{"id":4852,"date":"2022-06-30T13:00:54","date_gmt":"2022-06-30T04:00:54","guid":{"rendered":"https:\/\/www.imass.nagoya-u.ac.jp\/?p=4852"},"modified":"2023-01-24T09:20:20","modified_gmt":"2023-01-24T00:20:20","slug":"20220630harada","status":"publish","type":"post","link":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/research\/20220630harada.html","title":{"rendered":"\u534a\u5c0e\u4f53\u30a6\u30a8\u30cf\u30fc\u9762\u5185\u306e\u8ee2\u4f4d\u5206\u5e03\u30fb\u3072\u305a\u307f\u5206\u5e03\u306e\u53ef\u8996\u5316\u306b\u6210\u529f \u2015\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u691c\u67fb\u5de5\u7a0b\u306e\u5229\u4fbf\u6027\u5411\u4e0a\u3084\u52b9\u7387\u5316\u306b\u8ca2\u732e\u2015"},"content":{"rendered":"

 <\/p>\r\n

\u3000\u3000\u30a2\u30eb\u30b4\u30ea\u30ba\u30e0\u306b\u3088\u308b\u6b20\u9665\u306e\u81ea\u52d5\u691c\u51fa\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0\u3000\u3000\u00a0 \u00a0 \u00a0 \u00a0 \u3000\u3000\u3000\u3000\u3000\u6b20\u9665\u5206\u5e03\u30de\u30c3\u30d4\u30f3\u30b0<\/span><\/span><\/strong><\/p>\r\n

\"\"<\/a>\"\"<\/a><\/p>\r\n

 <\/p>\r\n

\u3000<\/span><\/span><\/span>NEDO<\/span><\/span>\u306e\u300c\u5b98\u6c11\u306b\u3088\u308b\u82e5\u624b\u7814\u7a76\u8005\u767a\u6398\u652f\u63f4\u4e8b\u696d\uff08\u82e5\u30b5\u30dd\uff09\u300d\u3067\u56fd\u7acb\u5927\u5b66\u6cd5\u4eba\u6771\u6d77\u56fd\u7acb\u5927\u5b66\u6a5f\u69cb \u540d\u53e4\u5c4b\u5927\u5b66<\/span><\/span>\u539f\u7530\u4fca\u592a \u51c6\u6559\u6388<\/a>\uff08\u672a\u6765\u6750\u6599\u30fb\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240\uff09<\/span>\u3068Mipox<\/span>\uff08\u682a\uff09\u306f\u3001\u534a\u5c0e\u4f53\u57fa\u677f\u3092\u88fd\u9020\u3059\u308b\u969b\u306b\u767a\u751f\u3059\u308b\u7d50<\/span><\/span>\u6676<\/span><\/span>\u6b20\u9665\uff08\u8ee2\u4f4d\uff09\u3092\u30ab\u30a6\u30f3\u30c8\u3059\u308b\u30b7\u30b9\u30c6\u30e0\u306e\u69cb\u7bc9\u3068\u3001\u30a6\u30a8\u30cf\u30fc\u5168\u4f53\u306e\u8ee2\u4f4d\u3084\u3072\u305a\u307f\u306e\u5206\u5e03\u3092\u76f4\u611f\u7684\u306b\u5206\u304b\u308a\u3084\u3059\u304f\u8868\u793a\u3059\u308b\u30d2\u30fc\u30c8\u30de\u30c3\u30d7\u8868\u793a\u6a5f\u80fd\u306e\u958b\u767a\u306b\u6210\u529f\u3057\u307e\u3057\u305f\u3002\u5f93\u6765\u306f\u8ee2\u4f4d\u90e8\u5206\u3092\u6a5f\u68b0\u7684\u306b\u62bd\u51fa\u3067\u304d\u305a\u3001\u89b3\u5bdf\u3057\u305f\u50cf\u306e\u5b9a\u91cf\u7684\u306a\u8a55\u4fa1\u304c\u56f0\u96e3\u3067\u3057\u305f\u304c\u3001\u672c\u6210\u679c\u306b\u3088\u308a\u3001\u30b0\u30ec\u30fc\u306e\u30b3\u30f3\u30c8\u30e9\u30b9\u30c8\u3067\u5f62\u6210\u3055\u308c\u305f\u753b\u50cf\u306e\u4e2d\u304b\u3089\u8ee2\u4f4d\u306e\u4f4d\u7f6e\u60c5\u5831\u3092\u62bd\u51fa\u3057\u3001\u8ee2\u4f4d\u306e\u6570\u5bc6\u5ea6\u3084\u5206\u5e03\u306e\u69d8\u5b50\u3092\u30ab\u30e9\u30fc\u30b9\u30b1\u30fc\u30eb\u3067\u53ef\u8996\u5316\uff08\u30d2\u30fc\u30c8\u30de\u30c3\u30d7\u8868\u793a\uff09\u3059\u308b\u3053\u3068\u304c\u53ef\u80fd\u306b\u306a\u308a\u307e\u3057\u305f\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u691c\u67fb\u5de5\u7a0b\u306e\u5229\u4fbf\u6027\u3084\u696d\u52d9\u52b9\u7387\u306e\u5411\u4e0a\u306b\u5927\u304d\u304f\u8ca2\u732e\u3057\u307e\u3059\u3002<\/span><\/span><\/p>\r\n

<\/o:p><\/span>\u3000\u306a\u304a\u3001Mipox<\/span>\uff08\u682a\uff09\u306f\u4eca\u56de\u958b\u767a\u3057\u305f\u4e8c\u3064\u306e\u6a5f\u80fd\u3092\u7d44\u307f\u5408\u308f\u305b\u3066\u3001Mipox<\/span>\uff08\u682a\uff09\u306e\u88fd\u54c1\u3067\u3042\u308bSiC<\/span>\u7d50\u6676\u8ee2\u4f4d\u9ad8\u611f\u5ea6\u53ef\u8996\u5316\u88c5\u7f6e\u300cXS-1 Sirius<\/span>\u300d\u306b\u5b9f\u88c5\u3057\u307e\u3057\u305f\u3002<\/span><\/p>\r\n

 <\/p>\r\n

\"\"\u56f31\u3000\u4eca\u56de\u958b\u767a\u3057\u305f\u8ee2\u4f4d\u30ab\u30a6\u30f3\u30c8\u30b7\u30b9\u30c6\u30e0\u3068\u30d2\u30fc\u30c8\u30de\u30c3\u30d7\u8868\u793a\u6a5f\u80fd\u3092\u5b9f\u88c5\u3057\u305fSiC<\/span>\u7d50\u6676\u8ee2\u4f4d\u9ad8\u611f\u5ea6\u53ef\u8996\u5316\u88c5\u7f6e\u300cXS-1 Sirius<\/span>\u300d<\/span><\/strong><\/o:p><\/span><\/p>\r\n

 <\/p>\r\n

[\u6982\u8981]<\/span>
<\/strong><\/span><\/p>\r\n

\r\n

\u3000<\/span><\/p>\r\n

\u3000\u5927\u5b66\u7b49\u306b\u6240\u5c5e\u3059\u308b\u82e5\u624b\u7814\u7a76\u8005\u3068\u4f01\u696d\u3068\u306e\u5171\u540c\u7814\u7a76\u3092\u652f\u63f4\u3059\u308b\u3001NEDO\uff08\u56fd\u7acb\u7814\u7a76\u958b\u767a\u6cd5\u4eba\u65b0\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u7523\u696d\u6280\u8853\u7dcf\u5408\u958b\u767a\u6a5f\u69cb\uff09\u306e\u300c\u5b98\u6c11\u306b\u3088\u308b\u82e5\u624b\u7814\u7a76\u8005\u767a\u6398\u652f\u63f4\u4e8b\u696d\uff08\u82e5\u30b5\u30dd\uff09\u300d<\/span>\u203b1<\/sup><\/span>\u3067\u56fd\u7acb\u5927\u5b66\u6cd5\u4eba\u6771\u6d77\u56fd\u7acb\u5927\u5b66\u6a5f\u69cb \u540d\u53e4\u5c4b\u5927\u5b66\u672a\u6765\u6750\u6599\u30fb\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240\u306e\u539f\u7530\u4fca\u592a\u51c6\u6559\u6388\u3068Mipox\u682a\u5f0f\u4f1a\u793e\u306f\u3001\u975e\u7834\u58ca\u30fb\u4f4e\u30b3\u30b9\u30c8\u3067\u534a\u5c0e\u4f53\u7d50\u6676\u30a6\u30a8\u30cf\u30fc\u5185\u90e8\u306e\u7d50\u6676\u6b20\u9665\uff08\u8ee2\u4f4d\uff09<\/span>\u203b2<\/sup><\/span>\u3092\u53ef\u8996\u5316\u3057\u3001\u88fd\u54c1\u306e\u8010\u5727\u7279\u6027\u3092\u52a3\u5316\u3055\u305b\u308b\u6b20\u9665\uff08\u30ad\u30e9\u30fc\u6b20\u9665\uff09\u3092\u81ea\u52d5\u691c\u67fb\u3059\u308b\u30b7\u30b9\u30c6\u30e0\u306e\u5171\u540c\u7814\u7a76\u3092\u884c\u3044\u3001\u8ee2\u4f4d\u3092\u30ab\u30a6\u30f3\u30c8\u3059\u308b\u30b7\u30b9\u30c6\u30e0\u306e\u69cb\u7bc9\u3068\u3001\u30a6\u30a8\u30cf\u30fc\u5168\u4f53\u306e\u8ee2\u4f4d\u3084\u3072\u305a\u307f<\/span>\u203b3<\/sup><\/span>\u306e\u5206\u5e03\u3092\u76f4\u611f\u7684\u306b\u5206\u304b\u308a\u3084\u3059\u304f\u8868\u793a\u3059\u308b\u30d2\u30fc\u30c8\u30de\u30c3\u30d7\u8868\u793a\u6a5f\u80fd\u306e\u958b\u767a\u306b\u6210\u529f\u3057\u307e\u3057\u305f\u3002<\/span>
\u3000\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u3084\u7a92\u5316\u30ac\u30ea\u30a6\u30e0\uff08GaN\uff09\u306a\u3069\u306e\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53<\/span>\u203b4<\/sup><\/span>\u30c7\u30d0\u30a4\u30b9\u306f\u3001\u5bb6\u96fb\u88fd\u54c1\u304b\u3089\u6b21\u4e16\u4ee3\u81ea\u52d5\u8eca\u3001\u9244\u9053\u3001\u9001\u914d\u96fb\u6a5f\u5668\u307e\u3067\u5e45\u5e83\u304f\u642d\u8f09\u3055\u308c\u3066\u3044\u308b\u96fb\u529b\u5909\u63db\u5668\u306e\u52b9\u7387\u5411\u4e0a\u3084\u5c0f\u578b\u5316\u3092\u5b9f\u73fe\u3067\u304d\u308b\u3068\u671f\u5f85\u3055\u308c\u3066\u3044\u307e\u3059\u304c\u3001\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u57fa\u677f\u3092\u88fd\u9020\u3059\u308b\u969b\u306b\u306f\u591a\u304f\u306e\u8ee2\u4f4d\u304c\u542b\u307e\u308c\u308b\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u3089\u306f\u30ad\u30e9\u30fc\u6b20\u9665\u3068\u306a\u308a\u5f97\u308b\u305f\u3081\u3001\u691c\u67fb\u306b\u3088\u3063\u3066\u6b20\u9665\u306e\u9818\u57df\u3084\u5bc6\u5ea6\u3092\u7684\u78ba\u306b\u628a\u63e1\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u304c\u3001\u88fd\u54c1\u54c1\u8cea\u306e\u78ba\u4fdd\u3068\u30b3\u30b9\u30c8\u306e\u89b3\u70b9\u304b\u3089\u3001\u9ad8\u7cbe\u5ea6\u30fb\u9ad8\u52b9\u7387\u306e\u6b20\u9665\u691c\u67fb\u6280\u8853\u304c\u6c42\u3081\u3089\u308c\u3066\u3044\u307e\u3059\u3002\u5f93\u6765\u306e\u6280\u8853\u3067\u306f\u3001\u8ee2\u4f4d\u90e8\u5206\u3092\u6a5f\u68b0\u7684\u306b\u62bd\u51fa\u3067\u304d\u305a\u3001\u89b3\u5bdf\u3055\u308c\u305f\u50cf\u306e\u5b9a\u91cf\u7684\u306a\u8a55\u4fa1\u304c\u56f0\u96e3\u3067\u3057\u305f\u3002\u672c\u6210\u679c\u306b\u3088\u308a\u30b0\u30ec\u30fc\u30b9\u30b1\u30fc\u30eb\u306e\u30b3\u30f3\u30c8\u30e9\u30b9\u30c8\u3067\u5f62\u6210\u3055\u308c\u305f\u8ee2\u4f4d\u306e\u4f4d\u7f6e\u60c5\u5831\u3092\u62bd\u51fa\u3057\u3066\u8a08\u6570\u3057\u3001\u8ee2\u4f4d\u306e\u6570\u5bc6\u5ea6\u3084\u5206\u5e03\u306e\u69d8\u5b50\u3092\u30ab\u30e9\u30fc\u30b9\u30b1\u30fc\u30eb\u3067\u53ef\u8996\u5316\u3057\u5b9a\u91cf\u5316\u3059\u308b\u3053\u3068\u304c\u53ef\u80fd\u306b\u306a\u308a\u307e\u3057\u305f\u3002\u672c\u6210\u679c\u306f\u3001\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u30a6\u30a8\u30cf\u30fc\u306e\u691c\u67fb\u30b3\u30b9\u30c8\u3092\u4f4e\u6e1b\u3059\u308b\u3068\u3068\u3082\u306b\u3001\u5229\u4fbf\u6027\u3084\u696d\u52d9\u52b9\u7387\u306e\u5411\u4e0a\u306b\u5927\u304d\u304f\u8ca2\u732e\u3057\u307e\u3059\u3002<\/span>
\u3000\u306a\u304a\u3001Mipox\uff08\u682a\uff09\u306fSiC\u7d50\u6676\u8ee2\u4f4d\u9ad8\u611f\u5ea6\u53ef\u8996\u5316\u88c5\u7f6e\u300cXS-1 Sirius\u300d\u306b\u3053\u308c\u3089\u4e8c\u3064\u306e\u6210\u679c\u3092\u30d9\u30fc\u30b9\u3068\u3057\u305f\u6a5f\u80fd\uff08\u8ee2\u4f4d\u30ab\u30a6\u30f3\u30c8\u30fb\u30d2\u30fc\u30c8\u30de\u30c3\u30d7\u8868\u793a\uff09\u3092\u5b9f\u88c5\u3057\u307e\u3057\u305f\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u30a6\u30a8\u30cf\u30fc\u306b\u542b\u307e\u308c\u308b\u8ee2\u4f4d\u306e\u6570\u309295\uff05\u4ee5\u4e0a\u306e\u691c\u51fa\u7387\u3067\u6e2c\u5b9a\u3059\u308b\u3053\u3068\u306b\u6210\u529f<\/span>\u203b5<\/sup>\u3057\u307e\u3057\u305f\u3002\u307e\u305f\u3001\u3053\u308c\u3089\u306e\u65b0\u6a5f\u80fd\u3092\u64ae\u50cf\u3068\u30de\u30eb\u30c1\u30bf\u30b9\u30af\u3067\u51e6\u7406\u3055\u305b\u308b\u3053\u3068\u3067\u691c\u67fb\u6642\u9593\u3092\u77ed\u7e2e\u3057\u3001\u30a6\u30a8\u30cf\u30fc\u306e\u5168\u9762\u691c\u67fb\u306b\u304a\u3044\u30663\u30a4\u30f3\u30c1\u30a6\u30a8\u30cf\u30fc\u3067\u7d044\u5206\u30014\u30a4\u30f3\u30c1\u3067\u7d047\u5206\u30016\u30a4\u30f3\u30c1\u7d0415\u5206\u3068\u3044\u3046\u9ad8\u901f\u691c\u67fb\u80fd\u529b\u3092\u5b9f\u73fe\u3057\u307e\u3057\u305f\u3002<\/span><\/span><\/span><\/span><\/p>\r\n

 <\/p>\r\n

[\u4eca\u56de\u306e\u6210\u679c]
<\/strong><\/span><\/p>\r\n

\r\n

\u00a0
\uff081\uff09\u8ee2\u4f4d\u30ab\u30a6\u30f3\u30c8\u30b7\u30b9\u30c6\u30e0\u306e\u69cb\u7bc9<\/span><\/p>\r\n

\u3000\u30b0\u30ec\u30fc\u30b9\u30b1\u30fc\u30eb\u3067\u89b3\u5bdf\u3055\u308c\u308b\u50cf\u306e\u4e2d\u304b\u3089\u8ee2\u4f4d\u306e\u4f4d\u7f6e\u3092\u7279\u5b9a\u3057\u30ab\u30a6\u30f3\u30c8\u3059\u308b\u30b7\u30b9\u30c6\u30e0<\/span>\u203b6<\/sup><\/span>\u3092\u69cb\u7bc9\u3057\u307e\u3057\u305f\u3002\u8ee2\u4f4d\u306e\u53ef\u8996\u5316\u306b\u306f\u3001\u504f\u5149\u306b\u4f34\u3046\u7d50\u6676\u7279\u6709\u306e\u8907\u5c48\u6298\u7279\u6027\uff08\u30ec\u30bf\u30c7\u30fc\u30b7\u30e7\u30f3\uff09<\/span>\u203b7<\/sup><\/span>\u3092\u5229\u7528\u3057\u305f\u504f\u5149\u89b3\u5bdf\u306e\u6280\u8853\u3068Mipox\uff08\u682a\uff09\u72ec\u81ea\u306e\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u4f4d\u76f8\u6f14\u7b97\u51e6\u7406\u3092\u7528\u3044\u307e\u3059\u3002\u89b3\u5bdf\u3055\u308c\u308b\u50cf\u306f\u30b0\u30ec\u30fc\u30b9\u30b1\u30fc\u30eb\u306b\u3088\u308b\u30b3\u30f3\u30c8\u30e9<\/span>\u30b9\u30c8\u3068\u3057\u3066\u5f62\u6210\u3055\u308c\u308b\u305f\u3081\u5f93\u6765\u6280\u8853\u3067\u306f\u80cc\u666f\u3068\u8ee2\u4f4d\u306e\u30b3\u30f3\u30c8\u30e9\u30b9\u30c8\u306e\u5207\u308a\u5206\u3051\u304c\u56f0\u96e3\u3067\u3057\u305f\u304c\u3001\u72ec\u81ea\u306e\u753b\u50cf\u51e6\u7406\u30d5\u30a3\u30eb\u30bf\u30fc\u3092\u958b\u767a\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u8cab\u901a\u8ee2\u4f4d<\/span>\u203b8<\/sup><\/span>\u304c\u5f62\u6210\u3059\u308b\u30b3\u30f3\u30c8\u30e9\u30b9\u30c8\u3092\u9078\u629e\u7684\u306b\u62bd\u51fa\u3059\u308b\u3053\u3068\u3092\u53ef\u80fd\u306b\u3057\u307e\u3057\u305f\u3002<\/span><\/p>\r\n

\"\"<\/a><\/p>\r\n

\u56f32<\/span>\u3000\u8ee2\u4f4d\u30ab\u30a6\u30f3\u30c8\u30b7\u30b9\u30c6\u30e0\u306b\u3088\u308b\u8cab\u901a\u8ee2\u4f4d\u306e\u62bd\u51fa\u306e\u69d8\u5b50<\/span><\/strong><\/o:p><\/span><\/p>\r\n

 <\/p>\r\n

\uff082\uff09\u30d2\u30fc\u30c8\u30de\u30c3\u30d7\u8868\u793a\u6a5f\u80fd\u306e\u958b\u767a<\/span><\/p>\r\n

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<\/a>\"\"<\/a><\/strong><\/p>\r\n

\u56f33 4<\/span>\u30a4\u30f3\u30c1SiC<\/span>\u30a6\u30a8\u30cf\u30fc\u306b\u542b\u307e\u308c\u308b\u8cab\u901a\u8ee2\u4f4d\u306e\u6570\u306e\u30d2\u30fc\u30c8\u30de\u30c3\u30d7\u8868\u793a\u3002<\/o:p><\/span>\u8d64\u304c\u8cab\u901a\u8ee2\u4f4d\u306e\u591a\u3044\u9818\u57df\u3001<\/span><\/strong><\/p>\r\n

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 <\/p>\r\n

\u3010\u7528\u8a9e\u8aac\u660e\u3011<\/span><\/strong><\/p>\r\n

\r\n

 <\/p>\r\n

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\u00a0\u4e8b\u696d\u6982\u8981\uff1ahttps:\/\/wakasapo.nedo.go.jp\/about\/<\/a><\/span><\/span><\/p>\r\n

\u00a0\u203b2\u3000\u8ee2\u4f4d<\/span><\/strong>
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\u00a0\u203b3\u3000\u3072\u305a\u307f<\/strong><\/span><\/span>
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\u203b4\u3000\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53<\/span><\/strong>
\u96fb\u529b\u306e\u5236\u5fa1\u3084\u5909\u63db\u3092\u884c\u3046\u534a\u5c0e\u4f53\u306e\u7dcf\u79f0\u3067\u3001\u7279\u306b\u9ad8\u96fb\u5727\u30fb\u5927\u96fb\u6d41\u3092\u6271\u3046\u3053\u3068\u306e\u3067\u304d\u308b\u534a\u5c0e\u4f53\u3067\u3059\u3002\u8fd1\u5e74\u3067\u306f\u96fb\u529b\u306e\u7121\u99c4\u3092\u6975\u529b\u5c11\u306a\u304f\u3057\u3001\u7701\u30a8\u30cd\u30fb\u7701\u96fb\u529b\u5316\u306b\u8ca2\u732e\u3059\u308b\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u306e\u9700\u8981\u304c\u3088\u308a\u9ad8\u307e\u3063\u3066\u3044\u307e\u3059\u3002<\/span><\/span><\/p>\r\n

\u203b5\u3000\u30a6\u30a8\u30cf\u30fc\u306b\u542b\u307e\u308c\u308b\u8ee2\u4f4d\u306e\u6570\u309295\uff05\u4ee5\u4e0a\u306e\u691c\u51fa\u7387\u3067\u6e2c\u5b9a\u3059\u308b\u3053\u3068\u306b\u6210\u529f<\/strong>
A. Kawata, K. Murayama, S. Sumitani and S. Harada, Design of automatic detection algorithm for dislocation contrasts in birefringence images of SiC wafers, Jpn. J. Appl. Phys. 60(Sb) (2021).<\/span><\/span><\/p>\r\n

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\u203b8\u3000\u8cab\u901a\u8ee2\u4f4d<\/strong>
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<\/span><\/span><\/p>\r\n

 <\/p>\r\n

[\u7814\u7a76\u4ee3\u8868\u8005]<\/strong><\/span><\/h4>\r\n

Designated Associate Professor Shunta Harada<\/a>
Institute of Materials and Systems for Sustainability, Nagoya University<\/p>\r\n

Website for Ujihara Laboratory<\/strong>
https:\/\/ujihara.material.nagoya-u.ac.jp\/<\/a><\/p>\r\n

Nagoya University Information Site<\/a><\/p>","protected":false},"excerpt":{"rendered":"

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