{"id":10974,"date":"2025-12-09T08:30:08","date_gmt":"2025-12-08T23:30:08","guid":{"rendered":"https:\/\/www.imass.nagoya-u.ac.jp\/?p=10974"},"modified":"2025-12-10T14:45:35","modified_gmt":"2025-12-10T05:45:35","slug":"20251209","status":"publish","type":"post","link":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/research\/20251209.html","title":{"rendered":"<strong>AlN\u57fa\u677f\u4e0aAlN\/GaN\/AlN \u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3067\u9ad8\u8010\u5727\u30fb\u4f4e\u62b5\u6297\u30fb\u96fb\u6d41\u4e0d\u5b89\u5b9a\u6027\u89e3\u6d88\u3092\u5b9f\u8a3c<\/strong><br\/><small>\uff5e\u901a\u4fe1\u30fb\u30ec\u30fc\u30c0\u30fc\u5411\u3051\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u5411\u4e0a\u306b\u671f\u5f85\uff5e<\/small>"},"content":{"rendered":"<p><a href=\"https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/12\/20251209_imass.png\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/12\/20251209_imass.png\" alt=\"\" width=\"1600\" height=\"900\" class=\"aligncenter size-full wp-image-10976\" srcset=\"https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/12\/20251209_imass.png 1600w, https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/12\/20251209_imass-300x169.png 300w, https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/12\/20251209_imass-1024x576.png 1024w, https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/12\/20251209_imass-768x432.png 768w, https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/12\/20251209_imass-1536x864.png 1536w\" sizes=\"auto, (max-width: 1600px) 100vw, 1600px\" \/><\/a><\/p>\r\n<section class=\"e-box\"><a id=\"back01\"><\/a>\r\n<p><span style=\"font-size: 20px; font-weight: bold;\">\u300a\u672c\u7814\u7a76\u306e\u30dd\u30a4\u30f3\u30c8\u300b<\/span><\/p>\r\n<hr style=\"margin-bottom: 16px;\" \/>\r\n<div style=\"padding: 30px 30px 30px 54px; margin-bottom: 30px; border: 1px solid #333399; border-radius: 10px; background-color: #fafdff; font-size: 20px;\">\r\n<ul style=\"list-style-type: disc;\">\r\n<li>\u91cf\u7523\u6027\u306b\u512a\u308c\u305f<a href=\"#note01\">MOVPE\u6cd5<\/a><sup>\u6ce81) <\/sup>\u306b\u3088\u308a\u3001\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08AlN\uff09\u57fa\u677f\u4e0a\u306b<a href=\"#note02\">\u30b3\u30d2\u30fc\u30ec\u30f3\u30c8\u6210\u9577<\/a><sup>\u6ce82) <\/sup>\u3055\u305b\u305fAlN\/GaN\/AlN <a href=\"#note03\">\u9ad8\u96fb\u5b50\u79fb\u52d5\u5ea6\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf(HEMT)<\/a><sup>\u6ce83) <\/sup>\u3092\u5b9f\u73fe\u3002<\/li>\r\n<li>\u5f93\u6765\u306eGaN HEMT\u3068\u6bd4\u3079\u3001\u540c\u7b49\u6c34\u6e96\u306e\u62b5\u6297\u5024\u3092\u5b9f\u73fe\u3057\u3064\u3064\u30012\u500d\u4ee5\u4e0a\u306e\u8010\u5727\u6027\u80fd\u3092\u9054\u6210\u3002<\/li>\r\n<li>\u5f93\u6765\u306eGaN HEMT\u3067\u8ab2\u984c\u3060\u3063\u305f<a href=\"#note04\">\u96fb\u6d41\u30b3\u30e9\u30d7\u30b9<\/a><sup>\u6ce84) <\/sup>\u3092\u6291\u3048\u3001\u5b89\u5b9a\u52d5\u4f5c\u3092\u5b9f\u73fe\u3002<\/li>\r\n<li>Crystal IS\u306e\u9ad8\u54c1\u8ceaAlN\u5358\u7d50\u6676\u57fa\u677f\u3001\u65ed\u5316\u6210\u3068\u540d\u53e4\u5c4b\u5927\u5b66\u306b\u3088\u308a\u958b\u767a\u3057\u305f\u9769\u65b0\u7684\u7d50\u6676\u6210\u9577\u6280\u8853\u3001\u305d\u3057\u3066<span style=\"color: #0e0ead;\"><a href=\"https:\/\/www.c-tefs.imass.nagoya-u.ac.jp\/\" style=\"color: #0e0ead;\">\u540d\u53e4\u5c4b\u5927\u5b66 \u30a8\u30cd\u30eb\u30ae\u30fc\u5909\u63db\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u5b9f\u9a13\u65bd\u8a2d\uff08C-TEFs\uff09<\/a><\/span>\u306e\u5148\u7aef\u30c7\u30d0\u30a4\u30b9\u8a66\u4f5c\u74b0\u5883\u306e\u878d\u5408\u306b\u3088\u308a\u3001\u7523\u5b66\u9023\u643a\u3067\u30d6\u30ec\u30fc\u30af\u30b9\u30eb\u30fc\u3092\u5b9f\u73fe\u3002<\/li>\r\n<\/ul>\r\n<\/div>\r\n<\/section>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"font-size: 20px; font-weight: bold;\">\u3010\u7814\u7a76\u6982\u8981\u3011<\/span><\/p>\r\n<hr \/>\r\n<section class=\"e-box\"><a id=\"back02\"><\/a>\r\n<p><span style=\"font-size: 16px;\">\u3000\u540d\u53e4\u5c4b\u5927\u5b66\u672a\u6765\u6750\u6599\u30fb\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240\u306e<span style=\"color: #0e0ead;\"><a href=\"https:\/\/profs.provost.nagoya-u.ac.jp\/html\/100009776_ja.html\" target=\"_blank\" style=\"color: #0e0ead;\" rel=\"noopener\">\u9808\u7530 \u6df3 \u6559\u6388<\/a><\/span>\u3001<a href=\"https:\/\/profs.provost.nagoya-u.ac.jp\/html\/100001778_ja.html\" target=\"_blank\" style=\"color: #3d20d2;\" rel=\"noopener\">\u5929\u91ce \u6d69 \u6559\u6388<\/a>\u3089\u3068\u65ed\u5316\u6210\u682a\u5f0f\u4f1a\u793e\u306e\u7814\u7a76\u30b0\u30eb\u30fc\u30d7\u306f\u3001<u>\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08AlN\uff09\u57fa\u677f\u4e0a\u306b\u30b3\u30d2\u30fc\u30ec\u30f3\u30c8\u6210\u9577\u3055\u305b\u305fAlN\/GaN\/AlN \u9ad8\u96fb\u5b50\u79fb\u52d5\u5ea6\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf(HEMT) \u3092\u5b9f\u73fe\u3057\u3001\u5f93\u6765\u306eGaN HEMT\u3068\u6bd4\u30792\u500d\u4ee5\u4e0a\u306e\u8010\u5727\u6027\u80fd\u3001\u4f4e\u62b5\u6297\u5316\u3001\u305d\u3057\u3066\u96fb\u6d41\u30b3\u30e9\u30d7\u30b9\u306e\u6291\u5236\u3092\u5b9f\u8a3c\u3057\u307e\u3057\u305f\u3002\u672c\u6210\u679c\u306f\u3001\u901a\u4fe1\u30fb\u30ec\u30fc\u30c0\u30fc\u5411\u3051<a href=\"#note05\">\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9<\/a><sup>\u6ce85) <\/sup>\u306e\u98db\u8e8d\u7684\u306a\u6027\u80fd\u5411\u4e0a\u306b\u76f4\u7d50\u3059\u308b\u91cd\u8981\u306a\u30d6\u30ec\u30fc\u30af\u30b9\u30eb\u30fc<\/u>\u3067\u3059\u3002<\/span><\/p>\r\n<a id=\"back03\"><\/a>\r\n<p><span style=\"font-size: 16px;\">\u3000AlN\u306f\u3001<a href=\"#note06\">\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53<\/a><sup>\u6ce86) <\/sup>\u3068\u3057\u3066\u77e5\u3089\u308c\u308b\u30b7\u30ea\u30b3\u30f3\u30ab\u30fc\u30d0\u30a4\u30c9\uff08SiC\uff09\u3084\u7a92\u5316\u30ac\u30ea\u30a6\u30e0\uff08GaN\uff09\u3088\u308a\u3082\u5e83\u3044\u7d046 eV\u306e\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u3092\u6301\u3064<a href=\"#note07\">\u30a6\u30eb\u30c8\u30e9\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53<\/a><sup>\u6ce87) <\/sup>\u3067\u3042\u308a\u3001\u9ad8\u3044\u7d76\u7e01\u7834\u58ca\u96fb\u754c\u3068\u512a\u308c\u305f\u71b1\u4f1d\u5c0e\u7387\u3092\u517c\u306d\u5099\u3048\u3066\u3044\u307e\u3059\u3002\u307e\u305f\u3001GaN\u3068\u306e<a href=\"#note08\">\u683c\u5b50\u5b9a\u6570<\/a><sup>\u6ce88) <\/sup>\u306e\u305a\u308c\u304c\u5c0f\u3055\u304f\u3001GaN\/AlN\u754c\u9762\u306e\u71b1\u62b5\u6297\u304c\u5c0f\u3055\u3044\u305f\u3081\u3001GaN\u30c7\u30d0\u30a4\u30b9\u3068\u306e\u76f8\u6027\u304c\u826f\u304f\u3001\u6b21\u4e16\u4ee3\u306e\u9ad8\u5468\u6ce2\u30fb\u9ad8\u51fa\u529b\u30c7\u30d0\u30a4\u30b9\u6750\u6599\u3068\u3057\u3066\u6ce8\u76ee\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u672c\u7814\u7a76\u30b0\u30eb\u30fc\u30d7\u306f\u3053\u308c\u307e\u3067\u300120 nm\u306eGaN\u3092AlN\u4e0a\u306b\u30b3\u30d2\u30fc\u30ec\u30f3\u30c8\u6210\u9577\u3055\u305b\u308b\u9769\u65b0\u7684\u306a\u7d50\u6676\u6210\u9577\u6761\u4ef6\u3092\u898b\u51fa\u3057\u3001\u4e16\u754c\u3067\u521d\u3081\u3066\u6709\u6a5f\u91d1\u5c5e\u6c17\u76f8\u6210\u9577\uff08MOVPE\uff09\u6cd5\u306b\u3088\u308aAlN(9 nm)\/GaN(12 nm)\/AlN HEMT\u3092\u5b9f\u73fe\u3057\u307e\u3057\u305f\u3002<\/span><\/p>\r\n<p><span style=\"font-size: 16px;\">\u3000\u672c\u7814\u7a76\u3067\u306f\u3001\u7d50\u6676\u6210\u9577\u6761\u4ef6\u3068\u30c7\u30d0\u30a4\u30b9\u30d7\u30ed\u30bb\u30b9\u306e\u6539\u5584\u306b\u3088\u308a\u3001\u5f53\u521d\u9ad8\u304b\u3063\u305f\u30c7\u30d0\u30a4\u30b9\u306e\u62b5\u6297\u3092\u4e8c\u6841\u4f4e\u6e1b\u3057\u3001\u5f93\u6765\u306eGaN HEMT\u3068\u540c\u7b49\u6c34\u6e96\u306e\u62b5\u6297\u5024\u3092\u5b9f\u73fe\u3057\u307e\u3057\u305f\u3002\u307e\u305f\u3001\u5f93\u6765\u69cb\u9020\u306b\u6bd4\u3079\u30662\u500d\u4ee5\u4e0a\u306e\u8010\u5727\u6027\u80fd\u3092\u3082\u3064\u3053\u3068\u3092\u5b9f\u8a3c\u3057\u3001AlN\/GaN\/AlN\u69cb\u9020\u306e\u9ad8\u3044\u30dd\u30c6\u30f3\u30b7\u30e3\u30eb\u3092\u793a\u3057\u307e\u3057\u305f\u3002\u52a0\u3048\u3066\u3001\u5f93\u6765\u306eGaN HEMT\u3067\u8ab2\u984c\u3068\u306a\u3063\u3066\u3044\u305f\u96fb\u6d41\u30b3\u30e9\u30d7\u30b9\u3092\u6291\u5236\u3057\u3001\u5b89\u5b9a\u52d5\u4f5c\u3092\u53ef\u80fd\u306b\u3057\u307e\u3057\u305f\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u9ad8\u5468\u6ce2\u30fb\u9ad8\u51fa\u529b\u30c7\u30d0\u30a4\u30b9\u306e\u5b9f\u73fe\u306b\u5927\u304d\u304f\u524d\u9032\u3057\u307e\u3057\u305f\u3002\u672c\u6210\u679c\u306f\u3001\u6b21\u4e16\u4ee3\u306e\u901a\u4fe1\u3084\u30ec\u30fc\u30c0\u30fc\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u9ad8\u5468\u6ce2\u30fb\u9ad8\u51fa\u529b\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u5411\u4e0a\u306b\u5927\u304d\u304f\u8ca2\u732e\u3059\u308b\u3053\u3068\u304c\u671f\u5f85\u3055\u308c\u307e\u3059\u3002<\/span><\/p>\r\n<a id=\"back04\"><\/a>\r\n<p><span style=\"font-size: 16px;\">\u3000\u672c\u7814\u7a76\u6210\u679c\u306f\u3001\u672c\u5b66\u672a\u6765\u6750\u6599\u30fb\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240 \u65ed\u5316\u6210\u6b21\u4e16\u4ee3\u30c7\u30d0\u30a4\u30b9\u7523\u5b66\u5354\u540c\u7814\u7a76\u90e8\u9580\u306e<a href=\"https:\/\/profs.provost.nagoya-u.ac.jp\/html\/100014311_ja.html#\"><a style=\"color: #3d20d2;\" >\u674e \u592a\u8d77\uff08\u30ea \u30c6\u30ae\uff09\u7279\u4efb\u52a9\u6559<\/a><\/a>\u306b\u3088\u308a2025\u5e7412\u67088\u65e5\u306b\u4e16\u754c\u30c8\u30c3\u30d7\u30af\u30e9\u30b9\u306e\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306b\u95a2\u3059\u308b\u56fd\u969b\u4f1a\u8b70(International Electron Device Meeting, <a href=\"#note09\">IEDM<\/a><sup>\u6ce89) <\/sup>, \u7c73\u56fd\u30b5\u30f3\u30d5\u30e9\u30f3\u30b7\u30b9\u30b3\u958b\u50ac)\u3067\u767a\u8868\u3055\u308c\u307e\u3057\u305f\u3002<\/span><\/p>\r\n<\/section>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"font-size: 20px; font-weight: bold;\">\u3010\u7814\u7a76\u80cc\u666f\u3068\u5185\u5bb9\u3011<\/span><\/p>\r\n<hr \/>\r\n<section class=\"e-box\">\r\n<p><span style=\"font-size: 16px;\">\u3000\u6b21\u4e16\u4ee3\u306e\u901a\u4fe1\u30b7\u30b9\u30c6\u30e0\u3084\u30ec\u30fc\u30c0\u30fc\u88c5\u7f6e\u3067\u306f\u3001\u3088\u308a\u9ad8\u3044\u5468\u6ce2\u6570\u3067\u5927\u304d\u306a\u96fb\u529b\u3092\u6271\u3048\u308b\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u304c\u6c42\u3081\u3089\u308c\u3066\u3044\u307e\u3059\u3002\u3053\u306e\u3088\u3046\u306a\u7528\u9014\u3067\u306f\u3001\u5e83\u304f\u5229\u7528\u3055\u308c\u3066\u3044\u308b\u30b7\u30ea\u30b3\u30f3\uff08Si\uff09\u3084\u30ac\u30ea\u30a6\u30e0\u30d2\u7d20\uff08GaAs\uff09\u306b\u6bd4\u3079\u3001\u9ad8\u51fa\u529b\u5316\u306b\u5bfe\u5fdc\u3067\u304d\u308b\u7a92\u5316\u30ac\u30ea\u30a6\u30e0\uff08GaN\uff09\u3092\u7528\u3044\u305f\u9ad8\u96fb\u5b50\u79fb\u52d5\u5ea6\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\uff08HEMT\uff09\u306e\u5b9f\u7528\u5316\u304c\u9032\u3093\u3067\u3044\u307e\u3059\u3002\u3057\u304b\u3057\u3001\u5f93\u6765\u306eAlGaN\/GaN HEMT\u3067\u306f\u3001\u8010\u5727\u3084\u653e\u71b1\u6027\u306e\u5236\u7d04\u3001\u52d5\u4f5c\u6642\u306e\u96fb\u6d41\u4e0d\u5b89\u5b9a\u6027\uff08\u96fb\u6d41\u30b3\u30e9\u30d7\u30b9\uff09\u3068\u3044\u3063\u305f\u8ab2\u984c\u304c\u3042\u308a\u307e\u3057\u305f\u3002<\/span><\/p>\r\n<p><span style=\"font-size: 16px;\">\u3000\u3053\u308c\u3089\u3092\u89e3\u6c7a\u3059\u308b\u9375\u3068\u306a\u308b\u306e\u304c\u3001\u30a6\u30eb\u30c8\u30e9\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u3067\u3042\u308b\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08AlN\uff09\u3067\u3059\u3002AlN\u306f\u7d046 eV\u306e\u5e83\u3044\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u3001\u9ad8\u3044\u7d76\u7e01\u7834\u58ca\u96fb\u754c\u3001\u512a\u308c\u305f\u71b1\u4f1d\u5c0e\u7387\u3092\u6301\u3061\u3001GaN\u3068\u306e\u683c\u5b50\u6574\u5408\u6027\u3082\u826f\u597d\u3067\u3059\uff08\u56f31\uff09\u3002\u672c\u7814\u7a76\u3067\u306fAlN\u5358\u7d50\u6676\u57fa\u677f\u4e0a\u306b\u30b3\u30d2\u30fc\u30ec\u30f3\u30c8\u6210\u9577\u3055\u305b\u305fAlN\/GaN\/AlN HEMT\u306e\u53ef\u80fd\u6027\u3092\u5b9f\u8a3c\u3057\u3001\u6b21\u4e16\u4ee3\u9ad8\u5468\u6ce2\u30fb\u9ad8\u51fa\u529b\u30c7\u30d0\u30a4\u30b9\u3078\u306e\u65b0\u3057\u3044\u8a2d\u8a08\u6307\u91dd\u3092\u63d0\u793a\u3057\u307e\u3059\u3002<\/span><\/p>\r\n<p><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/12\/20251209_suda1.jpg\" width=\"980\" height=\"551\" class=\"aligncenter size-full\" \/><\/p>\r\n<p style=\"text-align: center;\"><span style=\"font-size: 14px;\"><b>\u56f3\uff11\uff1a<\/b>\uff08\u5de6\uff09Si\u3001SiC\u3001GaN\u3001AlN\u306e\u6750\u6599\u7279\u6027\u6bd4\u8f03\u3002\uff08\u53f3\uff09\u5358\u7d50\u6676AlN\u57fa\u677f\u4e0a\u306b\u30b3\u30d2\u30fc\u30ec\u30f3\u30c8\u6210\u9577\u3055\u305b\u305fAlN\/GaN\/AlN HEMT\u306e\u6a21\u5f0f\u56f3\u3002<\/span><\/p>\r\n<\/section>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"font-size: 20px; font-weight: bold;\">\u3010\u7814\u7a76\u6210\u679c\u3011<\/span><\/p>\r\n<hr \/>\r\n<section class=\"e-box\">\r\n<p><span style=\"font-size: 16px;\">\u3000\u672c\u7814\u7a76\u3067\u306f\u3001GaN\u6210\u9577\u6642\u306eGa\u539f\u6599\u3092\u5909\u3048\u308b\u3053\u3068\u3067\u7d50\u6676\u4e2d\u306e\u70ad\u7d20\u4e0d\u7d14\u7269\u3092\u5927\u5e45\u306b\u4f4e\u6e1b\u3057\u3001\u30b7\u30fc\u30c8\u62b5\u6297\u30922000 \u03a9\/sq\u304b\u3089507 \u03a9\/sq\u3078\u7d044\u5206\u306e1\u306b\u4f4e\u6e1b\u3057\u307e\u3057\u305f\u3002\u3055\u3089\u306b\u3001AlN\u30d0\u30ea\u30a2\u5c64\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u5de5\u7a0b\u3092\u5c0e\u5165\u3059\u308b\u3053\u3068\u3067\u3001\u30b3\u30f3\u30bf\u30af\u30c8\u62b5\u6297\u309264 \u03a9mm\u304b\u30892.4 \u03a9mm\u3078\u7d0425\u5206\u306e1\u306b\u4f4e\u6e1b\u3057\u307e\u3057\u305f\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u7279\u6027\u30aa\u30f3\u62b5\u6297\u306f2\u6841\u4f4e\u6e1b\u3057\u3001\u5f93\u6765\u306eAlGaN\/GaN HEMT\u3068\u540c\u7b49\u6c34\u6e96\u306b\u5230\u9054\u3057\u307e\u3057\u305f\uff08\u56f32 (a)\uff09\u3002\u307e\u305f\u3001\u8010\u5727\u6027\u80fd\u306e\u6307\u6a19\u3067\u3042\u308b\u7d76\u7e01\u7834\u58ca\u96fb\u754c\u306f\u6700\u59272 MV\/cm\u3092\u8a18\u9332\u3057\u3001\u5f93\u6765\u306eAlGaN\/GaN HEMT\u306e\u5024\uff081 MV\/cm\u4ee5\u4e0b\uff09\u306e2\u500d\u4ee5\u4e0a\u3092\u9054\u6210\u3057\u307e\u3057\u305f\uff08\u56f32 (b)\uff09\u3002<\/span><\/p>\r\n<p><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/12\/20251209_suda2.jpg\" width=\"741\" height=\"337\" class=\"aligncenter size-full\" \/><\/p>\r\n<p style=\"text-align: center;\"><span style=\"font-size: 14px;\"><b>\u56f3\uff12\uff1a<\/b> (a)\u7d76\u7e01\u7834\u58ca\u96fb\u5727\u3068\u30c7\u30d0\u30a4\u30b9\u306e\u7279\u6027\u30aa\u30f3\u62b5\u6297\u306e\u95a2\u4fc2\u3002 (b)\u30b2\u30fc\u30c8\u30c9\u30ec\u30a4\u30f3\u9593\u8ddd\u96e2\u3068\u7d76\u7e01\u7834\u58ca\u96fb\u5727\u306e\u95a2\u4fc2\u3002<\/span><\/p>\r\n<p><span style=\"font-size: 16px;\">\u3000\u8868\u9762\u4fdd\u8b77\u819c\u306e\u5c0e\u5165\u306b\u3088\u308a\u96fb\u6d41\u30b3\u30e9\u30d7\u30b9\u304c\u5b8c\u5168\u306b\u6291\u5236\u3055\u308c\u3001\u8868\u9762\u6b20\u9665\u306e\u5f71\u97ff\u304c\u4f4e\u6e1b\u3055\u308c\u3066\u3044\u308b\u3053\u3068\u304c\u78ba\u8a8d\u3055\u308c\u307e\u3057\u305f(\u56f33)\u3002\u96fb\u6d41\u30b3\u30e9\u30d7\u30b9\u306f\u7d50\u6676\u5185\u90e8\u306e\u6b20\u9665\u306b\u3082\u8d77\u56e0\u3059\u308b\u305f\u3081\u3001\u3053\u306e\u7d50\u679c\u306fAlN\u57fa\u677f\u4e0a\u306eAlN\/GaN\/AlN\u69cb\u9020\u304c\u6975\u3081\u3066\u9ad8\u3044\u7d50\u6676\u54c1\u8cea\u3092\u6709\u3059\u308b\u3053\u3068\u3092\u793a\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u6210\u679c\u306f\u3001\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9\u306e\u9ad8\u6027\u80fd\u5316\u306b\u5411\u3051\u305f\u91cd\u8981\u306a\u30d6\u30ec\u30fc\u30af\u30b9\u30eb\u30fc\u3067\u3059\u3002<\/span><\/p>\r\n<p><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/12\/20251209_suda3.jpg\" width=\"785\" height=\"329\" class=\"aligncenter size-full\" \/><\/p>\r\n<p style=\"text-align: center;\"><span style=\"font-size: 14px;\"><b>\u56f3\uff13\uff1a<\/b>\u96fb\u6d41\u30b3\u30e9\u30d7\u30b9\u3092\u8a55\u4fa1\u3059\u308b\u305f\u3081\u306b\u884c\u3063\u305f\u30d1\u30eb\u30b9I-V\u6e2c\u5b9a\u306e\u7d50\u679c\u3002\u30d1\u30eb\u30b9\u5e4510\u03bcs, \u30d1\u30eb\u30b9\u5468\u671f1 ms\u306e\u6761\u4ef6\u3067\u6e2c\u5b9a\u3002\u30ce\u30f3\u30b9\u30c8\u30ec\u30b9\u6761\u4ef6\uff080V, 0V\uff09\u3068\u30b9\u30c8\u30ec\u30b9\u5370\u52a0\u6761\u4ef6(-10V. 40V)\u306e\u7d50\u679c\u304c\u4e00\u81f4\u3057\u3066\u3044\u308b\u3053\u3068\u304b\u3089\u3001\u96fb\u6d41\u30b3\u30e9\u30d7\u30b9\u3092\u5b8c\u5168\u306b\u6291\u5236\u3067\u304d\u3066\u3044\u308b\u3053\u3068\u304c\u5206\u304b\u308b\u3002<\/span><\/p>\r\n<\/section>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"font-size: 20px; font-weight: bold;\">\u3010\u6210\u679c\u306e\u610f\u7fa9\u3011<\/span><\/p>\r\n<hr \/>\r\n<section class=\"e-box\">\r\n<p><span style=\"font-size: 16px;\">\u3000\u672c\u7814\u7a76\u3067\u306f\u3001AlN\/GaN\/AlN HEMT\u306e\u6700\u91cd\u8981\u8ab2\u984c\u3067\u3042\u3063\u305f\u4f4e\u62b5\u6297\u5316\u306b\u6210\u529f\u3057\u3001\u5b9f\u7528\u5316\u306b\u5411\u3051\u305f\u5927\u304d\u306a\u4e00\u6b69\u3092\u8e0f\u307f\u51fa\u3057\u307e\u3057\u305f\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u5f93\u6765\u306eAlGaN\/GaN HEMT\u3092\u8d85\u3048\u308b\u9ad8\u6027\u80fd\u5316\u304c\u73fe\u5b9f\u5473\u3092\u5e2f\u3073\u3001\u6b21\u4e16\u4ee3\u901a\u4fe1\u3084\u30ec\u30fc\u30c0\u30fc\u6280\u8853\u306e\u9769\u65b0\u306b\u76f4\u7d50\u3059\u308b\u6210\u679c\u3068\u306a\u308a\u307e\u3057\u305f\u3002\u307e\u305f\u3001\u8010\u5727\u3068\u96fb\u6d41\u30b3\u30e9\u30d7\u30b9\u306e\u4e21\u9762\u3067\u3001\u5f93\u6765\u69cb\u9020\u306e\u7279\u6027\u3092\u51cc\u99d5\u3059\u308b\u7d50\u679c\u304c\u5f97\u3089\u308c\u305f\u306e\u306f\u3001\u9ad8\u5468\u6ce2\u30fb\u9ad8\u51fa\u529b\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u5411\u4e0a\u306b\u76f4\u7d50\u3059\u308b\u6975\u3081\u3066\u91cd\u8981\u306a\u6210\u679c\u3067\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u30016G\u901a\u4fe1\u3084\u885b\u661f\u901a\u4fe1\u30fb\u9ad8\u6027\u80fd\u30ec\u30fc\u30c0\u30fc\u306a\u3069\u306e\u5148\u7aef\u6280\u8853\u306e\u5b9f\u73fe\u3092\u5927\u304d\u304f\u524d\u9032\u3057\u307e\u3059\u3002<\/span><\/p>\r\n<p><span style=\"font-size: 16px;\">\u3000\u3055\u3089\u306b\u3001\u4eca\u56de\u306e\u6210\u679c\u306f\u300c\u4e16\u754c\u3067\u521d\u3081\u3066MOVPE\u6cd5\u3067\u5b9f\u8a3c\u3067\u304d\u305f\u300d\u3068\u3044\u3046\u70b9\u3067\u975e\u5e38\u306b\u5927\u304d\u306a\u610f\u5473\u3092\u6301\u3061\u307e\u3059\u3002\u9752\u8272LED\u304c\u91cf\u7523\u6027\u306b\u512a\u308c\u305fMOVPE\u6cd5\u3067\u5b9f\u73fe\u3057\u305f\u3053\u3068\u3067\u4e16\u754c\u306b\u666e\u53ca\u3057\u305f\u3088\u3046\u306b\u3001AlN\/GaN\/AlN HEMT\u3082MOVPE\u3067\u306e\u5b9f\u8a3c\u306b\u3088\u308a\u3001\u5e83\u304f\u7523\u696d\u754c\u306b\u666e\u53ca\u3059\u308b\u53ef\u80fd\u6027\u304c\u958b\u304b\u308c\u307e\u3057\u305f\u3002<\/span><\/p>\r\n<p><span style=\"font-size: 16px;\">\u3000\u672c\u7814\u7a76\u306f\u3001\u30a6\u30eb\u30c8\u30e9\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u3092\u6d3b\u7528\u3057\u305f\u6b21\u4e16\u4ee3\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9\u306e\u91cf\u7523\u5316\u306b\u5411\u3051\u305f\u91cd\u8981\u306a\u4e00\u6b69\u3067\u3042\u308a\u3001\u901a\u4fe1\u30fb\u30ec\u30fc\u30c0\u30fc\u5206\u91ce\u306e\u5fdc\u7528\u306b\u9769\u65b0\u3092\u3082\u305f\u3089\u3059\u3053\u3068\u304c\u671f\u5f85\u3055\u308c\u307e\u3059\u3002<\/span><\/p>\r\n<\/section>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"font-size: 20px; font-weight: bold;\">\u3010\u672c\u6210\u679c\u3092\u306a\u305c\u5b9f\u73fe\u3067\u304d\u305f\u304b\u3011<\/span><\/p>\r\n<hr \/>\r\n<section class=\"e-box\">\r\n<p><span style=\"font-size: 16px;\">\u3000\u4eca\u56de\u306e\u6210\u679c\u306f\u3001\u540d\u53e4\u5c4b\u5927\u5b66\u3068\u65ed\u5316\u6210\u306e\u7523\u5b66\u9023\u643a\u306b\u3088\u308b\u7dcf\u5408\u529b\u306e\u7d50\u6676\u3067\u3059\u3002\u9ad8\u54c1\u8cea\u306aAlN\u5358\u7d50\u6676\u57fa\u677f\u3001AlN\/GaN\/AlN\u8584\u819c\u306e\u6210\u9577\u3092\u53ef\u80fd\u306b\u3059\u308b\u7d50\u6676\u6210\u9577\u6280\u8853\u3001HEMT\u30c7\u30d0\u30a4\u30b9\u306e\u8a2d\u8a08\u30fb\u30d7\u30ed\u30bb\u30b9\u6280\u8853\u3001\u305d\u3057\u3066\u7cbe\u5bc6\u306a\u8a55\u4fa1\u6280\u8853\u3092\u7d71\u5408\u3059\u308b\u3053\u3068\u3067\u3001AlN\/GaN\/AlN HEMT\u306e\u5b9f\u8a3c\u306b\u6210\u529f\u3057\u307e\u3057\u305f\u3002\u3053\u306e\u80cc\u666f\u306b\u306f\u3001\u4e21\u8005\u304c\u9577\u5e74\u306b\u308f\u305f\u308a\u7a4d\u307f\u91cd\u306d\u3066\u304d\u305fAlN\u7cfb\u534a\u5c0e\u4f53\u7814\u7a76\u306e\u77e5\u898b\u3068\u3001\u540d\u53e4\u5c4b\u5927\u5b66\u304c\u4fdd\u6709\u3059\u308b\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u3084\u5148\u7aef\u8a55\u4fa1\u8a2d\u5099\uff08\u56f34\uff09\u3001\u65ed\u5316\u6210\u306e\u6750\u6599\u958b\u767a\u529b(\u56f35)\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u3046\u3057\u305f\u7523\u5b66\u9023\u643a\u306e\u5f37\u307f\u304c\u3001\u6b21\u4e16\u4ee3\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9\u306e\u5b9f\u73fe\u306b\u5411\u3051\u305f\u5927\u304d\u306a\u4e00\u6b69\u3092\u53ef\u80fd\u306b\u3057\u307e\u3057\u305f\u3002<\/span><\/p>\r\n<p><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/12\/20251209_suda4.jpg\" width=\"907\" height=\"301\" class=\"aligncenter size-full\" \/><\/p>\r\n<p style=\"text-align: center;\"><span style=\"font-size: 14px;\"><b>\u56f3\uff14\uff1a<\/b>\u540d\u53e4\u5c4b\u5927\u5b66\u672a\u6765\u6750\u6599\u30fb\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240\u306e<a href=\"https:\/\/www.c-tefs.imass.nagoya-u.ac.jp\/\"><span style=\"color: #0e0ead;\">\u30a8\u30cd\u30eb\u30ae\u30fc\u5909\u63db\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u5b9f\u9a13\u65bd\u8a2d\uff08C-TEFs\uff09<\/span><\/a>\u3002\u672c\u65bd\u8a2d\u306f\u3001GaN\u7814\u7a76\u306b\u304a\u3051\u308b\u7d50\u6676\u6210\u9577\u30fb\u30c7\u30d0\u30a4\u30b9\u30d7\u30ed\u30bb\u30b9\u30fb\u8a55\u4fa1\u3092\u540c\u4e00\u30b9\u30da\u30fc\u30b9\u3067\u884c\u3048\u308b\u7d041,000 m2\u306e\u5927\u7a7a\u9593\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u3092\u6709\u3057\u3066\u304a\u308a\u3001\u540d\u53e4\u5c4b\u5927\u5b66\u3068\u4f01\u696d\u30fb\u7814\u7a76\u6a5f\u95a2\u306e\u9023\u643a\u3092\u5f37\u5316\u3059\u308b\u5834\u3068\u306a\u3063\u3066\u3044\u308b\u3002<\/span><\/p>\r\n<p><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/12\/20251209_suda5.jpg\" width=\"759\" height=\"429\" class=\"aligncenter size-full\" \/><\/p>\r\n<p style=\"text-align: center;\"><span style=\"font-size: 14px;\"><b>\u56f3\uff15\uff1a<\/b>\u65ed\u5316\u6210\u3068Crystal\u3000IS\u306b\u3088\u308b\u5358\u7d50\u6676AlN\u57fa\u677f\u958b\u767a\u306e\u6b74\u53f2\u3002<\/span><\/p>\r\n<\/section>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"font-size: 20px; font-weight: bold;\">\u3010\u7528\u8a9e\u8aac\u660e\u3011<\/span><\/p>\r\n<hr \/>\r\n<p><a id=\"note01\"><\/a> <span style=\"color: #008000; font-weight: bold; font-size: 16px;\">\u6ce81) MOVPE\uff08Metalorganic vapor phase epitaxy\uff1b\u6709\u6a5f\u91d1\u5c5e\u6c17\u76f8\u6210\u9577\uff09 \u6cd5<\/span><br><span style=\"font-size: 16px;\">\u3000\u534a\u5c0e\u4f53\u7d50\u6676\u3092\u6210\u9577\u3055\u305b\u308b\u4ee3\u8868\u7684\u306a\u65b9\u6cd5\u306e\u4e00\u3064\u3002\u91d1\u5c5e\u6709\u6a5f\u5316\u5408\u7269\u3068\u30a2\u30f3\u30e2\u30cb\u30a2\u306a\u3069\u306e\u30ac\u30b9\u3092\u9ad8\u6e29\u3067\u53cd\u5fdc\u3055\u305b\u3001\u57fa\u677f\u4e0a\u306b\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u3002\u5927\u91cf\u751f\u7523\u306b\u9069\u3057\u3066\u304a\u308a\u3001LED\u3084\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u306e\u88fd\u9020\u306b\u5e83\u304f\u4f7f\u308f\u308c\u3066\u3044\u308b\u3002<\/span> <span style=\"font-size: 14px;\"><a href=\"#back01\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><a id=\"note02\"><\/a> <span style=\"color: #008000; font-weight: bold; font-size: 16px;\">\u6ce82) \u30b3\u30d2\u30fc\u30ec\u30f3\u30c8\u6210\u9577<\/span><br><span style=\"font-size: 16px;\">\u3000\u7570\u306a\u308b\u6750\u6599\u3092\u7a4d\u5c64\u3059\u308b\u969b\u306b\u3001\u9762\u5185\u65b9\u5411\u306e\u683c\u5b50\u5b9a\u6570\u304c\u4e00\u81f4\u3057\u305f\u72b6\u614b\u3067\u6210\u9577\u3057\u3066\u3044\u308b\u3053\u3068\u3092\u6307\u3059\u3002\u5177\u4f53\u7684\u306b\u306f\u3001\u4e0b\u5730\u5c64\u3068\u6210\u9577\u5c64\u306e\u683c\u5b50\u5b9a\u6570\u306b\u308f\u305a\u304b\u306a\u5dee\u304c\u3042\u3063\u3066\u3082\u3001\u6210\u9577\u521d\u671f\u3067\u306f\u6210\u9577\u5c64\u304c\u4e0b\u5730\u5c64\u306e\u7d50\u6676\u683c\u5b50\u306b\u5408\u308f\u305b\u3066\u6b6a\u307f\u3001\u8ee2\u4f4d\u306a\u3069\u306e\u6b20\u9665\u304c\u5f62\u6210\u3055\u308c\u305a\u306b\u6210\u9577\u3059\u308b\u72b6\u614b\u3067\u3042\u308b\u3002\u305f\u3060\u3057\u3001\u6210\u9577\u5c64\u306e\u539a\u307f\u304c\u5897\u3059\u3068\u6b6a\u307f\u30a8\u30cd\u30eb\u30ae\u30fc\u304c\u84c4\u7a4d\u3057\u3001\u81e8\u754c\u539a\u3092\u8d85\u3048\u308b\u3068\u30b3\u30d2\u30fc\u30ec\u30f3\u30c8\u6210\u9577\u306f\u7dad\u6301\u3067\u304d\u306a\u304f\u306a\u308b\u3002\u3053\u306e\u305f\u3081\u3001\u30b3\u30d2\u30fc\u30ec\u30f3\u30c8\u6210\u9577\u306f\u300c\u6b6a\u307f\u3092\u4fdd\u6301\u3057\u305f\u307e\u307e\u683c\u5b50\u6574\u5408\u3092\u7dad\u6301\u3059\u308b\u6210\u9577\u30e2\u30fc\u30c9\u300d\u3068\u7406\u89e3\u3055\u308c\u308b\u3002<\/span> <span style=\"font-size: 14px;\"><a href=\"#back01\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><a id=\"note03\"><\/a> <span style=\"color: #008000; font-weight: bold; font-size: 16px;\">\u6ce83) \u9ad8\u96fb\u5b50\u79fb\u52d5\u5ea6\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\uff08HEMT\uff09<\/span><br><span style=\"font-size: 16px;\">\u3000\u7570\u306a\u308b\u534a\u5c0e\u4f53\u6750\u6599\u3092\u7d44\u307f\u5408\u308f\u305b\u3066\u754c\u9762\u306b\u4e8c\u6b21\u5143\u96fb\u5b50\u30ac\u30b9\uff082DEG\uff09\u3092\u5f62\u6210\u3057\u3001\u96fb\u5b50\u304c\u9ad8\u901f\u306b\u79fb\u52d5\u3067\u304d\u308b\u3088\u3046\u306b\u3057\u305f\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3002\u3053\u306e\u69cb\u9020\u306b\u7a92\u5316\u30ac\u30ea\u30a6\u30e0\uff08GaN\uff09\u3092\u7528\u3044\u305fGaN HEMT\u306f\u3001GaN\u306e\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u7279\u6027\u306b\u3088\u308a\u9ad8\u8010\u5727\u30fb\u9ad8\u51fa\u529b\u30fb\u9ad8\u6e29\u52d5\u4f5c\u304c\u53ef\u80fd\u3067\u3042\u308b\u3002\u3055\u3089\u306bGaN HEMT\u3067\u306f\u3001AlGaN\u3084AlN\u306a\u3069\u306e\u30d0\u30ea\u30a2\u5c64\u3068\u306e\u9593\u3067\u81ea\u7136\u306b\u767a\u751f\u3059\u308b\u5206\u6975\u52b9\u679c\u306b\u3088\u3063\u3066\u96fb\u5b50\u304c\u96c6\u307e\u308a\u30012DEG\u304c\u5f62\u6210\u3055\u308c\u308b\u305f\u3081\u3001\u4e0d\u7d14\u7269\u30c9\u30fc\u30d4\u30f3\u30b0\u304c\u4e0d\u8981\u3067\u3042\u308b\u3002AlGaN\u30d0\u30ea\u30a2\u306eAl\u7d44\u6210\u304c\u9ad8\u3044\u307b\u3069\u5206\u6975\u52b9\u679c\u304c\u5f37\u304f\u306a\u308b\u305f\u3081\u3001AlN\u30d0\u30ea\u30a2\u3067\u306f\u5206\u6975\u52b9\u679c\u304c\u6700\u5927\u3068\u306a\u308a\u9ad8\u5bc6\u5ea6\u306e2DEG\u304c\u5f62\u6210\u3055\u308c\u308b\u3002<\/span> <span style=\"font-size: 14px;\"><a href=\"#back02\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><a id=\"note04\"><\/a> <span style=\"color: #008000; font-weight: bold; font-size: 16px;\">\u6ce84) \u96fb\u6d41\u30b3\u30e9\u30d7\u30b9<\/span><br><span style=\"font-size: 16px;\">\u3000HEMT\u306a\u3069\u306e\u9ad8\u5468\u6ce2\u30fb\u9ad8\u96fb\u5727\u30c7\u30d0\u30a4\u30b9\u3067\u3001\u30aa\u30d5\u72b6\u614b\u304b\u3089\u30aa\u30f3\u72b6\u614b\u306b\u5207\u308a\u66ff\u3048\u305f\u969b\u306b\u3001\u672c\u6765\u306f\u6d41\u308c\u308b\u306f\u305a\u306e\u96fb\u6d41\u304c\u4e00\u6642\u7684\u306b\u5927\u304d\u304f\u6e1b\u5c11\u3059\u308b\u73fe\u8c61\u3002\u3053\u306e\u73fe\u8c61\u306f\u30b9\u30a4\u30c3\u30c1\u30f3\u30b0\u52d5\u4f5c\u306b\u304a\u3051\u308b\u6027\u80fd\u4f4e\u4e0b\u306e\u4e3b\u306a\u8981\u56e0\u3067\u3042\u308a\u3001\u51fa\u529b\u96fb\u529b\u3084\u52b9\u7387\u306b\u60aa\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u3002\u7279\u306bGaN\u7cfbHEMT\u3067\u306f\u3001\u8868\u9762\u6b20\u9665\u3084\u754c\u9762\u6b20\u9665\u3001\u7d50\u6676\u5185\u90e8\u306e\u6b20\u9665\u306b\u96fb\u8377\u304c\u30c8\u30e9\u30c3\u30d7\u3055\u308c\u308b\u3053\u3068\u304c\u539f\u56e0\u3068\u306a\u308b\u3002\u3053\u306e\u554f\u984c\u3092\u6291\u3048\u308b\u305f\u3081\u306b\u306f\u3001\u8868\u9762\u4fdd\u8b77\u819c\u306e\u958b\u767a\u3084\u30c7\u30d0\u30a4\u30b9\u30d7\u30ed\u30bb\u30b9\u6539\u5584\u3001\u7d50\u6676\u54c1\u8cea\u306e\u5411\u4e0a\u304c\u91cd\u8981\u3067\u3042\u308b\u3002<\/span> <span style=\"font-size: 14px;\"><a href=\"#back01\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><a id=\"note05\"><\/a> <span style=\"color: #008000; font-weight: bold; font-size: 16px;\">\u6ce85) \u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9<\/span><br><span style=\"font-size: 16px;\">\u3000\u30de\u30a4\u30af\u30ed\u6ce2\u3084\u30df\u30ea\u6ce2\u306a\u3069\u306e\u9ad8\u3044\u5468\u6ce2\u6570\u306e\u4fe1\u53f7\u3092\u6271\u3046\u534a\u5c0e\u4f53\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u306e\u7dcf\u79f0\u3002\u4e00\u822c\u306b\u3001\u5468\u6ce2\u6570\u3092\u9ad8\u304f\u3059\u308b\u3068\u6271\u3048\u308b\u96fb\u5727\uff08\u51fa\u529b\u96fb\u529b\uff09\u304c\u4f4e\u4e0b\u3059\u308b\u305f\u3081\u3001\u901a\u4fe1\u3084\u30ec\u30fc\u30c0\u30fc\u7528\u9014\u3067\u306f\u9ad8\u5468\u6ce2\u3068\u9ad8\u51fa\u529b\u306e\u4e21\u7acb\u304c\u91cd\u8981\u306a\u8ab2\u984c\u3068\u306a\u308b\u3002\u5f93\u6765\u306eSi\u3084GaAs\u3067\u306f\u6027\u80fd\u306b\u9650\u754c\u304c\u3042\u308a\u3001\u73fe\u5728\u3067\u306f\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u3067\u3042\u308bGaN\u7cfb\u6750\u6599\u304c\u9ad8\u5468\u6ce2\u30fb\u9ad8\u51fa\u529b\u30c7\u30d0\u30a4\u30b9\u306e\u4e3b\u6d41\u306b\u306a\u3063\u3066\u3044\u308b\u3002\u3055\u3089\u306b\u305d\u306e\u5148\u306e\u5c55\u958b\u3068\u3057\u3066\u3001\u30a6\u30eb\u30c8\u30e9\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u3067\u3042\u308bAlN\u7cfb\u6750\u6599\u3078\u306e\u671f\u5f85\u304c\u9ad8\u307e\u3063\u3066\u3044\u308b\u3002<\/span> <span style=\"font-size: 14px;\"><a href=\"#back02\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><a id=\"note06\"><\/a> <span style=\"color: #008000; font-weight: bold; font-size: 16px;\">\u6ce86) \u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53<\/span><br><span style=\"font-size: 16px;\">\u3000\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u3068\u306f\u3001\u96fb\u5b50\u304c\u4fa1\u96fb\u5b50\u5e2f\u304b\u3089\u4f1d\u5c0e\u5e2f\u3078\u79fb\u52d5\u3059\u308b\u305f\u3081\u306b\u5fc5\u8981\u306a\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u3053\u3068\u3067\u3001\u3053\u306e\u5024\u304c\u5927\u304d\u3044\u307b\u3069\u6750\u6599\u306f\u9ad8\u96fb\u5727\u3084\u9ad8\u6e29\u306b\u8010\u3048\u3084\u3059\u304f\u306a\u308b\u3002\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u306f\u3001\u5f93\u6765\u306e\u534a\u5c0e\u4f53\u6750\u6599\u3067\u3042\u308bSi\uff081.1 eV\uff09\u3084GaAs\uff081.4 eV\uff09\u3088\u308a\u3082\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u304c\u5e83\u3044\u534a\u5c0e\u4f53\u3092\u6307\u3059\u3002\u4ee3\u8868\u7684\u306a\u6750\u6599\u306b\u306f\u3001SiC\uff083.3 eV\uff09\u3084GaN\uff083.4 eV\uff09\u304c\u3042\u308a\u3001\u4e00\u822c\u306b3 eV\u7a0b\u5ea6\u306e\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u3092\u6301\u3064\u3002\u3053\u308c\u3089\u306e\u6750\u6599\u306f\u3001\u9ad8\u96fb\u5727\u30fb\u9ad8\u5468\u6ce2\u30fb\u9ad8\u52b9\u7387\u304c\u6c42\u3081\u3089\u308c\u308b\u5206\u91ce\u3067\u4e0d\u53ef\u6b20\u3067\u3042\u308b\u3002<\/span> <span style=\"font-size: 14px;\"><a href=\"#back03\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><a id=\"note07\"><\/a> <span style=\"color: #008000; font-weight: bold; font-size: 16px;\">\u6ce87) \u30a6\u30eb\u30c8\u30e9\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53<\/span><br><span style=\"font-size: 16px;\">\u3000\u304a\u304a\u3080\u306d4eV\u4ee5\u4e0a\u306e\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u3092\u6301\u3064\u6750\u6599\u3002\u4ee3\u8868\u4f8b\u3068\u3057\u3066\u306f\u3001AlN\uff086.0 eV\uff09\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\uff085.5 eV\uff09\u3001Ga2O3(4.8 eV)\u306a\u3069\u304c\u3042\u308b\u3002\u539f\u7406\u7684\u306b\u306f\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u3088\u308a\u3082\u9ad8\u96fb\u5727\u30fb\u9ad8\u5468\u6ce2\u30fb\u9ad8\u52b9\u7387\u304c\u6c42\u3081\u3089\u308c\u308b\u5206\u91ce\u3067\u9ad8\u3044\u6027\u80fd\u3092\u3082\u3064\u3053\u3068\u304c\u671f\u5f85\u3067\u304d\u308b\u3002<\/span> <span style=\"font-size: 14px;\"><a href=\"#back03\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><a id=\"note08\"><\/a> <span style=\"color: #008000; font-weight: bold; font-size: 16px;\">\u6ce88) \u683c\u5b50\u5b9a\u6570<\/span><br><span style=\"font-size: 16px;\">\u3000\u7d50\u6676\u306e\u57fa\u672c\u5358\u4f4d\u683c\u5b50\u306e\u8fba\u306e\u9577\u3055\u3002\u7d50\u6676\u69cb\u9020\u3092\u6c7a\u5b9a\u3059\u308b\u91cd\u8981\u306a\u30d1\u30e9\u30e1\u30fc\u30bf\u3002AlN\u3068GaN\u306ea\u8ef8\u306e\u683c\u5b50\u5b9a\u6570\u306f\u305d\u308c\u305e\u308c3.11\u212b\u30013.19\u212b\u3067\u3042\u308a\u3001\u683c\u5b50\u4e0d\u6574\u5408\u5ea6\u306f2.4%\u3067\u3042\u308b\u3002\u3053\u306e\u308f\u305a\u304b\u306a\u9055\u3044\u3067\u3082\u3001AlN\u4e0a\u306bGaN\u3092\u30b3\u30d2\u30fc\u30ec\u30f3\u30c8\u6210\u9577\u3055\u305b\u308b\u306e\u306f\u96e3\u3057\u3044\u3068\u3055\u308c\u3066\u3044\u308b\u3002\u3057\u304b\u3057\u5f53\u7814\u7a76\u30b0\u30eb\u30fc\u30d7\u3067\u306f\u3001\u72ec\u81ea\u6280\u8853\u306b\u3088\u308a\u3053\u306e\u8ab2\u984c\u3092\u514b\u670d\u3057\u3001\u30b3\u30d2\u30fc\u30ec\u30f3\u30c8\u6210\u9577\u3092\u5b9f\u73fe\u3057\u305f\u3002\u4e00\u65b9\u3067\u3001Si\u3001\u30b5\u30d5\u30a1\u30a4\u30e4\u3001SiC\u57fa\u677f\u3068GaN\u3068\u306e\u683c\u5b50\u4e0d\u6574\u5408\u5ea6\u306f\u305d\u308c\u305e\u308c17%\u300116%\u30013.8%\u3068\u3055\u3089\u306b\u5927\u304d\u304f\u3001GaN\u3092\u6210\u9577\u3055\u305b\u308b\u3068\u591a\u304f\u306e\u6b20\u9665\u304c\u5165\u308b\u3053\u3068\u304c\u77e5\u3089\u308c\u3066\u3044\u308b\u3002\u305d\u306e\u7d50\u679c\u3001\u30c7\u30d0\u30a4\u30b9\u6027\u80fd\u3084\u4fe1\u983c\u6027\u304c\u4f4e\u4e0b\u3059\u308b\u539f\u56e0\u306b\u306a\u308b\u3002<\/span> <span style=\"font-size: 14px;\"><a href=\"#back03\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><a id=\"note09\"><\/a> <span style=\"color: #008000; font-weight: bold; font-size: 16px;\">\u6ce89) IEDM\uff08<a href=\"https:\/\/www.ieee-iedm.org\">https:\/\/www.ieee-iedm.org<\/a>\uff09<\/span><br><span style=\"font-size: 16px;\">\u3000\u7c73\u56fd\u96fb\u6c17\u5b66\u4f1a\uff08IEEE\uff09\u304c\u4e3b\u50ac\u3059\u308b\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u5206\u91ce\u3067\u4e16\u754c\u6700\u9ad8\u5cf0\u306e\u56fd\u969b\u4f1a\u8b70\u3002\u96c6\u7a4d\u56de\u8def\u3001\u30a4\u30e1\u30fc\u30b8\u30bb\u30f3\u30b5\u30fc\u3001\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9\u3001\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u306a\u3069\u3001\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u6280\u8853\u306e\u6700\u5148\u7aef\u3092\u7db2\u7f85\u3055\u308c\u3066\u304a\u308a\u3001\u4e16\u754c\u4e2d\u306e\u4f01\u696d\u30fb\u5927\u5b66\u30fb\u7814\u7a76\u6a5f\u95a2\u304c\u6ce8\u76ee\u3057\u3066\u3044\u308b\u3002\u6bce\u5e7412\u6708\u306b\u7c73\u56fd\u30b5\u30f3\u30d5\u30e9\u30f3\u30b7\u30b9\u30b3\u3067\u958b\u50ac\u3055\u308c\u3001\u534a\u5c0e\u4f53\u696d\u754c\u306e\u672a\u6765\u3092\u65b9\u5411\u3065\u3051\u308b\u5834\u3068\u3057\u3066\u4f4d\u7f6e\u3065\u3051\u3089\u308c\u3066\u3044\u308b\u3002<\/span> <span style=\"font-size: 14px;\"><a href=\"#back04\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"font-size: 20px; font-weight: bold;\">\u3010\u8ad6\u6587\u60c5\u5831\u3011<\/span><\/p>\r\n<p><span style=\"font-size: 16px;\"> <b>\u96d1\u8a8c\u540d\uff1a<\/b><i>71st International Electron Device Meeting (IEDM) 2025<\/i><br><b>\u8ad6\u6587\u30bf\u30a4\u30c8\u30eb\uff1a<\/b>Low-Resistance and Current-Collapse-Free MOVPE-Grown Pseudomorphic AlN\/GaN\/AlN HEMTs on AlN substrates<br><b>\u8457\u8005\uff1a<\/b>TaeGi Lee<sup>1,2<\/sup>, Akira Yoshikawa<sup>1,2<\/sup>, Yoshihito Hagihara<sup>2<\/sup>, Sho Sugiyama<sup>1,2<\/sup>, Manabu Arai<sup>1<\/sup>, Yuji Ando<sup>1<\/sup>, Jun Suda<sup>1<\/sup>, Hiroshi Amano<sup>1<\/sup><br><sup>1<\/sup>\u540d\u53e4\u5c4b\u5927\u5b66\u3000\u672a\u6765\u6750\u6599\u30fb\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240(IMaSS)<br><sup>2<\/sup>\u65ed\u5316\u6210\u682a\u5f0f\u4f1a\u793e\u3000\u7814\u7a76\u30fb\u958b\u767a\u672c\u90e8\u3000\u5148\u7aef\u6280\u8853\u7814\u7a76\u6240\u3000\u6b21\u4e16\u4ee3\u5316\u5408\u7269\u534a\u5c0e\u4f53\u958b\u767a\u90e8<br><b>DOI\uff1a<\/b>\uff08Technical digest\u3068\u3057\u3066IEEE digital library\u306b\u63b2\u8f09\u5f8c\u4ed8\u4e0e\u4e88\u5b9a\uff09<br><\/span><\/p>\r\n<p>&nbsp;<\/p>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"font-size: 16px;\"> <a target=\"_blank\" href=\"https:\/\/www.nagoya-u.ac.jp\/researchinfo\/result\/2025\/12\/alnalnganaln.html\" rel=\"noopener\"> \u25c6\u540d\u53e4\u5c4b\u5927\u5b66 \u7814\u7a76\u6210\u679c\u767a\u4fe1\u30b5\u30a4\u30c8\u306f\u3053\u3061\u3089\uff1e\uff1e\uff1e<\/a> <\/span><\/p>\r\n<p><span style=\"font-size: 16px;\"> <a href=\"https:\/\/www.nagoya-u.ac.jp\/researchinfo\/result\/upload_images\/20251209_imass.pdf\" target=\"_blank\" rel=\"noopener\"> \u25c6\u540d\u53e4\u5c4b\u5927\u5b66\u306e\u30d7\u30ec\u30b9\u30ea\u30ea\u30fc\u30b9\uff08\u672c\u6587\uff09\u306f\u3053\u3061\u3089\uff1e\uff1e\uff1e<\/a> <\/span><\/p>\r\n<p>&nbsp;<\/p>\r\n<p><span style=\"font-size: 16px; font-weight: bold;\">\u7814\u7a76\u8005\u9023\u7d61\u5148<\/span><\/p>\r\n<hr style=\"margin-bottom: 16px;\" \/>\r\n<p><span style=\"font-size: 16px;\"> \u540d\u53e4\u5c4b\u5927\u5b66\u5927\u5b66\u9662\u5de5\u5b66\u7814\u7a76\u79d1\u3000\/\u3000\u672a\u6765\u6750\u6599\u30fb\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240(IMaSS)<br><a href=\"https:\/\/profs.provost.nagoya-u.ac.jp\/html\/100009776_ja.html\">\u6559\u6388\u3000\u9808\u7530 \u6df3<\/a><br>E-mail: suda.jun.t8[at]f.mail.nagoya-u.ac.jp <span style=\"font-size: 12px;\">\u203b\u30e1\u30fc\u30eb\u9001\u4fe1\u306e\u969b\u306f[at]\u3092@\u306b\u7f6e\u304d\u63db\u3048\u3066\u304f\u3060\u3055\u3044\u3002<\/span> <\/span><\/p>","protected":false},"excerpt":{"rendered":"<p>\u300a\u672c\u7814\u7a76\u306e\u30dd\u30a4\u30f3\u30c8\u300b \u91cf\u7523\u6027\u306b\u512a\u308c\u305fMOVPE\u6cd5\u6ce81) \u306b\u3088\u308a\u3001\u7a92\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08AlN\uff09\u57fa\u677f\u4e0a\u306b\u30b3\u30d2\u30fc\u30ec\u30f3\u30c8\u6210\u9577\u6ce82) \u3055\u305b\u305fAlN\/GaN\/AlN \u9ad8\u96fb\u5b50\u79fb\u52d5\u5ea6\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf(HEMT)\u6ce83) \u3092\u5b9f\u73fe\u3002 \u5f93\u6765\u306eGaN  [&hellip;]<\/p>\n","protected":false},"author":3,"featured_media":10970,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[2],"tags":[406,407,412,408,409,410,411],"class_list":["post-10974","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-research","tag-406","tag--rf","tag-412","tag-aln","tag-gan","tag-410","tag-hemt"],"acf":[],"aioseo_notices":[],"publishpress_future_action":{"enabled":false,"date":"2026-05-06 13:06:59","action":"change-status","newStatus":"draft","terms":[],"taxonomy":"category","extraData":[]},"publishpress_future_workflow_manual_trigger":{"enabledWorkflows":[]},"_links":{"self":[{"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/posts\/10974","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/comments?post=10974"}],"version-history":[{"count":14,"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/posts\/10974\/revisions"}],"predecessor-version":[{"id":10980,"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/posts\/10974\/revisions\/10980"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/media\/10970"}],"wp:attachment":[{"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/media?parent=10974"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/categories?post=10974"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/wp-json\/wp\/v2\/tags?post=10974"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}