{"id":10276,"date":"2025-04-09T10:27:59","date_gmt":"2025-04-09T01:27:59","guid":{"rendered":"https:\/\/www.imass.nagoya-u.ac.jp\/?p=10276"},"modified":"2025-11-05T16:07:09","modified_gmt":"2025-11-05T07:07:09","slug":"10276","status":"publish","type":"post","link":"https:\/\/www.imass.nagoya-u.ac.jp\/en\/research\/10276.html","title":{"rendered":"<strong>\u534a\u5c0e\u4f53\u306e\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3092\u201c\u4e00\u6c17\u901a\u8cab\u201d\u3067\u6700\u9069\u5316\uff01<\/strong><br \/><small>\uff5eAI\u6d3b\u7528\u306b\u3088\u308a\u4f01\u696d\u306e\u58c1\u3092\u8d8a\u3048\u30b9\u30d4\u30fc\u30c7\u30a3\u306a\u6027\u80fd\u6539\u5584\u306b\u8ca2\u732e\uff5e<\/small>"},"content":{"rendered":"<!-- \u8a18\u4e8b\u5192\u982d\u3002\u753b\u50cf\u3068\u7814\u7a76\u306e\u30dd\u30a4\u30f3\u30c8 -->\r\n<section class=\"e-box\"><!-- \u30c8\u30c3\u30d7\u753b\u50cf -->\r\n<p><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/04\/20250324_ujihara_1.jpg\" alt=\"\" width=\"1000\" height=\"585\" class=\"aligncenter size-full\" \/><\/p>\r\n<p>&nbsp;<\/p>\r\n<!-- \u672c\u7814\u7a76\u306e\u30dd\u30a4\u30f3\u30c8 -->\r\n<p><span style=\"font-size: 20px;\"><strong>\u300a\u672c\u7814\u7a76\u306e\u30dd\u30a4\u30f3\u30c8\u300b<\/strong><\/span><\/p>\r\n<a id=\"back01\"><\/a> <a id=\"back02\"><\/a>\r\n<div style=\"padding: 30px 30px 30px 54px; margin-bottom: 30px; border: 1px solid #333399; border-radius: 10px; background-color: #fafdff;\">\r\n<ul style=\"list-style-type: disc;\">\r\n<li><span style=\"font-size: 20px;\">Si\u30a6\u30a7\u30fc\u30cf\u88fd\u9020\u304b\u3089<a href=\"#note01\">CIS<\/a><sup>\u6ce81\uff09<\/sup>\u88fd\u9020\u307e\u3067\u306e\u4e00\u8cab\u3057\u305f\u30d7\u30ed\u30bb\u30b9\u5168\u4f53\u6700\u9069\u5316\u3092\u884c\u3063\u305f\u3002<\/span><\/li>\r\n<li><span style=\"font-size: 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href=\"https:\/\/profs.provost.nagoya-u.ac.jp\/html\/100000165_ja.html\">\u5b87\u6cbb\u539f \u5fb9 \u6559\u6388<\/a>\u3001\u7406\u5316\u5b66\u7814\u7a76\u6240\u9769\u65b0\u77e5\u80fd\u7d71\u5408\u7814\u7a76\u30bb\u30f3\u30bf\u30fc\u306e<a href=\"https:\/\/profs.provost.nagoya-u.ac.jp\/html\/100010005_ja.html\">\u6c93\u639b \u5065\u592a\u6717 \u5ba2\u54e1\u7814\u7a76\u54e1\uff08\u73fe \u540d\u53e4\u5c4b\u5927\u5b66\u672a\u6765\u6750\u6599\u30fb\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240 \u51c6\u6559\u6388\uff09<\/a>\u3001\u30b0\u30ed\u30fc\u30d0\u30eb\u30a6\u30a7\u30fc\u30cf\u30ba\u30fb\u30b8\u30e3\u30d1\u30f3\u682a\u5f0f\u4f1a\u793e\u306e\u6c38\u4e95 \u52c7\u592a \u53c2\u4e8b\u3001\u30a2\u30a4\u30af\u30ea\u30b9\u30bf\u30eb\u682a\u5f0f\u4f1a\u793e\u306e\u9ad9\u77f3 \u5c06\u8f1d \u4ee3\u8868\u53d6\u7de0\u5f79\u3001\u95a2 \u7fd4\u592a 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\u3089\u306e\u7814\u7a76\u30b0\u30eb\u30fc\u30d7\u306f\u3001<u>\u4eee\u60f3\u7a7a\u9593\u4e0a\u306b\u69cb\u7bc9\u3057\u305f\u30c7\u30b8\u30bf\u30eb\u30c4\u30a4\u30f3\u3092\u63a5\u7d9a\u3057\u3066\u9ad8\u901f\u306b\u6700\u9069\u5316\u3059\u308b\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\uff08\u30e1\u30bf\u30d5\u30a1\u30af\u30c8\u30ea\u30fc\uff09\u3092\u7528\u3044\u3066\u3001Si\u30a6\u30a7\u30fc\u30cf\u88fd\u9020\u304b\u3089CIS\u88fd\u9020\u307e\u3067\u306e\u4e00\u8cab\u3057\u305f\u30d7\u30ed\u30bb\u30b9\u5168\u4f53\u6700\u9069\u5316\u3092\u884c\u3044\u307e\u3057\u305f<\/u>\u3002<br>\u3000\u5148\u7aef\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u958b\u767a\u3067\u306f\u3001\u77ed\u671f\u9593\u3067\u306e\u6027\u80fd\u5411\u4e0a\u304c\u6c42\u3081\u3089\u308c\u307e\u3059\u304c\u3001\u5f93\u6765\u578b\u306e\u500b\u3005\u306e\u5de5\u7a0b\u306e\u6700\u9069\u5316\u3067\u306f\u9650\u754c\u304c\u3042\u308a\u307e\u3059\u3002\u7279\u306b\u8fd1\u5e74\u3001Si\u30a6\u30a7\u30fc\u30cf\u5185\u90e8\u306e\u4e0d\u7d14\u7269\u6fc3\u5ea6\u5206\u5e03\u3084\u6b20\u9665\u5bc6\u5ea6\u5206\u5e03\u3092\u30c7\u30d0\u30a4\u30b9\u69cb\u9020\u306b\u5408\u308f\u305b\u3066\u9069\u5207\u306b\u4f5c\u308a\u8fbc\u3080\u5fc5\u8981\u304c\u5224\u660e\u3057\u3001\u30d7\u30ed\u30bb\u30b9\u5168\u4f53\u3067\u306e\u6700\u9069\u5316\u304c\u91cd\u8981\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u3057\u304b\u3057\u3001\u4f01\u696d\u306e\u58c1\u3092\u8d8a\u3048\u3066\u3001\u30a6\u30a7\u30fc\u30cf\u88fd\u9020\u3068\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u3068\u304c\u4e00\u4f53\u3068\u306a\u3063\u3066\u6a5f\u5bc6\u6027\u306e\u9ad8\u3044\u60c5\u5831\u3092\u5171\u6709\u3057\u305f\u4e0a\u3067\u3001\u81a8\u5927\u306a\u30d7\u30ed\u30bb\u30b9\u30d1\u30e9\u30e1\u30fc\u30bf\u306e\u6700\u9069\u5316\u3092\u77ed\u6642\u9593\u3067\u884c\u3046\u3053\u3068\u306f\u56f0\u96e3\u3067\u3057\u305f\u3002<br>\u3000\u672c\u7814\u7a76\u3067\u306f\u3001Si\u30a6\u30a7\u30fc\u30cf\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u304b\u3089CIS\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u307e\u3067\u306e\u30c7\u30b8\u30bf\u30eb\u30c4\u30a4\u30f3\u3092\u4eee\u60f3\u7a7a\u9593\u4e0a\u306b\u69cb\u7bc9\u3057\u3066\u6700\u9069\u5316\u3059\u308b\u3053\u3068\u3067\u3001\u4f01\u696d\u306e\u58c1\u3092\u8d8a\u3048\u305f\u6700\u9069\u5316\u3092\u5b9f\u73fe\u3057\u307e\u3057\u305f\u3002\u3055\u3089\u306b\u5f93\u6765\u306e\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3092\u7528\u3044\u305f\u6700\u9069\u5316\u3068\u6bd4\u8f03\u3057\u3066\u3001\u8981\u3059\u308b\u6642\u9593\u3092\u7d041\/1000\u306b\u77ed\u7e2e\u3057\u307e\u3057\u305f\u3002\u672c\u6210\u679c\u306f\u3001\u4f01\u696d\u6a2a\u65ad\u3067\u306e\u6700\u9069\u5316\u306e\u5fc5\u8981\u6027\u3092\u5b9f\u8a3c\u3059\u308b\u3082\u306e\u3067\u3042\u308a\u3001\u307e\u305fCIS\u306e\u307f\u306a\u3089\u305a\u3055\u307e\u3056\u307e\u306a\u534a\u5c0e\u4f53\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9\u306b\u5171\u901a\u3057\u3066\u5c55\u958b\u53ef\u80fd\u306a\u65b9\u6cd5\u3067\u3059\u3002<br>\u3000\u672c\u7814\u7a76\u6210\u679c\u306f\u30012025\u5e743\u670817\u65e5\u306b\u7b2c72\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u306b\u3066\u767a\u8868\u3055\u308c\u307e\u3057\u305f\u3002 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<\/span><\/p>\r\n<!-- \u56f3 -->\r\n<p><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/04\/20250324_ujihara_2.jpg\" alt=\"\" width=\"960\" height=\"430\" class=\"aligncenter wp-image-11170 size-full\" \/><\/p>\r\n<!-- \u56f3\u306e\u8aac\u660e --> <a id=\"back03\"><\/a>\r\n<p style=\"text-align: left;\"><span style=\"font-size: 14px;\"><strong>\u56f31<\/strong>\u3000\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u5de5\u7a0b\u306e\u6a21\u5f0f\u56f3\u3002<a href=\"#note03\">\u7d50\u6676\u6b20\u9665<\/a><sup>\u6ce83\uff09<\/sup>\u5206\u5e03\u306e\u7cbe\u5bc6\u306a\u4f5c\u308a\u8fbc\u307f\u306e\u305f\u3081\u306b\u306f\u3001Si\u30a6\u30a7\u30fc\u30cf\u88fd\u9020\u304b\u3089\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u307e\u3067\u901a\u3058\u305f\u30d7\u30ed\u30bb\u30b9\u5168\u4f53\u306e\u6700\u9069\u5316\u304c\u5fc5\u8981\u3002<\/span><\/p>\r\n<\/section>\r\n<p>&nbsp;<\/p>\r\n<section class=\"e-box\"><!-- \u6bb5\u843d -->\r\n<p><span style=\"font-size: 16px;\">\u3000\u672c\u7814\u7a76\u3067\u306f\u3001\u6750\u6599\u304b\u3089\u30c7\u30d0\u30a4\u30b9\u307e\u3067\u4f01\u696d\u6a2a\u65ad\u3067\u30d7\u30ed\u30bb\u30b9\u3092\u6700\u9069\u5316\u3059\u308b\u3053\u3068\u306e\u6709\u52b9\u6027\u3092\u691c\u8a3c\u3059\u308b\u305f\u3081\u306b\u3001Si\u30a6\u30a7\u30fc\u30cf\u30e1\u30fc\u30ab\u30fc\u3067\u3042\u308b\u30b0\u30ed\u30fc\u30d0\u30eb\u30a6\u30a7\u30fc\u30cf\u30ba\u30fb\u30b8\u30e3\u30d1\u30f3\u682a\u5f0f\u4f1a\u793e\u3068\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u30e1\u30fc\u30ab\u30fc\u3067\u3042\u308b\u30bd\u30cb\u30fc\u30bb\u30df\u30b3\u30f3\u30c0\u30af\u30bf\u30de\u30cb\u30e5\u30d5\u30a1\u30af\u30c1\u30e3\u30ea\u30f3\u30b0\u682a\u5f0f\u4f1a\u793e\u304c\u5171\u540c\u3067\u3001\u5148\u7aefCMOS\u30a4\u30e1\u30fc\u30b8\u30bb\u30f3\u30b5\u30fc\uff08CIS\uff09\u306e\u30ce\u30a4\u30ba\u7279\u6027\u6539\u5584\u3092\u30e2\u30c7\u30eb\u30b1\u30fc\u30b9\u3068\u3057\u3001Si\u30a6\u30a7\u30fc\u30cf\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u304b\u3089CIS\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u307e\u3067\u306e\u4e00\u8cab\u3057\u305f\u30d7\u30ed\u30bb\u30b9\u5168\u4f53\u6700\u9069\u5316\u3092\u884c\u3044\u307e\u3057\u305f\u3002\u3053\u306e\u6700\u9069\u5316\u3092\u884c\u3046\u8a08\u7b97\u6280\u8853\u3092\u958b\u767a\u3059\u308b\u305f\u3081\u306b\u3001\u30a2\u30a4\u30af\u30ea\u30b9\u30bf\u30eb\u682a\u5f0f\u4f1a\u793e\u304c\u30c7\u30b8\u30bf\u30eb\u30c4\u30a4\u30f3\u3092\u69cb\u7bc9\u3057\u3001\u7406\u5316\u5b66\u7814\u7a76\u6240\u304a\u3088\u3073\u540d\u53e4\u5c4b\u5927\u5b66\u304c\u52b9\u7387\u7684\u306a\u6700\u9069\u5316\u30a2\u30eb\u30b4\u30ea\u30ba\u30e0\u306e\u958b\u767a\u3092\u884c\u3044\u307e\u3057\u305f\u3002\u307e\u305f\u3001\u3053\u306e\u3088\u3046\u306a\u30d7\u30ed\u30bb\u30b9\u5168\u4f53\u6700\u9069\u5316\u306e\u6280\u8853\u3092CIS\u306e\u8ab2\u984c\u89e3\u6c7a\u306e\u307f\u306b\u3068\u3069\u3081\u305a\u3001\u3055\u307e\u3056\u307e\u306a\u534a\u5c0e\u4f53\u6750\u6599\u304b\u3089\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u3078\u306e\u62e1\u5f35\u3055\u305b\u308b\u305f\u3081\u306b\u3001\u30a2\u30a4\u30af\u30ea\u30b9\u30bf\u30eb\u682a\u5f0f\u4f1a\u793e\u304c\u30d7\u30ed\u30bb\u30b9\u5168\u4f53\u6700\u9069\u5316\u306e\u305f\u3081\u306e\u65b0\u305f\u306a\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\uff08\u30e1\u30bf\u30d5\u30a1\u30af\u30c8\u30ea\u30fc\uff09\u3092\u69cb\u7bc9\u3057\u307e\u3057\u305f\u3002 <\/span><\/p>\r\n<!-- \u56f3 -->\r\n<p><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/04\/20250324_ujihara_1.jpg\" alt=\"\" width=\"1000\" height=\"585\" class=\"aligncenter wp-image-11170 size-full\" \/><\/p>\r\n<!-- \u56f3\u306e\u8aac\u660e -->\r\n<p style=\"text-align: center;\"><span style=\"font-size: 14px;\"><strong>\u56f32<\/strong>\u3000\u30e1\u30bf\u30d5\u30a1\u30af\u30c8\u30ea\u30fc\u306e\u6a21\u5f0f\u56f3\u3002\u4eee\u60f3\u7a7a\u9593\u4e0a\u306b\u69cb\u7bc9\u3057\u305f\u30c7\u30b8\u30bf\u30eb\u30c4\u30a4\u30f3\u3092\u63a5\u7d9a\u3057\u3066\u3001\u4f01\u696d\u3092\u8d85\u3048\u305f\u5168\u4f53\u6700\u9069\u5316\u3092\u884c\u3046\u3002<\/span><\/p>\r\n<\/section>\r\n<section class=\"e-box\"><!-- \u6bb5\u843d -->\r\n<p><span style=\"font-size: 16px;\">\u3000<b>\u56f33<\/b>\u306b\u6700\u9069\u5316\u7d50\u679c\u306e\u4e00\u4f8b\u3092\u793a\u3057\u307e\u3059\u3002BMD(Bulk Micro Defect)\u3068\u547c\u3070\u308c\u308b\u6b20\u9665\u306e\u5bc6\u5ea6\u5206\u5e03\u3092\u7406\u60f3\u7684\u306a\u5206\u5e03\u306b\u8fd1\u3065\u3051\u308b\u305f\u3081\u306e\u76ee\u7684\u95a2\u6570\uff08BMD_bulk\u304a\u3088\u3073BMD_surface\uff09\u3001\u304a\u3088\u3073\u3001\u30c9\u30fc\u30d1\u30f3\u30c8\u6fc3\u5ea6\u5206\u5e03\u3092\u7406\u60f3\u7684\u306a\u5206\u5e03\u306b\u8fd1\u3065\u3051\u308b\u305f\u3081\u306e\u76ee\u7684\u95a2\u6570\uff08Dopant\uff09\u306b\u5bfe\u3057\u3066\u6700\u9069\u5316\u3092\u884c\u3063\u305f\u7d50\u679c\u3067\u3059\u3002\u7e26\u8ef8\u306f\u5024\u304c1\u306b\u8fd1\u3044\u307b\u3069\u7406\u60f3\u5206\u5e03\u306b\u8fd1\u3044\u3053\u3068\u3092\u8868\u3057\u307e\u3059\u3002\u6a2a\u8ef8\u306f\u6700\u9069\u5316\u306b\u304a\u3051\u308b\u8a66\u884c\u56de\u6570\uff08\u8a08\u7b97\u56de\u6570\uff09\u3067\u3059\u3002\u3053\u306e\u6700\u9069\u5316\u3067\u306f\u3001\u6700\u9069\u6761\u4ef6\u3092\u53d6\u5f97\u3059\u308b\uff08\u76ee\u7684\u95a2\u6570\u306e\u5411\u4e0a\u304c\u53ce\u675f\u3059\u308b\uff09\u307e\u3067\u30011\u4e07\u56de\u4ee5\u4e0a\u306e\u6761\u4ef6\u63a2\u7d22\u304c\u5fc5\u8981\u3067\u3042\u308b\u3053\u3068\u304c\u5206\u304b\u308a\u307e\u3059\u3002\u3053\u306e1\u4e07\u56de\u306e\u6761\u4ef6\u63a2\u7d22\u3092\u5f93\u6765\u306e\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\uff08Sim\uff09\u3092\u7528\u3044\u3066\u884c\u3063\u305f\u5834\u5408\u306f\u30011\u5e74\u3092\u8981\u3057\u307e\u3059\u3002\u88fd\u54c1\u958b\u767a\u306e\u305f\u3081\u306e\u6700\u9069\u5316\u306f\u3001\u5236\u7d04\u6761\u4ef6\u306a\u3069\u3092\u5909\u66f4\u3057\u3066\u4f55\u5ea6\u3082\u884c\u3046\u5fc5\u8981\u304c\u3042\u308b\u305f\u3081\u3001\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3092\u7528\u3044\u305f\u6700\u9069\u5316\u3067\u306f\u6570\u5e74\u3092\u8981\u3057\u3066\u3057\u307e\u3044\u3001\u6700\u9069\u5316\u671f\u9593\u3092\u88fd\u54c1\u958b\u767a\u30b5\u30a4\u30af\u30eb\u306b\u53ce\u3081\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u305b\u3093\u3002\u4e00\u65b9\u3001\u4eca\u56de\u958b\u767a\u3057\u305f\u30c7\u30b8\u30bf\u30eb\u30c4\u30a4\u30f3\uff08AI\uff09\u3092\u7528\u3044\u305f\u6700\u9069\u5316\u3067\u306f\u30011\u4e07\u56de\u306e\u6761\u4ef6\u63a2\u7d22\u30928\u6642\u9593\u3067\u5b8c\u4e86\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u3053\u306e\u3088\u3046\u306a\u9ad8\u901f\u306a\u30c7\u30b8\u30bf\u30eb\u30c4\u30a4\u30f3\u3092\u7528\u3044\u308b\u3053\u3068\u3067\u3001Si\u30a6\u30a7\u30fc\u30cf\u88fd\u9020\u304b\u3089CIS\u88fd\u9020\u307e\u3067\u306e\u6700\u9069\u306a\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u3092\u77ed\u671f\u9593\u3067\u53d6\u5f97\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3057\u305f\u3002 <\/span><\/p>\r\n<!-- \u56f3 -->\r\n<p><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/www.imass.nagoya-u.ac.jp\/wp\/wp-content\/uploads\/2025\/04\/20250324_ujihara_3.jpg\" alt=\"\" width=\"624\" height=\"503\" class=\"aligncenter wp-image-11170 size-full\" \/><\/p>\r\n<!-- \u56f3\u306e\u8aac\u660e -->\r\n<p style=\"text-align: center;\"><span style=\"font-size: 14px;\"><strong>\u56f33<\/strong>\u3000\u6700\u9069\u5316\u306e\u7d50\u679c\u3002\u7e26\u8ef8\u306e\u76ee\u7684\u95a2\u6570\u306e\u5024\u304c1\u306b\u8fd1\u3044\u307b\u3069\u7406\u60f3\u306b\u8fd1\u3044\u3002<\/span><\/p>\r\n<\/section>\r\n<!-- \u30b9\u30ad\u30de  -->\r\n<p>&nbsp;<\/p>\r\n<!-- \u7814\u7a76\u306e\u6210\u679c -->\r\n<p><strong><span style=\"font-size: 20px;\">\u3010\u6210\u679c\u306e\u610f\u7fa9\u3011<\/span><br><\/strong><\/p>\r\n<hr \/>\r\n<section class=\"e-box\"><!-- \u6bb5\u843d -->\r\n<p><span style=\"font-size: 16px;\">\u3000\u672c\u7814\u7a76\u306b\u304a\u3044\u3066\u5f97\u3089\u308c\u305f\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306e\u5168\u4f53\u6700\u9069\u5316\u306e\u6210\u679c\u306f\u3001\u4f01\u696d\u6a2a\u65ad\u3067\u306e\u6700\u9069\u5316\u306e\u5fc5\u8981\u6027\u3092\u5b9f\u8a3c\u3059\u308b\u3082\u306e\u3067\u3059\u3002\u672c\u624b\u6cd5\u306f\u3001CIS\u306e\u307f\u306a\u3089\u305a\u3055\u307e\u3056\u307e\u306a\u534a\u5c0e\u4f53\u6750\u6599\u304b\u3089\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306b\u5171\u901a\u3057\u3066\u5c55\u958b\u53ef\u80fd\u306a\u65b9\u6cd5\u3067\u3059\u3002\u307e\u305f\u3001\u6a5f\u5bc6\u6027\u306e\u9ad8\u3044\u30d7\u30ed\u30bb\u30b9\u30c7\u30fc\u30bf\u3084AI\u30e2\u30c7\u30eb\u306e\u79d8\u533f\u3092\u3044\u304b\u306b\u7dad\u6301\u3057\u305f\u72b6\u614b\u3067\u4f01\u696d\u6a2a\u65ad\u3067\u306e\u5168\u4f53\u6700\u9069\u5316\u3092\u5b9f\u73fe\u3059\u308b\u304b\u304c\u4eca\u5f8c\u306e\u8ab2\u984c\u3067\u3059\u3002<\/span><\/p>\r\n<\/section>\r\n<!-- \u30b9\u30ad\u30de  -->\r\n<p>&nbsp;<\/p>\r\n<!-- \u7814\u7a76\u30b5\u30dd\u30fc\u30c8\u306e\u8868\u8a18  -->\r\n<div style=\"padding: 30px; margin-bottom: 30px; border: 1px solid #333399; border-radius: 10px; background-color: #fafdff;\">\r\n<p>\u672c\u7814\u7a76\u306f\u3001\uff2e\uff25\uff24\uff2f\uff08\u56fd\u7acb\u7814\u7a76\u958b\u767a\u6cd5\u4eba\u65b0\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u7523\u696d\u6280\u8853\u7dcf\u5408\u958b\u767a\u6a5f\u69cb\uff09\u306e\u59d4\u8a17\u696d\u52d9\u3067\u3001\u4ee4\u548c\uff15\u5e74\u5ea6\u304b\u3089\u4ee4\u548c\uff16\u5e74\u5ea6\u306b\u300c\uff2e\uff25\uff24\uff2f\u5148\u5c0e\u7814\u7a76\u30d7\u30ed\u30b0\u30e9\u30e0\uff0f\u65b0\u7523\u696d\u30fb\u9769\u65b0\u6280\u8853\u5275\u51fa\u306b\u5411\u3051\u305f\u5148\u5c0e\u7814\u7a76\u30d7\u30ed\u30b0\u30e9\u30e0\uff0f\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u30e1\u30bf\u30d5\u30a1\u30af\u30c8\u30ea\u30fc\u306e\u57fa\u76e4\u6280\u8853\u958b\u767a\u300d\u3068\u3057\u3066\u884c\u308f\u308c\u305f\u3082\u306e\u3067\u3059\u3002<\/p>\r\n<\/div>\r\n<p>&nbsp;<\/p>\r\n<!-- \u7528\u8a9e\u8aac\u660e -->\r\n<p><strong><span style=\"font-size: 20px;\">\u3010\u7528\u8a9e\u8aac\u660e\u3011<\/span><\/strong><\/p>\r\n<hr \/>\r\n<section class=\"e-box\">\r\n<p><a id=\"note01\"><\/a><span style=\"color: #008000;\"><strong><span style=\"font-size: 16px;\">\u6ce81\uff09CIS\uff1a<\/span><\/strong><\/span><br><span style=\"font-size: 16px;\">\u3000CMOS\u30a4\u30e1\u30fc\u30b8\u30bb\u30f3\u30b5\u30fc\u3092\u6307\u3057\u3001\u30ab\u30e1\u30e9\u306e\u64ae\u50cf\u7d20\u5b50\u306e\u3053\u3068\u3002\u30b9\u30de\u30fc\u30c8\u30d5\u30a9\u30f3\u3001\u30c7\u30b8\u30bf\u30eb\u30ab\u30e1\u30e9\u3001\u76e3\u8996\u30ab\u30e1\u30e9\u3001\u7523\u696d\u7528\u30bb\u30f3\u30b5\u30fc\u306a\u3069\u3001\u591a\u69d8\u306a\u7528\u9014\u3067\u7528\u3044\u3089\u308c\u3066\u3044\u308b\u3002<\/span><span style=\"font-size: 14px;\"><a href=\"#back01\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><a id=\"note02\"><\/a><span style=\"color: #008000;\"><strong><span style=\"font-size: 16px;\">\u6ce82\uff09\u30c7\u30b8\u30bf\u30eb\u30c4\u30a4\u30f3\uff1a<\/span><\/strong><\/span><br><span style=\"font-size: 16px;\">\u3000\u30b3\u30f3\u30d4\u30e5\u30fc\u30bf\u5185\u306b\u69cb\u7bc9\u3055\u308c\u305f\u5b9f\u969b\u306e\u5de5\u7a0b\u306e\u30e2\u30c7\u30eb\u3002<\/span><span style=\"font-size: 14px;\"><a href=\"#back02\">\uff08\u2191 \u672c\u6587\u306b\u623b\u308b\uff09<\/a><\/span><\/p>\r\n<p><a id=\"note03\"><\/a><span style=\"color: #008000;\"><strong><span style=\"font-size: 16px;\">\u6ce83\uff09\u7d50\u6676\u6b20\u9665\uff1a<\/span><\/strong><\/span><br><span style=\"font-size: 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\u5fb9<sup>1,4<\/sup><br>(1.\u30a2\u30a4\u30af\u30ea\u30b9\u30bf\u30eb\u30012.\u30b0\u30ed\u30fc\u30d0\u30eb\u30a6\u30a7\u30fc\u30cf\u30ba\u30fb\u30b8\u30e3\u30d1\u30f3\u30013.\u30bd\u30cb\u30fc\u30bb\u30df\u30b3\u30f3\u30c0\u30af\u30bf\u30de\u30cb\u30e5\u30d5\u30a1\u30af\u30c1\u30e3\u30ea\u30f3\u30b0\u30014.\u540d\u5927)<\/p>\r\n<p style=\"font-size: 16px;\"><span>17a-K505-3<\/span><br>\u534a\u5c0e\u4f53\u71b1\u51e6\u7406\u6761\u4ef6\u306e\u6700\u9069\u5316\u306b\u304a\u3051\u308b\u65e2\u5b58\u6761\u4ef6\u3092\u8003\u616e\u3057\u305f\u76ee\u7684\u95a2\u6570\u306e\u691c\u8a0e<br>\u7b20\u539f \u4eae\u592a\u90ce<sup>1<\/sup>\u3001\u3007\u6c93\u639b \u5065\u592a\u6717<sup>1,2<\/sup>\u3001\u539f\u7530 \u4fca\u592a<sup>1<\/sup>\u3001\u5b87\u6cbb\u539f \u5fb9<sup>1<\/sup>\u3001\u95a2 \u7fd4\u592a<sup>3<\/sup>\u3001\u9ad8\u77f3 \u5c06\u6689<sup>3<\/sup>\u3001\u6c38\u4e95 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\u7814\u7a76\u8005\u9023\u7d61\u5148  -->\r\n<h4><span style=\"font-size: 16px;\">\u7814\u7a76\u8005\u9023\u7d61\u5148<\/span><\/h4>\r\n<p>\u6771\u6d77\u56fd\u7acb\u5927\u5b66\u6a5f\u69cb \u540d\u53e4\u5c4b\u5927\u5b66<br>\u672a\u6765\u6750\u6599\u30fb\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240<br>\u6559\u6388\u3000\u5b87\u6cbb\u539f\u3000\u5fb9\uff08<a href=\"https:\/\/ujihara.material.nagoya-u.ac.jp\/\">\u5b87\u6cbb\u539f\u7814\u7a76\u5ba4<\/a>\uff09<br>E-mail: ujihara[at]nagoya-u.jp <br><span style=\"font-size: 12px;\">\u203b\u30e1\u30fc\u30eb\u9001\u4fe1\u306e\u969b\u306f[at]\u3092@\u306b\u7f6e\u304d\u63db\u3048\u3066\u304f\u3060\u3055\u3044\u3002<\/span><\/p>\r\n<p>\u6771\u6d77\u56fd\u7acb\u5927\u5b66\u6a5f\u69cb \u540d\u53e4\u5c4b\u5927\u5b66<br>\u672a\u6765\u6750\u6599\u30fb\u30b7\u30b9\u30c6\u30e0\u7814\u7a76\u6240<br>\u51c6\u6559\u6388\u3000\u6c93\u639b\u3000\u5065\u592a\u6717<br>E-mail: kutsukake.kentaro.c3[at]f.mail.nagoya-u.ac.jp<br><span style=\"font-size: 12px;\">\u203b\u30e1\u30fc\u30eb\u9001\u4fe1\u306e\u969b\u306f[at]\u3092@\u306b\u7f6e\u304d\u63db\u3048\u3066\u304f\u3060\u3055\u3044\u3002<\/span><\/p>","protected":false},"excerpt":{"rendered":"<p>&nbsp; \u300a\u672c\u7814\u7a76\u306e\u30dd\u30a4\u30f3\u30c8\u300b Si\u30a6\u30a7\u30fc\u30cf\u88fd\u9020\u304b\u3089CIS\u6ce81\uff09\u88fd\u9020\u307e\u3067\u306e\u4e00\u8cab\u3057\u305f\u30d7\u30ed\u30bb\u30b9\u5168\u4f53\u6700\u9069\u5316\u3092\u884c\u3063\u305f\u3002 \u5404\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306e\u30c7\u30b8\u30bf\u30eb\u30c4\u30a4\u30f3\u6ce82\uff09\u3092\u63a5\u7d9a\u3057\u3066\u3001\u4eee\u60f3\u7a7a\u9593\u4e0a\u3067\u9ad8\u901f\u306b\u6700\u9069\u5316\u3002 \u4f01\u696d\u6a2a\u65ad\u306e\u305f\u3081\u306e\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9 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