/researchinfo\/result\/2023\/12\/aln-pn-aln.html\">\u25c6\u540d\u53e4\u5c4b\u5927\u5b66 \u7814\u7a76\u6210\u679c\u767a\u4fe1\u30b5\u30a4\u30c8\u306f\u3053\u3061\u3089\uff1e\uff1e\uff1e<\/a><br><br><a href=\"https:\/\/www.nagoya-u.ac.jp\/researchinfo\/result\/upload_images\/20231214_engg_1.pdf\">\u25c6\u540d\u53e4\u5c4b\u5927\u5b66\u306e\u30d7\u30ec\u30b9\u30ea\u30ea\u30fc\u30b9\uff08\u672c\u6587\uff09\u306f\u3053\u3061\u3089\uff1e\uff1e\uff1e<\/a><\/p>\r\n<h4><span style=\"font-size: 16px;\">\u7814\u7a76\u8005\u9023\u7d61\u5148<\/span><\/h4>\r\n<p>\u6771\u6d77\u56fd\u7acb\u5927\u5b66\u6a5f\u69cb \u540d\u53e4\u5c4b\u5927\u5b66\u5927\u5b66\u9662\u5de5\u5b66\u7814\u7a76\u79d1 \/ \u672a\u6765\u6750\u6599\u30fb\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240<br><a href=\"https:\/\/profs.provost.nagoya-u.ac.jp\/html\/100009776_ja.html\">\u6559\u6388\u3000\u9808\u7530\u3000\u6df3\uff08\u3059\u3060\u3000\u3058\u3085\u3093\uff09<\/a><br>E-mail : <span>suda[at]nagoya-u.jp<\/span><span style=\"font-size: 16px;\"><span style=\"font-size: 16px;\"><br><\/span><span style=\"color: #333333;\"><\/span><\/span><\/p>\r\n<\/section>\r\n<\/section>","protected":false},"excerpt":{"rendered":"<p>\uff3b\u7814\u7a76\u6982\u8981\uff3d \u3000\u56fd\u7acb\u5927\u5b66\u6cd5\u4eba\u6771\u6d77\u56fd\u7acb\u5927\u5b66\u6a5f\u69cb \u540d\u53e4\u5c4b\u5927\u5b66\u672a\u6765\u6750\u6599\u30fb\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240 \u9808\u7530 \u6df3 \u6559\u6388\u3001\u5929\u91ce \u6d69 \u6559\u6388\u3068\u65ed\u5316\u6210\u682a\u5f0f\u4f1a\u793e\u3089\u306e\u7814\u7a76\u30b0\u30eb\u30fc\u30d7\u306f\u3001\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u6750\u6599\u3068\u3057\u3066\u671f\u5f85\u3055\u308c\u308b\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0(AlN)\u7cfb\u6750\u6599\u306b\u304a\u3044\u3066 [&hellip;]<\/p>\n","protected":false},"author":5,"featured_media":8938,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[2],"tags":[],"class_list":["post-8945","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-research"],"acf":[],"aioseo_notices":[],"publishpress_future_action":{"enabled":false,"date":"2026-06-21 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