{"id":4566,"date":"2022-05-31T15:00:46","date_gmt":"2022-05-31T06:00:46","guid":{"rendered":"https:\/\/www.imass.nagoya-u.ac.jp\/?p=4566"},"modified":"2022-07-08T05:14:40","modified_gmt":"2022-07-07T20:14:40","slug":"20220531_tanaka","status":"publish","type":"post","link":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/research\/20220531_tanaka.html","title":{"rendered":"Development of lossless short-time laser slicing technique for GaN substrates   &#8211; Expected significant reduction in fabrication cost of devices using GaN substrates"},"content":{"rendered":"<p style=\"text-align: center;\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2022\/07\/GaN_tanaka_A-2.jpg\" alt=\"\" width=\"1200\" height=\"720\" class=\"alignnone wp-image-4992 size-full\" srcset=\"https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2022\/07\/GaN_tanaka_A-2.jpg 1200w, https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2022\/07\/GaN_tanaka_A-2-300x180.jpg 300w, https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2022\/07\/GaN_tanaka_A-2-1024x614.jpg 1024w, https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2022\/07\/GaN_tanaka_A-2-768x461.jpg 768w\" sizes=\"auto, (max-width: 1200px) 100vw, 1200px\" \/><\/p>\r\n<p><span style=\"font-size: 16px;\">A research group led by Professor Hiroshi Amano and Associate Professor Atsushi Tanaka (specially appointed) of the Institute of Materials and Systems for Sustainability developed a lossless short-time laser slicing technique for GaN<strong><sup><span style=\"color: #800000;\">1)<\/span><\/sup><\/strong> substrates in cooperation with Hamamatsu Photonics K.K.<\/span><\/p>\r\n<p><span style=\"font-size: 16px;\">Monocrystal GaN substrates are indispensable for high-performance devices using GaN substrates. However, the high price of GaN substrates prohibits their widespread use. The achievement of this study will lead to a significant reduction in the fabrication cost of devices using GaN substrates and their increased use in society.<\/span><\/p>\r\n<p><span style=\"font-size: 16px;\">Part of this research was conducted under contract of R&D for the expansion of radio wave resources (JPJ000254) and strategic information and communications R&D promotion programme (JP215006003), organized by the Ministry of Internal Affairs and Communications, Japan.<\/span><br><br><span style=\"font-size: 16px;\"><span style=\"font-size: 20px;\"><\/span><\/span><\/p>\r\n<p><strong><span style=\"font-size: 16px; color: #000000;\">[Points]<\/span><\/strong><\/p>\r\n<hr \/>\r\n<p>&nbsp;<\/p>\r\n<ul>\r\n<li><span style=\"font-size: 16px; color: #000000;\">The loss of expensive GaN crystals during slicing is suppressed because GaN substrates are sliced without the kerf loss (space for cutting) resulting from using a laser.<br><br><\/span><\/li>\r\n<li><span style=\"font-size: 16px; color: #000000;\">Slicing without using a wire can reduce the waviness of the cut surface and produce a smooth surface, reducing the need for polishing and grinding processes after slicing.<br><br><\/span><\/li>\r\n<li><span style=\"font-size: 16px; color: #000000;\">Extremely hard and fragile GaN substrates are cut at a high speed.<br><br><\/span><\/li>\r\n<li><span style=\"font-size: 16px; color: #993300;\"><span style=\"color: #000000;\">It is possible to slice only the fabricated device layer from the back side of a GaN substrate by irradiating the GaN substrate with a laser that can pass through the substrate. The devices obtained by the slicing method can operate normally because the technique does not produce large vibration or stress.<\/span><br><\/span><\/li>\r\n<\/ul>\r\n<hr \/>\r\n<h5><span style=\"font-size: 16px;\"><strong><span style=\"color: #800000;\"><br><\/span>[Glossary]<br><\/strong><\/span><\/h5>\r\n<p><strong><span style=\"color: #800000;\"><sup>1)<\/sup><\/span><\/strong><span style=\"color: #800000;\">Gallium nitride (GaN): GaN has high-performance characteristics as a power semiconductor and is commonly used as a light emitter in LEDs and other devices.<\/span><\/p>\r\n<h6><span style=\"font-size: 16px;\"><strong><br><span style=\"font-size: 16px;\">[Reference]<\/span><br><\/strong><\/span><\/h6>\r\n<p><strong><span style=\"font-size: 20px;\">Related published journal papers<\/span><\/strong><\/p>\r\n<p><span style=\"font-size: 16px;\">\"Smart-cut-like laser slicing of GaN substrate using its own nitrogen\"<\/span><br><span style=\"font-size: 16px;\">Atsushi Tanaka, Ryuji Sugiura, Daisuke Kawaguchi, Toshiki Yui, Yotaro Wani, Tomomi Aratani, Hirotaka Watanabe, Hadi Sena, Yoshio Honda, Yasunori Igasaki, Hiroshi Amano<\/span><\/p>\r\n<p><span style=\"font-size: 16px;\">Scientific Reports, May 31, 2022<\/span><\/p>\r\n<p><span style=\"font-size: 16px;\">DOI: 10.1038\/s41598-021-97159-w<\/span><br><span style=\"font-size: 16px;\">URL\uff1a<a href=\"https:\/\/www.nature.com\/articles\/s41598-021-97159-w\">https:\/\/www.nature.com\/articles\/s41598-021-97159-w<\/a><\/span><br><br><span style=\"font-size: 16px;\">\"Laser slice thinning of GaN-on-GaN high electron mobility transistors\"<\/span><br><span style=\"font-size: 16px;\">Atsushi Tanaka, Ryuji Sugiura, Daisuke Kawaguchi, Yotaro Wani, Hirotaka Watanabe, Hadi Sena, Yuto Ando, Yoshio Honda, Yasunori Igasaki, Akio Wakejima, Yuji Ando, Hiroshi Amano<\/span><\/p>\r\n<p><span style=\"font-size: 16px;\">Scientific Reports, May 31, 2022<\/span><\/p>\r\n<p><span style=\"font-size: 16px;\">DOI: 10.1038\/s41598-022-10610-4<\/span><br><span style=\"font-size: 16px;\">URL\uff1a<a href=\"https:\/\/www.nature.com\/articles\/s41598-022-10610-4\">https:\/\/www.nature.com\/articles\/s41598-022-10610-4<\/a><\/span><br><span style=\"font-size: 16px;\"><br><\/span><span style=\"font-size: 20px;\"><strong>Principal Investigator<\/strong><\/span><\/p>\r\n<p><a href=\"https:\/\/profs.provost.nagoya-u.ac.jp\/html\/100012124_en.html\">Designated Associate Professor Atsushi Tanaka,<br><\/a>Institute of Materials and Systems for Sustainability, Nagoya University<br><br><strong>Website for Amano Laboratory<\/strong><br><a href=\"http:\/\/www.semicond.nuee.nagoya-u.ac.jp\/english\/index.html\">http:\/\/www.semicond.nuee.nagoya-u.ac.jp\/english\/index.html<\/a><\/p>\r\n<p><br><a href=\"https:\/\/www.nagoya-u.ac.jp\/researchinfo\/result\/2022\/05\/gan-gan.html\" target=\"_blank\" rel=\"noopener\">Nagoya University Information Site<\/a><\/p>","protected":false},"excerpt":{"rendered":"<p>A research group led by Professor Hiroshi Amano and Associate Professor Atsushi Tanaka (specially appointed) o [&hellip;]<\/p>\n","protected":false},"author":3,"featured_media":4567,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[2],"tags":[],"class_list":["post-4566","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-research"],"acf":[],"aioseo_notices":[],"publishpress_future_action":{"enabled":false,"date":"2026-05-06 23:24:56","action":"change-status","newStatus":"draft","terms":[],"taxonomy":"category","extraData":[]},"publishpress_future_workflow_manual_trigger":{"enabledWorkflows":[]},"_links":{"self":[{"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/posts\/4566","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/comments?post=4566"}],"version-history":[{"count":29,"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/posts\/4566\/revisions"}],"predecessor-version":[{"id":5032,"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/posts\/4566\/revisions\/5032"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/media\/4567"}],"wp:attachment":[{"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/media?parent=4566"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/categories?post=4566"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/tags?post=4566"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}