Research Facility for Advanced Science and Technology

Home>Organization>Research Facility for Advanced Science and Technology

Research Facility for Advanced Science and Technology

The clean rooms and other laboratories of the Research Facility for Advanced Science and Technology are equipped with molecular beam epitaxy, chemical vapor deposition(CVD), a sputtering system, and other film deposition equipment; a mask aligner, electron-beam lithography, inductive coupled plasma(ICP) etching, and other micro-fabrication equipment; scanning electron microscopy(SEM), electron spectroscopy for chemical analysis(ESCA), an atomic force microscope, an X-ray diffractometer, and other analytical equipment, as well as a wide range of other leading-edge equipment u sed in a wide array of research operations ranging from thin-film deposition of various materials to micro- and nanofabrication and material characterization. Furthermore, this facility is being used to carry out the Nanofabrication Platform Consortium Project supported by the Japanese Ministry of Education, Culture, Sports, Science and Technology(MEXT), providing technical support on nanomaterial processing and nano fabrication for numerous researchers by utilizing multiuser instruments.

先端技術共同研究施設

Micro fabrication room(Clean room)

Movies

Short version (1 min.)
Long version (6 min. 33 sec.)
show member
hide member
Member
OHNO, Yutaka
Professor
OHNO, Yutaka Lab
Director
IWATA, Satoshi
Professor
NAKATSUKA, Osamu
Professor
KATO, Takeshi
Associate Professor
MATSUNAGA, Masahiro
Assistant Professor
OSHIMA, Daiki
Designated Assistant Professor