{"id":8582,"date":"2023-07-20T13:00:02","date_gmt":"2023-07-20T04:00:02","guid":{"rendered":"https:\/\/www.imass.nagoya-u.ac.jp\/?p=8582"},"modified":"2024-02-16T15:39:59","modified_gmt":"2024-02-16T06:39:59","slug":"20230720_kusunoki","status":"publish","type":"post","link":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/research\/20230720_kusunoki.html","title":{"rendered":"\u30b9\u30c6\u30c3\u30d7\u30a2\u30f3\u30d0\u30f3\u30c1\u30f3\u30b0\u73fe\u8c61\u306e\u767a\u898b<br>\uff5e\u534a\u5c0e\u4f53\u8868\u9762\u3092\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u5766\u306b\u3059\u308b\u65b0\u6280\u8853\uff5e"},"content":{"rendered":"<p><span style=\"font-size: 20px;\">\u3010<strong>\u672c\u7814\u7a76\u306e\u30dd\u30a4\u30f3\u30c8<\/strong>\u3011<\/span><\/p>\r\n<section class=\"e-box\">\r\n<div style=\"padding: 30px; margin-bottom: 30px; border: 1px solid #333399; border-radius: 10px; background-color: #fafdff;\">\r\n<p><strong><span style=\"font-size: 16px;\">\u3007 \u5f93\u6765\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u6280\u8853\u3067\u306f\u3001SiC\u30a6\u30a7\u30cf\u8868\u9762\u3092\u975e\u5e38\u306b\u5e73\u5766\u306b\u3067\u304d\u308b\u3082\u306e\u306e\u52a0\u5de5\u306b\u3088\u308b\u30c0\u30e1\u30fc\u30b8\u5c64\u304c\u6b8b\u3063\u305f\u308a\u3001\u30c0\u30e1\u30fc\u30b8\u5c64\u306f\u306a\u3044\u3082\u306e\u306e\u8868\u9762\u304c\u8352\u304f\u306a\u3063\u305f\u308a\u3057\u3066\u30c7\u30d0\u30a4\u30b9\u7279\u6027\u306b\u60aa\u5f71\u97ff\u3092\u53ca\u307c\u3059\u3068\u3044\u3046\u8ab2\u984c\u304c\u3042\u308a\u307e\u3057\u305f\u3002<\/span><\/strong><\/p>\r\n<p><strong><span style=\"font-size: 16px;\">\u3007 SiC\u30a6\u30a7\u30cf\u8868\u9762\u3092\u5358\u4e00\u306e\u30b7\u30f3\u30d7\u30eb\u306a\u30d7\u30ed\u30bb\u30b9\u3067\u3001\u30c0\u30e1\u30fc\u30b8\u5c64\u3082\u306a\u304f\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u5766\u306b\u3059\u308b\u65b0\u6280\u8853\u3068\u3057\u3066\u5fdc\u7528\u53ef\u80fd\u306a\u30b9\u30c6\u30c3\u30d7\u30a2\u30f3\u30d0\u30f3\u30c1\u30f3\u30b0\u73fe\u8c61\u3092\u767a\u898b\u3057\u307e\u3057\u305f\u3002<\/span><\/strong><br><strong><span style=\"font-size: 16px;\"><\/span><\/strong><\/p>\r\n<p><strong><span style=\"font-size: 16px;\">\u3007 \u534a\u5c0e\u4f53\u88fd\u9020\u5de5\u7a0b\u306b\u304a\u3044\u3066\u3001\u5316\u5b66\u6a5f\u68b0\u7814\u78e8\u3092\u542b\u3080\u30d7\u30ed\u30bb\u30b9\u304c\u4e0d\u8981\u306b\u306a\u308a\u3001\u30b3\u30b9\u30c8\u3068\u6642\u9593\u3092\u5927\u5e45\u306b\u524a\u6e1b\u3067\u304d\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3068\u671f\u5f85\u3055\u308c\u307e\u3059\u3002<\/span><\/strong><\/p>\r\n<\/div>\r\n<\/section>\r\n<p><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/pre\/wp\/wp-content\/uploads\/2023\/08\/20230720_imass.png\" alt=\"\" width=\"900\" height=\"366\" class=\"wp-image-8743 aligncenter\" \/><\/p>\r\n<p style=\"text-align: center;\"><span style=\"font-size: 16px;\"><strong>\u56f31\u3000SiC\u30a6\u30a7\u30cf\u8868\u9762\u306e\u30b9\u30c6\u30c3\u30d7\u30a2\u30f3\u30d0\u30f3\u30c1\u30f3\u30b0\u73fe\u8c61<\/strong><\/span><\/p>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"font-size: 16px;\"><strong><span style=\"font-size: 20px;\"> \u3010\u7814\u7a76\u6982\u8981\u3011<\/span><br><\/strong><\/span><\/p>\r\n<hr \/>\r\n<p><span style=\"font-size: 16px;\"><br>\u3000\u672a\u6765\u6750\u6599\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240 <span style=\"color: #333300;\"><a href=\"https:\/\/nrid.nii.ac.jp\/ja\/nrid\/1000010134818\/\" style=\"color: #333300;\">\u6960 \u7f8e\u667a\u5b50<\/a><\/span>\uff08\u304f\u3059\u306e\u304d \u307f\u3061\u3053\uff09\u540d\u8a89\u6559\u6388\u3001\u65e9\u7a32\u7530\u5927\u5b66\u7406\u5de5\u5b66\u8853\u9662\u306e<span style=\"color: #333300;\"><a href=\"https:\/\/researchmap.jp\/norimatsu\" style=\"color: #333300;\">\u4e57\u677e \u822a<\/a><\/span>\uff08\u306e\u308a\u307e\u3064 \u308f\u305f\u308b\uff09\u6559\u6388\uff08\u540d\u53e4\u5c4b\u5927\u5b66\u5ba2\u54e1\u6559\u6388\uff09\u3089\u306e\u7814\u7a76\u30b0\u30eb\u30fc\u30d7\u306f\u3001\u540d\u53e4\u5c4b\u5927\u5b66\u535a\u58eb\u5f8c\u671f\u8ab2\u7a0b\u5b66\u751f\u306e\u698a\u539f \u6dbc\u592a\u90ce\uff08\u3055\u304b\u304d\u3070\u3089 \u308a\u3087\u3046\u305f\u308d\u3046\uff09\u3001\u4e2d\u56fd\u5185\u30e2\u30f3\u30b4\u30eb\u6c11\u65cf\u5927\u5b66\u8b1b\u5e2b\u306e\u5305 \u5efa\u5cf0\uff08\u307b\u3046 \u3051\u3093\u307b\u3046\uff09\u3001\u65e5\u672c\u539f\u5b50\u529b\u7814\u7a76\u958b\u767a\u6a5f\u69cb\u7814\u7a76\u54e1\u306e<span style=\"color: #333300;\"><a href=\"https:\/\/researchmap.jp\/t.terasawa.et.al\" style=\"color: #333300;\">\u5bfa\u6fa4 \u77e5\u6f6e<\/a><\/span>\uff08\u3066\u3089\u3055\u308f \u3068\u3082\u304a\uff09\u3089\u3068\u306e\u5171\u540c\u7814\u7a76\u3067\u3001\u534a\u5c0e\u4f53\u8868\u9762\u3092\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u5766\u306b\u3059\u308b\u65b0\u6280\u8853\u3068\u3057\u3066\u5fdc\u7528\u53ef\u80fd\u306a\u3001<span style=\"color: #008080;\"><strong>\u30b9\u30c6\u30c3\u30d7\u30a2\u30f3\u30d0\u30f3\u30c1\u30f3\u30b0\u73fe\u8c61<\/strong><\/span>\u3092\u767a\u898b\u3057\u307e\u3057\u305f\u3002<br>\u3000\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u6750\u6599\u3068\u3057\u3066\u4f7f\u308f\u308c\u308b\u534a\u5c0e\u4f53\u3067\u3042\u308bSiC\u306b\u304a\u3044\u3066\u3001\u30a6\u30a7\u30cf\u306e\u8868\u9762\u3092\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u5766\u306b\u3059\u308b\u3053\u3068\u306f\u3001\u30c7\u30d0\u30a4\u30b9\u7279\u6027\u3084\u65b0\u6750\u6599\u4f5c\u88fd\u306b\u95a2\u3057\u3066\u6975\u3081\u3066\u91cd\u8981\u3067\u3059\u3002SiC\u30a6\u30a7\u30cf\u8868\u9762\u306f\u3001\u30b9\u30c6\u30c3\u30d7\u3068\u547c\u3070\u308c\u308b\u539f\u5b50\uff11\u500b\u7a0b\u5ea6\u306e\u9ad8\u3055\uff08\u7d040.25 nm\uff09\u306e\u6bb5\u5dee\u3092\u6301\u3063\u3066\u3044\u307e\u3059\u3002SiC\u3092\u52a0\u71b1\u3059\u308b\u3068\u3001\u8868\u9762\u306e\u539f\u5b50\u304c\u79fb\u52d5\u3059\u308b\u3053\u3068\u3067\u30b9\u30c6\u30c3\u30d7\u304c\u96c6\u307e\u308a\u3001\u306f\u3058\u3081\u306b1\uff5e1.5 nm\u306e\u9ad8\u3055\u30b9\u30c6\u30c3\u30d7\u3092\u5f62\u6210\u3057\u3001\u3055\u3089\u306b\u9ad8\u6e29\u3067\u52a0\u71b1\u3059\u308b\u3068\u6570nm\uff5e\u6570\u5341nm\u306e\u30b9\u30c6\u30c3\u30d7\u306b\u306a\u308a\u307e\u3059\u3002\u3053\u308c\u306f\u30b9\u30c6\u30c3\u30d7\u30d0\u30f3\u30c1\u30f3\u30b0\u3068\u547c\u3070\u308c\u3001\u30b9\u30c6\u30c3\u30d7\u304c\u6b21\u7b2c\u306b\u9ad8\u304f\u306a\u3063\u3066\u3044\u304f\u3053\u3068\u306f\u3042\u3063\u3066\u3082\u3001\u4f4e\u304f\u306a\u308b\u3053\u3068\u306f\u306a\u3044\u3068\u65e7\u6765\u8003\u3048\u3089\u308c\u3066\u304d\u307e\u3057\u305f\u3002\u3053\u306e\u305f\u3073\u672c\u7814\u7a76\u30b0\u30eb\u30fc\u30d7\u306f\u3001\u3042\u308b\u7279\u5b9a\u306e\u6761\u4ef6\u4e0b\u306b\u7f6e\u304f\u3068\u3001\u4e00\u65e6\u9ad8\u304f\u306a\u3063\u305f\u30b9\u30c6\u30c3\u30d7\u304c\u4f4e\u304f\u306a\u308b\u3053\u3068\u3092\u898b\u51fa\u3057\u307e\u3057\u305f\u3002\u3053\u308c\u3092<strong><span style=\"color: #008080;\">\u30b9\u30c6\u30c3\u30d7\u30a2\u30f3\u30d0\u30f3\u30c1\u30f3\u30b0\u73fe\u8c61<\/span><\/strong>\u3068\u540d\u4ed8\u3051\u307e\u3057\u305f\u3002<br>\u3000\u5f93\u6765\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u6280\u8853\u306b\u306f\u3001\u8868\u9762\u306f\u975e\u5e38\u306b\u5e73\u5766\u306b\u3067\u304d\u308b\u3082\u306e\u306e\u52a0\u5de5\u306b\u3088\u308b\u30c0\u30e1\u30fc\u30b8\u5c64\u304c\u6b8b\u308b\u624b\u6cd5\u3084\u3001\u30c0\u30e1\u30fc\u30b8\u5c64\u306f\u306a\u3044\u3082\u306e\u306e\u8868\u9762\u304c\u5c11\u3057\u8352\u304f\u306a\u308b\u624b\u6cd5\u306f\u3042\u308a\u307e\u3057\u305f\u3002\u305d\u308c\u306b\u5bfe\u3057\u3066\u672c\u7814\u7a76\u306e\u624b\u6cd5\u3067\u306f\u3001\u5358\u4e00\u306e\u30b7\u30f3\u30d7\u30eb\u306a\u30d7\u30ed\u30bb\u30b9\u3067\u3001\u30c0\u30e1\u30fc\u30b8\u5c64\u3082\u306a\u304f\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u5766\u306a\u8868\u9762\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u5f93\u3063\u3066\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u5de5\u7a0b\u306e\u30b3\u30b9\u30c8\u3068\u6642\u9593\u3092\u5927\u5e45\u306b\u524a\u6e1b\u3067\u304d\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3068\u671f\u5f85\u3055\u308c\u307e\u3059\u3002<br><\/span><span style=\"font-size: 16px;\">\u3000\u672c\u6210\u679c\u306f\u30012023\u5e747\u670819\u65e5\uff08\u6c34\uff09\u4ed8\uff08\u73fe\u5730\u6642\u9593\uff09\u3067\u3001\u7c73\u56fd\u7269\u7406\u5b66\u5354\u4f1a\u304c\u767a\u884c\u3059\u308b\u300eApplied Physics Letters\u300f\u8a8c\u306b\u63b2\u8f09\u3055\u308c\u307e\u3057\u305f\u3002<br><\/span><span style=\"font-size: 16px;\">\u3000\u672c\u7814\u7a76\u306f\u3001\u6587\u79d1\u7701\u79d1\u7814\u8cbb\u57fa\u76e4\u7814\u7a76B\u3084\u3001\u65e9\u7a32\u7530\u5927\u5b66\u5404\u52d9\u8a18\u5ff5\u6750\u6599\u6280\u8853\u7814\u7a76\u6240\u5171\u540c\u5229\u7528\u30fb\u5171\u540c\u7814\u7a76\u62e0\u70b9\u4e8b\u696d\u306a\u3069\u306e\u652f\u63f4\u306e\u3082\u3068\u3067\u884c\u308f\u308c\u305f\u3082\u306e\u3067\u3059\u3002<br><\/span><\/p>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"font-size: 16px;\"><strong><span style=\"font-size: 20px;\">\u3010\u7814\u7a76\u80cc\u666f\u3068\u5185\u5bb9\u3011<\/span><br><\/strong><\/span><\/p>\r\n<hr \/>\r\n<h6><span style=\"font-size: 16px;\">\uff08\uff11\uff09\u3053\u308c\u307e\u3067\u306e\u7814\u7a76\u3067\u5206\u304b\u3063\u3066\u3044\u305f\u3053\u3068\uff08\u79d1\u5b66\u53f2\u7684\u30fb\u6b74\u53f2\u7684\u306a\u80cc\u666f\u306a\u3069\uff09<\/span><\/h6>\r\n<p><span style=\"font-size: 16px;\">\u3000\u534a\u5c0e\u4f53\u6750\u6599\u306e\u4e2d\u3067\u3082\u70ad\u5316\u30b1\u30a4\u7d20\uff08<a id=\"nori1\"><\/a><a href=\"#kusu1\" style=\"color: #008080;\">SiC<\/a><span style=\"color: #008080;\"><sup>\u203b1<\/sup><\/span>\uff09\u306f\u3001\u73fe\u5728\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u306e\u57fa\u76e4\u6750\u6599\u3068\u3057\u3066\u3001\u975e\u5e38\u306b\u591a\u5c90\u306b\u308f\u305f\u3063\u3066\u5229\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u4f8b\u3048\u3070\u3001\u6771\u6d77\u9053\u65b0\u5e79\u7ddaN700S\u7cfb\u3067\u306f\u3001SiC\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u3092\u4f7f\u3063\u305f\u30b3\u30f3\u30d0\u30fc\u30bf\u30fb\u30a4\u30f3\u30d0\u30fc\u30bf\u306b\u3088\u308a\u3001\u5927\u5e45\u306a\u5c0f\u578b\u5316\u30fb\u7701\u96fb\u529b\u5316\u3092\u5b9f\u73fe\u3057\u3066\u3044\u307e\u3059\u3002\u6025\u901f\u306b\u958b\u767a\u306e\u9032\u3080\u96fb\u6c17\u81ea\u52d5\u8eca\u3067\u3082\u3001SiC\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u306f\u4e2d\u6838\u306b\u306a\u308b\u3068\u3055\u308c\u3066\u3044\u307e\u3059\u3002SiC\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u306b\u304a\u3044\u3066\u3001SiC\u30a6\u30a7\u30cf\u306e\u8868\u9762\u5f62\u614b\u306f\u975e\u5e38\u306b\u91cd\u8981\u3067\u3059\u3002\u8868\u9762\u306b\u51f9\u51f8\u304c\u5b58\u5728\u3059\u308b\u3068\u3001\u71b1\u9178\u5316\u819c\u306e\u539a\u3055\u304c\u4e0d\u5747\u4e00\u306b\u306a\u3063\u3066\u3057\u307e\u3044\u3001\u30c7\u30d0\u30a4\u30b9\u7279\u6027\u306b\u91cd\u5927\u306a\u60aa\u5f71\u97ff\u3092\u53ca\u307c\u3057\u307e\u3059\u3002<\/span><br><span style=\"font-size: 16px;\">\u3000\u4e00\u65b9\u3067SiC\u306f\u3001\u65b0\u898f2\u6b21\u5143\u6750\u6599\u3092\u4f5c\u88fd\u3059\u308b\u969b\u306e\u57fa\u677f\u3068\u3057\u3066\u3082\u7528\u3044\u3089\u308c\u307e\u3059\u3002\u4f8b\u3048\u3070\u6211\u3005\u306f\u3001SiC\u71b1\u5206\u89e3\u6cd5\u306b\u3088\u3063\u3066\u3001\u30a6\u30a7\u30cf\u30fc\u30b9\u30b1\u30fc\u30eb\u3067\u5358\u4e00\u65b9\u4f4d\u306e\u30b0\u30e9\u30d5\u30a7\u30f3\u3092\u4f5c\u88fd\u3059\u308b\u6280\u8853\u3092\u958b\u767a\u3057\u3066\u304d\u307e\u3057\u305f\u3002SiC\u8868\u9762\u306e\u539f\u5b50\u30ec\u30d9\u30eb\u306e\u51f9\u51f8\u306f\u3001\u30b0\u30e9\u30d5\u30a7\u30f3\u306e\u96fb\u5b50\u7269\u6027\u306b\u3082\u6df1\u523b\u306a\u5f71\u97ff\u3092\u4e0e\u3048\u307e\u3059\u3002<\/span><br><span style=\"font-size: 16px;\">\u3000SiC\u30a6\u30a7\u30cf\u3092\u6a5f\u68b0\u7684\u306b\u7814\u78e8\u3059\u308b\u3068\u3001\u8089\u773c\u3067\u306f\u93e1\u9762\u306b\u898b\u3048\u3066\u3082\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u306f\u56f32(a)\u306e\u3088\u3046\u306b\u30e9\u30f3\u30c0\u30e0\u306a\u7814\u78e8\u75d5\u304c\u5b58\u5728\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u306e\u3088\u3046\u306a\u51f9\u51f8\u306f\u3001SiC\u30c7\u30d0\u30a4\u30b9\u3084\u30b0\u30e9\u30d5\u30a7\u30f3\u30c7\u30d0\u30a4\u30b9\u306b\u3068\u3063\u3066\u81f4\u547d\u7684\u3067\u3059\u3002\u305d\u3053\u3067\u3001\u5316\u5b66\u6a5f\u68b0\u7814\u78e8\uff08<a id=\"nori2\"><\/a><span style=\"color: #008080;\"><a href=\"#kusu2\" style=\"color: #008080;\">CMP<\/a><sup>\u203b2<\/sup><\/span>\uff09\u3084<a id=\"nori3\"><\/a><span style=\"color: #008080;\"><a href=\"#kusu3\" style=\"color: #008080;\">\u6c34\u7d20\u30a8\u30c3\u30c1\u30f3\u30b0<\/a><sup>\u203b3<\/sup><\/span>\u3068\u547c\u3070\u308c\u308b\u624b\u6cd5\u3067\u3001\u8868\u9762\u306e\u5e73\u5766\u5316\u304c\u884c\u308f\u308c\u3066\u304d\u307e\u3057\u305f\u3002CMP\u3067\u306f\u3001\u7814\u78e8\u75d5\u3092\u9664\u53bb\u3057\u3001\u56f32 (b)\u306e\u3088\u3046\u306a\u9ad8\u30550.25 nm\u306e\u30b9\u30c6\u30c3\u30d7\u3068\u547c\u3070\u308c\u308b\u6bb5\u5dee\u306e\u307f\u306b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u304c\u3001\u8868\u9762\u8fd1\u508d\u306b\u52a0\u5de5\u306b\u3088\u308b\u30c0\u30e1\u30fc\u30b8\u5c64\u304c\u6b8b\u308b\u3068\u8a00\u308f\u308c\u3066\u3044\u307e\u3059\u3002\u4e00\u65b9\u3067\u6c34\u7d20\u30a8\u30c3\u30c1\u30f3\u30b0\u3067\u306f\u3001\u6c34\u7d20\u96f0\u56f2\u6c17\u4e2d\u3001\u9ad8\u6e29\u3067\u52a0\u71b1\u3059\u308b\u3053\u3068\u3067\u3001\u7814\u78e8\u75d5\u3084\u52a0\u5de5\u30c0\u30e1\u30fc\u30b8\u5c64\u3092\u9664\u53bb\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u304c\u3001\u9ad8\u6e29\u3067\u306e\u51e6\u7406\u306b\u3088\u3063\u3066<a id=\"nori4\"><\/a><span style=\"color: #008080;\"><a href=\"#kusu4\" style=\"color: #008080;\">\u30b9\u30c6\u30c3\u30d7\u30d0\u30f3\u30c1\u30f3\u30b0<\/a><sup>\u203b4<\/sup><\/span>\u3068\u547c\u3070\u308c\u308b\u73fe\u8c61\u304c\u8d77\u3053\u308a\u3001\u56f32 (c)\u306e\u3088\u3046\u306b\u30b9\u30c6\u30c3\u30d7\u306e\u9ad8\u3055\u304c5<sup>-10<\/sup> nm\u7a0b\u5ea6\u4ee5\u4e0a\u3068\u5927\u304d\u304f\u306a\u3063\u3066\u3057\u307e\u3044\u307e\u3059\u3002\u5f93\u3063\u3066\u3001\u8868\u9762\u52a0\u5de5\u30c0\u30e1\u30fc\u30b8\u306e\u306a\u3044\u3088\u3046\u306b\u3001\u304b\u3064\u30b9\u30c6\u30c3\u30d7\u9ad8\u3055\u30921 nm\u7a0b\u5ea6\u4ee5\u4e0b\u306b\u6291\u3048\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002<\/span><\/p>\r\n<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/pre\/wp\/wp-content\/uploads\/2023\/08\/kusunoki_1.jpg\" alt=\"\" width=\"850\" height=\"211\" class=\"aligncenter size-full wp-image-8752\" \/><br>\u56f32\u3000SiC\u8868\u9762\u306e\u539f\u5b50\u9593\u529b\u9855\u5fae\u93e1\u50cf\u3002(a) \u6a5f\u68b0\u7814\u78e8\u5f8c\u3001(b) CMP\u5f8c\u3001(c) 1600\u2103\u3067\u306e\u6c34\u7d20\u30a8\u30c3\u30c1\u30f3\u30b0\u5f8c\u3002\u30b9\u30b1\u30fc\u30eb\u30d0\u30fc\u306f2\u03bcm\u3002<\/p>\r\n<h6><br><span style=\"font-size: 16px;\">\uff08\uff12\uff09 \u4eca\u56de\u306e\u7814\u7a76\u3067\u65b0\u305f\u306b\u5b9f\u73fe\u3057\u3088\u3046\u3068\u3057\u305f\u3053\u3068\u3001\u660e\u3089\u304b\u306b\u306a\u3063\u305f\u3053\u3068<\/span><\/h6>\r\n<p><span style=\"font-size: 16px;\">\u3000\u672c\u7814\u7a76\u3067\u306f\u3001SiC\u5358\u7d50\u6676\u57fa\u677f\u306b\u5bfe\u3057\u3066\u3001\u6bd4\u8f03\u7684\u30b7\u30f3\u30d7\u30eb\u306a\u30d7\u30ed\u30bb\u30b9\u3067\u3001\u30b9\u30c6\u30c3\u30d7\u9ad8\u30551 nm\u7a0b\u5ea6\u4ee5\u4e0b\u306e\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u5766\u306a\u8868\u9762\u3092\u5f97\u308b\u3053\u3068\u3092\u76ee\u6307\u3057\u307e\u3057\u305f\u3002<\/span><br><span style=\"font-size: 16px;\">\u30b9\u30c6\u30c3\u30d7\u30d0\u30f3\u30c1\u30f3\u30b0\u73fe\u8c61\u306f\u3001\u9ad8\u30550.25 nm\u306e\u30b9\u30c6\u30c3\u30d7\u304c\u96c6\u307e\u3063\u30661\uff5e1.5 nm\u306e\u30b9\u30c6\u30c3\u30d7\u306b\u306a\u308b\u30df\u30cb\u30de\u30e0\u30b9\u30c6\u30c3\u30d7\u30d0\u30f3\u30c1\u30f3\u30b0\uff08MSB\uff09\u3068\u3001MSB\u5f8c\u306e\u30b9\u30c6\u30c3\u30d7\u304c\u3055\u3089\u306b\u96c6\u307e\u3063\u3066\u6570nm\u4ee5\u4e0a\u306e\u9ad8\u3055\u306b\u306a\u308b\u30e9\u30fc\u30b8\u30b9\u30c6\u30c3\u30d7\u30d0\u30f3\u30c1\u30f3\u30b0\uff08LSB\uff09\u306b\u5206\u3051\u3089\u308c\u307e\u3059\u3002\u4e00\u822c\u7684\u306b\u306f\u3001MSB\u304c\u751f\u3058\u305f\u5f8c\u306bLSB\u304c\u751f\u3058\u308b\u306e\u3067\u3001\u3053\u308c\u3089\u306f\u4e0d\u53ef\u9006\u306a\u73fe\u8c61\u3060\u3068\u8003\u3048\u3089\u308c\u3066\u304d\u307e\u3057\u305f\u3002\u305d\u308c\u306b\u5bfe\u3057\u3066\u3001\u672c\u7814\u7a76\u3067\u660e\u3089\u304b\u306b\u306a\u3063\u305f\u306e\u306f\u3001LSB\u304c\u751f\u3058\u30665\uff5e10 nm\u306e\u9ad8\u3055\u306b\u306a\u3063\u305f\u5f8c\u3001\u3042\u308b\u7279\u5b9a\u306e\u6761\u4ef6\u4e0b\u306b\u7f6e\u304f\u3068\u30011\uff5e1.5 nm\u306e\u4f4e\u3044\u9ad8\u3055\u306b\u623b\u308b\u3068\u3044\u3046\u73fe\u8c61\u3067\u3042\u308a\u3001\u3053\u308c\u3092\u672c\u7814\u7a76\u30b0\u30eb\u30fc\u30d7\u306f\u30b9\u30c6\u30c3\u30d7\u30a2\u30f3\u30d0\u30f3\u30c1\u30f3\u30b0\u73fe\u8c61\u3068\u540d\u4ed8\u3051\u307e\u3057\u305f\u3002<\/span><\/p>\r\n<h6><span style=\"font-size: 16px;\"><br>\uff08\uff13\uff09 \u305d\u306e\u305f\u3081\u306b\u65b0\u3057\u304f\u958b\u767a\u3057\u305f\u624b\u6cd5<\/span><\/h6>\r\n<p><span style=\"font-size: 16px;\">\u3000\u672c\u7814\u7a76\u30b0\u30eb\u30fc\u30d7\u306f\u3001SiC\u71b1\u5206\u89e3\u30b0\u30e9\u30d5\u30a7\u30f3\u306e\u7814\u7a76\u306b\u304a\u3044\u3066SiC\u8868\u9762\u5f62\u614b\u3092\u5236\u5fa1\u3057\u3066\u3044\u308b\u904e\u7a0b\u3067\u5076\u7136\u3001\u30b9\u30c6\u30c3\u30d7\u30a2\u30f3\u30d0\u30f3\u30c1\u30f3\u30b0\u73fe\u8c61\u3092\u767a\u898b\u3057\u307e\u3057\u305f\u30024%\u7a0b\u5ea6\u306e\u6c34\u7d20\u3092\u542b\u3080\u30a2\u30eb\u30b4\u30f3\u30ac\u30b9\uff08Ar\/4%H2\uff09\u96f0\u56f2\u6c17\u4e2d\u3067SiC\u3092\u52a0\u71b1\u3059\u308b\u3068\u30011600\u2103\u3067\u306f\u56f33(a)\u306e\u3088\u3046\u306bLSB\u304c\u8d77\u3053\u308a\u307e\u3059\u3002LSB\u304c\u751f\u3058\u305fSiC\u30921400\u2103\u3067\u4fdd\u6301\u3059\u308b\u3068\u30015\uff5e10 nm\u306e\u9ad8\u3055\u3067\u3042\u3063\u305f\u30b9\u30c6\u30c3\u30d7\u304c\u3001\u56f33(b)\u2192(c)\u2192(d)\u306e\u3088\u3046\u306b\u6b21\u7b2c\u306b1\uff5e1.5 nm\u306e\u4f4e\u3044\u30b9\u30c6\u30c3\u30d7\u306e\u96c6\u5408\u306b\u5206\u304b\u308c\u3066\u3044\u304d\u307e\u3059\u3002\u3053\u306e\u4e00\u9023\u306e\u73fe\u8c61\u304c\u3001\u30b9\u30c6\u30c3\u30d7\u30a2\u30f3\u30d0\u30f3\u30c1\u30f3\u30b0\u3067\u3059\u3002\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u6a21\u5f0f\u7684\u306b\u8868\u3059\u3068\u3001(e)\u306e\u72b6\u614b\u304b\u3089(f)\u306e\u3088\u3046\u306b\u5909\u5316\u3057\u3066\u3044\u304f\u3053\u3068\u306b\u5bfe\u5fdc\u3057\u307e\u3059\u3002\u3059\u306a\u308f\u3061\u3001Ar\/4%H2\u96f0\u56f2\u6c17\u4e2d\u3067\u3001\u306f\u3058\u3081\u306b\u9ad8\u6e29\u3067\u4fdd\u6301\u3057\u305f\u5f8c\u306b\u4f4e\u6e29\u3067\u4fdd\u6301\u3059\u308b\u3053\u3068\u3067\u3001LSB\u306e\u5f8c\u306bMSB\u304c\u751f\u3058\u308b\u3053\u3068\u304c\u308f\u304b\u308a\u307e\u3057\u305f\u3002\u306a\u304a\u3001\u6c34\u7d20\u3092\u542b\u307e\u306a\u3044\u30a2\u30eb\u30b4\u30f3\u30ac\u30b9\u96f0\u56f2\u6c17\u4e2d\u3067\u540c\u3058\u5b9f\u9a13\u3092\u884c\u3063\u3066\u3082\u3001\u30b9\u30c6\u30c3\u30d7\u30a2\u30f3\u30d0\u30f3\u30c1\u30f3\u30b0\u73fe\u8c61\u306f\u8d77\u3053\u308a\u307e\u305b\u3093\u3067\u3057\u305f\u3002<\/span><br><span style=\"font-size: 16px;\">\u5f93\u6765\u4e0d\u53ef\u9006\u3060\u3068\u601d\u308f\u308c\u3066\u3044\u305f\u73fe\u8c61\u304c\u3001\u7279\u5b9a\u306e\u96f0\u56f2\u6c17\u3067\u306f\u53ef\u9006\u73fe\u8c61\u3067\u3042\u308b\u3053\u3068\u3092\u898b\u51fa\u3057\u305f\u3068\u8a00\u3046\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u30011\uff5e1.5 nm\u7a0b\u5ea6\u306e\u30b9\u30c6\u30c3\u30d7\u306e\u307f\u304b\u3089\u306a\u308b\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u5766\u306a\u8868\u9762\u3092\u5f97\u308b\u3053\u3068\u3092\u53ef\u80fd\u3068\u3057\u307e\u3057\u305f\u3002<\/span><\/p>\r\n<p><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/pre\/wp\/wp-content\/uploads\/2023\/08\/kusunoki_2.jpg\" alt=\"\" width=\"800\" height=\"448\" class=\"aligncenter size-full wp-image-8754\" \/><\/p>\r\n<p>&nbsp;<\/p>\r\n<h4><span style=\"font-size: 16px;\"><strong><span style=\"font-size: 20px;\">\u3010\u7814\u7a76\u306e\u6ce2\u53ca\u52b9\u679c\u3084\u793e\u4f1a\u7684\u5f71\u97ff\u3011<\/span><\/strong><\/span><\/h4>\r\n<p><span style=\"font-size: 16px;\">\u3000SiC\u306e\u30b9\u30c6\u30c3\u30d7\u30d0\u30f3\u30c1\u30f3\u30b0\u73fe\u8c61\u306b\u95a2\u3057\u3066\u3001MSB\u3001LSB\u5171\u306b\u3053\u308c\u307e\u3067\u591a\u304f\u306e\u8b70\u8ad6\u304c\u884c\u308f\u308c\u3001\u69d8\u3005\u306a\u30e1\u30ab\u30cb\u30ba\u30e0\u304c\u63d0\u6848\u3055\u308c\u3066\u304d\u307e\u3057\u305f\u3002\u305d\u308c\u3089\u306e\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u57fa\u3065\u304f\u3068\u3001LSB\u304c\u751f\u3058\u305f\u5f8c\u306bMSB\u304c\u751f\u3058\u308b\u73fe\u8c61\u3092\u5358\u7d14\u306b\u8aac\u660e\u3059\u308b\u3053\u3068\u306f\u3067\u304d\u307e\u305b\u3093\u3002\u305d\u306e\u305f\u3081\u3001\u672c\u6210\u679c\u306f\u8868\u9762\u79d1\u5b66\u7406\u8ad6\u306b\u4e00\u77f3\u3092\u6295\u3058\u308b\u3082\u306e\u3068\u8003\u3048\u3089\u308c\u307e\u3059\u3002<\/span><br><span style=\"font-size: 16px;\">\u3000\u307e\u305f\u3001\u4e00\u822c\u7684\u306a\u534a\u5c0e\u4f53\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u3001\u30a4\u30f3\u30b4\u30c3\u30c8\u3092\u5207\u65ad\u3057\u3066\u30a6\u30a7\u30cf\u3068\u3057\u3001\u305d\u306e\u8868\u9762\u3092\u6a5f\u68b0\u7814\u78e8\u3057\u305f\u5f8c\u3067\u3001CMP\u3068\u6c34\u7d20\u30a8\u30c3\u30c1\u30f3\u30b0\u51e6\u7406\u304c\u65bd\u3055\u308c\u307e\u3059\u3002CMP\u3060\u3051\u3067\u306f\u52a0\u5de5\u30c0\u30e1\u30fc\u30b8\u5c64\u304c\u6b8b\u308a\u3001\u5358\u7d14\u306a\u6c34\u7d20\u30a8\u30c3\u30c1\u30f3\u30b0\u3060\u3051\u3067\u306fLSB\u304c\u751f\u3058\u3066\u3057\u307e\u3044\u307e\u3059\u3002\u305d\u308c\u306b\u5bfe\u3057\u3066\u3001\u7814\u78e8\u75d5\u306e\u6b8b\u308bSiC\u8868\u9762\u306b\u5bfe\u3057\u3066\u3001Ar\/4%H<sub>2<\/sub>\u96f0\u56f2\u6c17\u4e2d\u3067\u307e\u305a\u9ad8\u6e29\u3067\u51e6\u7406\u3059\u308b\u3053\u3068\u3067\u7814\u78e8\u75d5\u3092\u9664\u53bb\u3057\u3001\u305d\u306e\u5f8c\u4f4e\u6e29\u3067\u4fdd\u6301\u3059\u308c\u3070\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u5766\u306a\u8868\u9762\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u3059\u306a\u308f\u3061\u3001\u672c\u6280\u8853\u306b\u3088\u3063\u3066\u3001\u52a0\u5de5\u30c0\u30e1\u30fc\u30b8\u5c64\u3082\u306a\u304f\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u5766\u306a\u8868\u9762\u3092\u5f97\u3089\u308c\u308b\u4e0a\u306b\u3001CMP\u3092\u542b\u3080\u30d7\u30ed\u30bb\u30b9\u3092\u524a\u6e1b\u3067\u304d\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u5de5\u7a0b\u3092\u30b7\u30f3\u30d7\u30eb\u306b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u305f\u3081\u3001\u5927\u5e45\u306a\u30b3\u30b9\u30c8\u30fb\u6642\u9593\u306e\u524a\u6e1b\u304c\u53ef\u80fd\u306b\u306a\u308b\u3053\u3068\u3082\u671f\u5f85\u3055\u308c\u307e\u3059\u3002<\/span><\/p>\r\n<h4><strong><span style=\"font-size: 20px;\">\u3010\u4eca\u5f8c\u306e\u8ab2\u984c\u3011<\/span><\/strong><\/h4>\r\n<p><span style=\"font-size: 16px;\">\u3000\u672c\u7814\u7a76\u3067\u306f\u3001\u534a\u5c0e\u4f53\u3068\u3057\u3066SiC\u306e\u307f\u3092\u5bfe\u8c61\u3068\u3057\u307e\u3057\u305f\u3002\u4e00\u65b9\u3067\u3001\u534a\u5c0e\u4f53\u3068\u3057\u3066\u306f\u7a92\u5316\u30ac\u30ea\u30a6\u30e0\uff08GaN\uff09\u3084\u30d2\u5316\u30ac\u30ea\u30a6\u30e0\uff08GaAs\uff09\u306a\u3069\u3001\u4ed6\u306b\u3082\u69d8\u3005\u306a\u7269\u8cea\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u3089\u306b\u95a2\u3057\u3066\u3082\u3001\u7d50\u6676\u69cb\u9020\u304c\u985e\u4f3c\u3057\u3066\u3044\u308b\u3053\u3068\u304b\u3089\u30b9\u30c6\u30c3\u30d7\u30a2\u30f3\u30d0\u30f3\u30c1\u30f3\u30b0\u304c\u751f\u3058\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u4ed6\u306e\u534a\u5c0e\u4f53\u7269\u8cea\u3078\u306e\u672c\u6280\u8853\u306e\u9069\u7528\u304c\u4eca\u5f8c\u306e\u8ab2\u984c\u3067\u3059\u3002<\/span><\/p>\r\n<h6><br>\uff3b\u7528\u8a9e\u89e3\u8aac\uff3d<\/h6>\r\n<p><a id=\"kusu1\"><\/a><span style=\"color: #008080;\">\u203b1\u3000SiC<\/span><br>\u3000\u30b1\u30a4\u7d20Si\u3068\u70ad\u7d20C\u304b\u3089\u306a\u308b\u534a\u5c0e\u4f53\u7269\u8cea\u3002Si\u3088\u308a\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u304c\u5927\u304d\u3044\u305f\u3081\u30ef\u30a4\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u3068\u547c\u3070\u308c\u3001\u8010\u96fb\u5727\u6027\u304c\u9ad8\u3044\u3053\u3068\u304b\u3089\u96fb\u529b\u5909\u63db\u306a\u3069\u306e\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u3068\u3057\u3066\u7528\u3044\u3089\u308c\u3066\u3044\u308b\u3002<a href=\"#nori1\" style=\"color: #008080;\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/p>\r\n<p><a id=\"kusu2\"><\/a><span style=\"color: #008080;\">\u203b2\u3000\u5316\u5b66\u6a5f\u68b0\u7814\u78e8\uff08CMP\uff09<\/span><br>\u3000\u534a\u5c0e\u4f53\u57fa\u677f\u8868\u9762\u3092\u6a5f\u68b0\u7684\u306b\u7814\u78e8\u3059\u308b\u969b\u306b\u3001\u7814\u78e8\u6db2\u306b\u9178\u30fb\u30a2\u30eb\u30ab\u30ea\u306a\u3069\u3092\u542b\u3081\u308b\u3053\u3068\u3067\u3001\u305d\u306e\u5316\u5b66\u4f5c\u7528\u306b\u3088\u3063\u3066\u6975\u3081\u3066\u5e73\u5766\u306a\u7814\u78e8\u9762\u3092\u9ad8\u901f\u3067\u5f97\u308b\u6280\u8853\u3002SiC\u3067\u306f\u3001\u6700\u5c0f\u69cb\u9020\u5358\u4f4d\u3067\u3042\u308b\u9ad8\u30550.25 nm\u306e\u30b9\u30c6\u30c3\u30d7\u306e\u307f\u3067\u5f62\u6210\u3055\u308c\u305f\u56f32(b)\u306e\u3088\u3046\u306a\u8868\u9762\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u534a\u5c0e\u4f53\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u5fc5\u9808\u306e\u6280\u8853\u3067\u3042\u308b\u304c\u3001\u5ba4\u6e29\u3067\u6a5f\u68b0\u7684\u306b\u52a0\u5de5\u3059\u308b\u305f\u3081\u3001\u8868\u9762\u8fd1\u508d\u306b\u52a0\u5de5\u30c0\u30e1\u30fc\u30b8\u5c64\u304c\u6b8b\u308b\u3053\u3068\u304c\u8ab2\u984c\u3002<a href=\"#nori2\" style=\"color: #008080;\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/p>\r\n<p><a id=\"kusu3\"><\/a><span style=\"color: #008080;\">\u203b3\u3000\u6c34\u7d20\u30a8\u30c3\u30c1\u30f3\u30b0<\/span><br>\u3000Si\u3084SiC\u306a\u3069\u306e\u534a\u5c0e\u4f53\u3092\u3001\u6c34\u7d20\u3092\u542b\u3080\u96f0\u56f2\u6c17\u3067\u3001\u5343\u6570\u767e\u5ea6\u3067\u52a0\u71b1\u3059\u308b\u3068\u3001\u8868\u9762\u304b\u3089Si\u3084C\u304c\u6c34\u7d20\u306b\u3088\u3063\u3066\u9664\u53bb\u3055\u308c\u308b\u73fe\u8c61\u3002\u52a0\u5de5\u30c0\u30e1\u30fc\u30b8\u5c64\u3082\u5408\u308f\u305b\u3066\u9664\u53bb\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u304c\u3001\u30b9\u30c6\u30c3\u30d7\u30d0\u30f3\u30c1\u30f3\u30b0\u73fe\u8c61\u304c\u540c\u6642\u306b\u8d77\u3053\u308b\u305f\u3081\u3001\u30b9\u30c6\u30c3\u30d7\u306e\u9ad8\u3055\u306f\u56f32(c)\u306e\u3088\u3046\u306b\u6570nm\uff5e\u6570\u5341nm\u3068\u306a\u3063\u3066\u3057\u307e\u3046\u3002<a href=\"#nori3\" style=\"color: #008080;\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/p>\r\n<p><a id=\"kusu4\"><\/a><span style=\"color: #008080;\">\u203b4\u3000\u30b9\u30c6\u30c3\u30d7\u30d0\u30f3\u30c1\u30f3\u30b0<\/span><br>\u3000\u9ad8\u3055\u306e\u4f4e\u3044\u30b9\u30c6\u30c3\u30d7\u304c\u96c6\u307e\u3063\u3066\u9ad8\u3044\u30b9\u30c6\u30c3\u30d7\u306b\u306a\u308b\u73fe\u8c61\u3002bunch\u3068\u306f\u3001\u675f\u306b\u306a\u308b\u3068\u3044\u3046\u610f\u5473\u3002SiC\u306b\u304a\u3044\u3066\u3001\u6700\u5c0f\u9ad8\u30550.25 nm\u306e\u30b9\u30c6\u30c3\u30d7\u304c4\u3042\u308b\u3044\u306f6\u3064\u96c6\u307e\u3063\u30661.0\u3042\u308b\u3044\u306f1.5 nm\u306e\u9ad8\u3055\u306e\u30b9\u30c6\u30c3\u30d7\u306b\u306a\u308bMSB\u3068\u3001\u305d\u308c\u3089\u304c\u3055\u3089\u306b\u8907\u6570\u96c6\u307e\u3063\u3066\u6570nm\uff5e\u6570\u5341nm\u306e\u9ad8\u3055\u306b\u306a\u308bLSB\u306b\u5206\u304b\u308c\u308b\u3002MSB\u306f\u30a8\u30cd\u30eb\u30ae\u30fc\u8ad6\u7684\u306b\u5b89\u5b9a\u306a\u8868\u9762\u304c\u73fe\u308c\u308b\u3053\u3068\u3067\u751f\u3058\u3001LSB\u306f\u5916\u56e0\u6027\u306e\u901f\u5ea6\u8ad6\u7684\u306a\u52b9\u679c\u3067\u751f\u3058\u308b\u3068\u8003\u3048\u3089\u308c\u3066\u3044\u308b\u3002<a href=\"#nori1\" style=\"color: #008080;\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/p>\r\n<p>&nbsp;<\/p>\r\n<h5>\uff3b\u8ad6\u6587\u60c5\u5831\uff3d<\/h5>\r\n<p>\u96d1\u8a8c\u540d\uff1aApplied Physics Letters<br>\u8ad6\u6587\u540d\uff1aStep unbunching phenomenon on 4H-SiC (0001) surface during hydrogen etching<br>\u57f7\u7b46\u8005\u540d\uff08\u6240\u5c5e\u6a5f\u95a2\u540d\u3001\u5f79\u5272\uff09\uff1aRyotaro Sakakibara (\u540d\u53e4\u5c4b\u5927\u5b66\u3001\u5b9f\u9a13\u30fb\u89e3\u6790\u30fb\u8ad6\u6587\u57f7\u7b46)\u3001Jianfeng Bao (\u540d\u53e4\u5c4b\u5927\u5b66\u30fb\u5185\u30e2\u30f3\u30b4\u30eb\u6c11\u65cf\u5927\u5b66\u3001\u5b9f\u9a13\u30fb\u89e3\u6790\u30fb\u8ad6\u6587\u7de8\u96c6)\u3001Keisuke Yuhara (\u540d\u53e4\u5c4b\u5927\u5b66\u3001\u5b9f\u9a13)\u3001Keita Matsuda (\u540d\u53e4\u5c4b\u5927\u5b66\u3001\u5b9f\u9a13\u30fb\u89e3\u6790)\u3001Tomo-o Terasawa (\u540d\u53e4\u5c4b\u5927\u5b66\u30fb\u65e5\u672c\u539f\u5b50\u529b\u7814\u7a76\u958b\u767a\u6a5f\u69cb\u3001\u5b9f\u9a13\u30fb\u89e3\u6790\u30fb\u8ad6\u6587\u7de8\u96c6)\u3001Michiko Kusunoki (\u540d\u53e4\u5c4b\u5927\u5b66\u3001\u89e3\u6790\u30fb\u8ad6\u6587\u7de8\u96c6)\u3001and Wataru Norimatsu (\u540d\u53e4\u5c4b\u5927\u5b66\u30fb\u65e9\u7a32\u7530\u5927\u5b66\u3001\u7dcf\u62ec\u30fb\u89e3\u6790\u30fb\u8ad6\u6587\u57f7\u7b46)<br>\u63b2\u8f09\u65e5\uff08\u73fe\u5730\u6642\u9593\uff09\uff1a2023\u5e747\u670819\u65e5\uff08\u6c34\uff09<br>\u63b2\u8f09URL\uff1a<a href=\"https:\/\/pubs.aip.org\/aip\/apl\/issue\/123\/3\">https:\/\/pubs.aip.org\/aip\/apl\/issue\/123\/3<\/a><br>DOI\uff1a<a href=\"https:\/\/doi.org\/10.1063\/5.0153565\">https:\/\/doi.org\/10.1063\/5.0153565<\/a><\/p>\r\n<h5><br>\uff3b\u7814\u7a76\u52a9\u6210\uff3d<\/h5>\r\n<p>\u7814\u7a76\u8cbb\u540d\uff1a\u79d1\u7814\u8cbb\u57fa\u76e4\u7814\u7a76B<br>\u7814\u7a76\u8ab2\u984c\u540d\uff1a\u534a\u7d76\u7e01\u6027SiC\u4e0a\u30a6\u30a7\u30cf\u30b9\u30b1\u30fc\u30eb\u30b0\u30e9\u30d5\u30a7\u30f3\u306f\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u5fdc\u7528\u306b\u6700\u9069\u306a\u306e\u304b\uff1f<br>\u7814\u7a76\u4ee3\u8868\u8005\u540d\uff08\u6240\u5c5e\u6a5f\u95a2\u540d\uff09\uff1a\u4e57\u677e\u822a\uff08\u540d\u53e4\u5c4b\u5927\u5b66\uff1a\u52a9\u6210\u5f53\u6642\uff09<\/p>\r\n<p>\u7814\u7a76\u8cbb\u540d\uff1a\u65b0\u5b66\u8853\u9818\u57df\u7814\u7a76\u516c\u52df\u7814\u7a76<br>\u7814\u7a76\u8ab2\u984c\u540d\uff1a\u56fa\u4f53\u96fb\u89e3\u8cea\/\u30ca\u30ce\u30ab\u30fc\u30dc\u30f3\u754c\u9762\u3067\u306eLi\u633f\u5165\u8131\u96e2\u6a5f\u69cb\u89e3\u660e\u3068\u65b0\u6a5f\u80fd\u5275\u51fa<br>\u7814\u7a76\u4ee3\u8868\u8005\u540d\uff08\u6240\u5c5e\u6a5f\u95a2\u540d\uff09\uff1a\u4e57\u677e\u822a\uff08\u540d\u53e4\u5c4b\u5927\u5b66\uff1a\u52a9\u6210\u5f53\u6642\uff09<\/p>\r\n<p>\u7814\u7a76\u8cbb\u540d\uff1a\u79d1\u7814\u8cbb\u65b0\u5b66\u8853\u9818\u57df\u7814\u7a76\u300c\u539f\u5b50\u5c64\u79d1\u5b66\u300d\u8a08\u753b\u7814\u7a76<br>\u7814\u7a76\u8ab2\u984c\u540d\uff1a\u30b0\u30e9\u30d5\u30a7\u30f3\u95a2\u9023\u539f\u5b50\u5c64\u306e\u65b0\u898f\u5408\u6210\u6cd5\u304a\u3088\u3073\u5927\u9762\u7a4d\u5408\u6210\u6cd5\u306e\u958b\u767a<br>\u7814\u7a76\u4ee3\u8868\u8005\u540d\uff08\u6240\u5c5e\u6a5f\u95a2\u540d\uff09\uff1a<a 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